JPS6346970B2 - - Google Patents

Info

Publication number
JPS6346970B2
JPS6346970B2 JP8617680A JP8617680A JPS6346970B2 JP S6346970 B2 JPS6346970 B2 JP S6346970B2 JP 8617680 A JP8617680 A JP 8617680A JP 8617680 A JP8617680 A JP 8617680A JP S6346970 B2 JPS6346970 B2 JP S6346970B2
Authority
JP
Japan
Prior art keywords
thin film
plasma
container
substrate
reduced pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP8617680A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5711832A (en
Inventor
Masuzo Hatsutori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP8617680A priority Critical patent/JPS5711832A/ja
Publication of JPS5711832A publication Critical patent/JPS5711832A/ja
Publication of JPS6346970B2 publication Critical patent/JPS6346970B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Compounds Of Iron (AREA)
  • Chemical Vapour Deposition (AREA)
  • Thin Magnetic Films (AREA)
JP8617680A 1980-06-25 1980-06-25 Preparation of thin oxide magnetic film Granted JPS5711832A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8617680A JPS5711832A (en) 1980-06-25 1980-06-25 Preparation of thin oxide magnetic film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8617680A JPS5711832A (en) 1980-06-25 1980-06-25 Preparation of thin oxide magnetic film

Publications (2)

Publication Number Publication Date
JPS5711832A JPS5711832A (en) 1982-01-21
JPS6346970B2 true JPS6346970B2 (enrdf_load_stackoverflow) 1988-09-20

Family

ID=13879441

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8617680A Granted JPS5711832A (en) 1980-06-25 1980-06-25 Preparation of thin oxide magnetic film

Country Status (1)

Country Link
JP (1) JPS5711832A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS5711832A (en) 1982-01-21

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