JPS6348598B2 - - Google Patents

Info

Publication number
JPS6348598B2
JPS6348598B2 JP58233490A JP23349083A JPS6348598B2 JP S6348598 B2 JPS6348598 B2 JP S6348598B2 JP 58233490 A JP58233490 A JP 58233490A JP 23349083 A JP23349083 A JP 23349083A JP S6348598 B2 JPS6348598 B2 JP S6348598B2
Authority
JP
Japan
Prior art keywords
alcohol
drying
chamber
cleaning
washing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP58233490A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60125282A (ja
Inventor
Fukusaburo Tokoroyama
Seiji Sunayama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TASU GIJUTSU KENKYUSHO JUGEN
Original Assignee
TASU GIJUTSU KENKYUSHO JUGEN
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TASU GIJUTSU KENKYUSHO JUGEN filed Critical TASU GIJUTSU KENKYUSHO JUGEN
Priority to JP58233490A priority Critical patent/JPS60125282A/ja
Publication of JPS60125282A publication Critical patent/JPS60125282A/ja
Publication of JPS6348598B2 publication Critical patent/JPS6348598B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Cleaning By Liquid Or Steam (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
JP58233490A 1983-12-13 1983-12-13 無塵洗浄乾燥装置 Granted JPS60125282A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58233490A JPS60125282A (ja) 1983-12-13 1983-12-13 無塵洗浄乾燥装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58233490A JPS60125282A (ja) 1983-12-13 1983-12-13 無塵洗浄乾燥装置

Publications (2)

Publication Number Publication Date
JPS60125282A JPS60125282A (ja) 1985-07-04
JPS6348598B2 true JPS6348598B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-09-29

Family

ID=16955824

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58233490A Granted JPS60125282A (ja) 1983-12-13 1983-12-13 無塵洗浄乾燥装置

Country Status (1)

Country Link
JP (1) JPS60125282A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6218037A (ja) * 1985-07-17 1987-01-27 Wakomu:Kk パススル−ル−ム
JPS62158325A (ja) * 1985-12-28 1987-07-14 Tadahiro Omi 薬液槽の収納ケ−ス
JPH0682647B2 (ja) * 1986-02-21 1994-10-19 日立東京エレクトロニクス株式会社 処理装置
JPH0448871Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1987-03-05 1992-11-17
JPS6443384A (en) * 1987-08-12 1989-02-15 Hitachi Ltd Steam washing method and washer

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5673540A (en) * 1979-11-16 1981-06-18 Japan Fuirudo Kk Method of preventing solvent diffusion in cleaning vessel
JPS5789486A (en) * 1980-11-26 1982-06-03 Daikin Ind Ltd Washing and drying method
JPS5855888Y2 (ja) * 1981-10-01 1983-12-22 文雄 政石 バ−ベキュ−用具

Also Published As

Publication number Publication date
JPS60125282A (ja) 1985-07-04

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