JPS634997Y2 - - Google Patents

Info

Publication number
JPS634997Y2
JPS634997Y2 JP1981089311U JP8931181U JPS634997Y2 JP S634997 Y2 JPS634997 Y2 JP S634997Y2 JP 1981089311 U JP1981089311 U JP 1981089311U JP 8931181 U JP8931181 U JP 8931181U JP S634997 Y2 JPS634997 Y2 JP S634997Y2
Authority
JP
Japan
Prior art keywords
sample
airtight chamber
chamber
gas
partition wall
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1981089311U
Other languages
English (en)
Japanese (ja)
Other versions
JPS57199839U (OSRAM
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1981089311U priority Critical patent/JPS634997Y2/ja
Publication of JPS57199839U publication Critical patent/JPS57199839U/ja
Application granted granted Critical
Publication of JPS634997Y2 publication Critical patent/JPS634997Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Sampling And Sample Adjustment (AREA)
JP1981089311U 1981-06-17 1981-06-17 Expired JPS634997Y2 (OSRAM)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1981089311U JPS634997Y2 (OSRAM) 1981-06-17 1981-06-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1981089311U JPS634997Y2 (OSRAM) 1981-06-17 1981-06-17

Publications (2)

Publication Number Publication Date
JPS57199839U JPS57199839U (OSRAM) 1982-12-18
JPS634997Y2 true JPS634997Y2 (OSRAM) 1988-02-10

Family

ID=29884459

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1981089311U Expired JPS634997Y2 (OSRAM) 1981-06-17 1981-06-17

Country Status (1)

Country Link
JP (1) JPS634997Y2 (OSRAM)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5807995B2 (ja) * 2010-03-23 2015-11-10 三谷セキサン株式会社 杭穴根固め部の未固結試料の養生方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4310614A (en) * 1979-03-19 1982-01-12 Xerox Corporation Method and apparatus for pretreating and depositing thin films on substrates

Also Published As

Publication number Publication date
JPS57199839U (OSRAM) 1982-12-18

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