JPS6346992B2 - - Google Patents

Info

Publication number
JPS6346992B2
JPS6346992B2 JP55104522A JP10452280A JPS6346992B2 JP S6346992 B2 JPS6346992 B2 JP S6346992B2 JP 55104522 A JP55104522 A JP 55104522A JP 10452280 A JP10452280 A JP 10452280A JP S6346992 B2 JPS6346992 B2 JP S6346992B2
Authority
JP
Japan
Prior art keywords
gate
region
metal film
drain
insulating film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP55104522A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5730371A (en
Inventor
Tadayoshi Enomoto
Toshuki Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP10452280A priority Critical patent/JPS5730371A/ja
Publication of JPS5730371A publication Critical patent/JPS5730371A/ja
Publication of JPS6346992B2 publication Critical patent/JPS6346992B2/ja
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00Field-effect transistors [FET]
    • H10D30/60Insulated-gate field-effect transistors [IGFET]

Landscapes

  • Electrodes Of Semiconductors (AREA)
JP10452280A 1980-07-30 1980-07-30 Manufacture of insulated gate type field effect transistor Granted JPS5730371A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10452280A JPS5730371A (en) 1980-07-30 1980-07-30 Manufacture of insulated gate type field effect transistor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10452280A JPS5730371A (en) 1980-07-30 1980-07-30 Manufacture of insulated gate type field effect transistor

Publications (2)

Publication Number Publication Date
JPS5730371A JPS5730371A (en) 1982-02-18
JPS6346992B2 true JPS6346992B2 (enrdf_load_html_response) 1988-09-20

Family

ID=14382817

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10452280A Granted JPS5730371A (en) 1980-07-30 1980-07-30 Manufacture of insulated gate type field effect transistor

Country Status (1)

Country Link
JP (1) JPS5730371A (enrdf_load_html_response)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58111372A (ja) * 1981-12-25 1983-07-02 Hitachi Ltd 半導体装置の製造方法
JPS58146989A (ja) * 1982-02-26 1983-09-01 グローリー工業株式会社 硬貨判別方法
JP2004335990A (ja) 2003-03-10 2004-11-25 Fuji Electric Device Technology Co Ltd Mis型半導体装置

Also Published As

Publication number Publication date
JPS5730371A (en) 1982-02-18

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