JPS6130376B2 - - Google Patents

Info

Publication number
JPS6130376B2
JPS6130376B2 JP55143892A JP14389280A JPS6130376B2 JP S6130376 B2 JPS6130376 B2 JP S6130376B2 JP 55143892 A JP55143892 A JP 55143892A JP 14389280 A JP14389280 A JP 14389280A JP S6130376 B2 JPS6130376 B2 JP S6130376B2
Authority
JP
Japan
Prior art keywords
stage
axis
spring
action
point
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP55143892A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5767274A (en
Inventor
Tadao Koyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Denshi KK filed Critical Nihon Denshi KK
Priority to JP55143892A priority Critical patent/JPS5767274A/ja
Publication of JPS5767274A publication Critical patent/JPS5767274A/ja
Publication of JPS6130376B2 publication Critical patent/JPS6130376B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Microscoopes, Condenser (AREA)
  • Vibration Prevention Devices (AREA)
JP55143892A 1980-10-15 1980-10-15 Precision fine adjustment unit Granted JPS5767274A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55143892A JPS5767274A (en) 1980-10-15 1980-10-15 Precision fine adjustment unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55143892A JPS5767274A (en) 1980-10-15 1980-10-15 Precision fine adjustment unit

Publications (2)

Publication Number Publication Date
JPS5767274A JPS5767274A (en) 1982-04-23
JPS6130376B2 true JPS6130376B2 (enExample) 1986-07-12

Family

ID=15349461

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55143892A Granted JPS5767274A (en) 1980-10-15 1980-10-15 Precision fine adjustment unit

Country Status (1)

Country Link
JP (1) JPS5767274A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3544884B2 (ja) * 1999-02-25 2004-07-21 株式会社東芝 荷電粒子ビーム照射装置

Also Published As

Publication number Publication date
JPS5767274A (en) 1982-04-23

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