JPS6348934Y2 - - Google Patents
Info
- Publication number
- JPS6348934Y2 JPS6348934Y2 JP2259383U JP2259383U JPS6348934Y2 JP S6348934 Y2 JPS6348934 Y2 JP S6348934Y2 JP 2259383 U JP2259383 U JP 2259383U JP 2259383 U JP2259383 U JP 2259383U JP S6348934 Y2 JPS6348934 Y2 JP S6348934Y2
- Authority
- JP
- Japan
- Prior art keywords
- sample stage
- spring
- stage
- sample
- spring receiver
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000007246 mechanism Effects 0.000 claims description 13
- 239000000758 substrate Substances 0.000 description 3
- 230000006835 compression Effects 0.000 description 2
- 238000007906 compression Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000001000 micrograph Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2259383U JPS59129160U (ja) | 1983-02-18 | 1983-02-18 | 試料ステ−ジの支持機構 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2259383U JPS59129160U (ja) | 1983-02-18 | 1983-02-18 | 試料ステ−ジの支持機構 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59129160U JPS59129160U (ja) | 1984-08-30 |
| JPS6348934Y2 true JPS6348934Y2 (enExample) | 1988-12-15 |
Family
ID=30153686
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2259383U Granted JPS59129160U (ja) | 1983-02-18 | 1983-02-18 | 試料ステ−ジの支持機構 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59129160U (enExample) |
-
1983
- 1983-02-18 JP JP2259383U patent/JPS59129160U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59129160U (ja) | 1984-08-30 |
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