JPS60125282A - 無塵洗浄乾燥装置 - Google Patents

無塵洗浄乾燥装置

Info

Publication number
JPS60125282A
JPS60125282A JP58233490A JP23349083A JPS60125282A JP S60125282 A JPS60125282 A JP S60125282A JP 58233490 A JP58233490 A JP 58233490A JP 23349083 A JP23349083 A JP 23349083A JP S60125282 A JPS60125282 A JP S60125282A
Authority
JP
Japan
Prior art keywords
alcohol
drying
chamber
cleaning
washing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58233490A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6348598B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
野老山　福三郎
砂山　誠治
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TASU GIJUTSU KENKYUSHO KK
Original Assignee
TASU GIJUTSU KENKYUSHO KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TASU GIJUTSU KENKYUSHO KK filed Critical TASU GIJUTSU KENKYUSHO KK
Priority to JP58233490A priority Critical patent/JPS60125282A/ja
Publication of JPS60125282A publication Critical patent/JPS60125282A/ja
Publication of JPS6348598B2 publication Critical patent/JPS6348598B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Cleaning By Liquid Or Steam (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
JP58233490A 1983-12-13 1983-12-13 無塵洗浄乾燥装置 Granted JPS60125282A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58233490A JPS60125282A (ja) 1983-12-13 1983-12-13 無塵洗浄乾燥装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58233490A JPS60125282A (ja) 1983-12-13 1983-12-13 無塵洗浄乾燥装置

Publications (2)

Publication Number Publication Date
JPS60125282A true JPS60125282A (ja) 1985-07-04
JPS6348598B2 JPS6348598B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-09-29

Family

ID=16955824

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58233490A Granted JPS60125282A (ja) 1983-12-13 1983-12-13 無塵洗浄乾燥装置

Country Status (1)

Country Link
JP (1) JPS60125282A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6218037A (ja) * 1985-07-17 1987-01-27 Wakomu:Kk パススル−ル−ム
JPS62158325A (ja) * 1985-12-28 1987-07-14 Tadahiro Omi 薬液槽の収納ケ−ス
JPS62195128A (ja) * 1986-02-21 1987-08-27 Hitachi Tokyo Electron Co Ltd 処理装置
JPS63141690U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1987-03-05 1988-09-19
JPS6443384A (en) * 1987-08-12 1989-02-15 Hitachi Ltd Steam washing method and washer

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5673540A (en) * 1979-11-16 1981-06-18 Japan Fuirudo Kk Method of preventing solvent diffusion in cleaning vessel
JPS5789486A (en) * 1980-11-26 1982-06-03 Daikin Ind Ltd Washing and drying method
JPS5854236U (ja) * 1981-10-01 1983-04-13 政石　文雄 バ−ベキュ−用具

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5673540A (en) * 1979-11-16 1981-06-18 Japan Fuirudo Kk Method of preventing solvent diffusion in cleaning vessel
JPS5789486A (en) * 1980-11-26 1982-06-03 Daikin Ind Ltd Washing and drying method
JPS5854236U (ja) * 1981-10-01 1983-04-13 政石　文雄 バ−ベキュ−用具

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6218037A (ja) * 1985-07-17 1987-01-27 Wakomu:Kk パススル−ル−ム
JPS62158325A (ja) * 1985-12-28 1987-07-14 Tadahiro Omi 薬液槽の収納ケ−ス
JPS62195128A (ja) * 1986-02-21 1987-08-27 Hitachi Tokyo Electron Co Ltd 処理装置
JPS63141690U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1987-03-05 1988-09-19
JPS6443384A (en) * 1987-08-12 1989-02-15 Hitachi Ltd Steam washing method and washer

Also Published As

Publication number Publication date
JPS6348598B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-09-29

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