JPS5711832A - Preparation of thin oxide magnetic film - Google Patents
Preparation of thin oxide magnetic filmInfo
- Publication number
- JPS5711832A JPS5711832A JP8617680A JP8617680A JPS5711832A JP S5711832 A JPS5711832 A JP S5711832A JP 8617680 A JP8617680 A JP 8617680A JP 8617680 A JP8617680 A JP 8617680A JP S5711832 A JPS5711832 A JP S5711832A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- plasma
- oxide magnetic
- magnetic film
- container
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 abstract 4
- 239000000758 substrate Substances 0.000 abstract 3
- SZVJSHCCFOBDDC-UHFFFAOYSA-N ferrosoferric oxide Chemical compound O=[Fe]O[Fe]O[Fe]=O SZVJSHCCFOBDDC-UHFFFAOYSA-N 0.000 abstract 2
- 239000003517 fume Substances 0.000 abstract 2
- 238000010438 heat treatment Methods 0.000 abstract 2
- FBAFATDZDUQKNH-UHFFFAOYSA-M iron chloride Chemical compound [Cl-].[Fe] FBAFATDZDUQKNH-UHFFFAOYSA-M 0.000 abstract 2
- 229910003145 α-Fe2O3 Inorganic materials 0.000 abstract 2
- 229910006297 γ-Fe2O3 Inorganic materials 0.000 abstract 2
- 229910021578 Iron(III) chloride Inorganic materials 0.000 abstract 1
- 239000012159 carrier gas Substances 0.000 abstract 1
- 239000010408 film Substances 0.000 abstract 1
- 239000007789 gas Substances 0.000 abstract 1
- RBTARNINKXHZNM-UHFFFAOYSA-K iron trichloride Chemical compound Cl[Fe](Cl)Cl RBTARNINKXHZNM-UHFFFAOYSA-K 0.000 abstract 1
- NQXWGWZJXJUMQB-UHFFFAOYSA-K iron trichloride hexahydrate Chemical compound O.O.O.O.O.O.[Cl-].Cl[Fe+]Cl NQXWGWZJXJUMQB-UHFFFAOYSA-K 0.000 abstract 1
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 abstract 1
- 230000001590 oxidative effect Effects 0.000 abstract 1
Landscapes
- Compounds Of Iron (AREA)
- Chemical Vapour Deposition (AREA)
- Thin Magnetic Films (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8617680A JPS5711832A (en) | 1980-06-25 | 1980-06-25 | Preparation of thin oxide magnetic film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8617680A JPS5711832A (en) | 1980-06-25 | 1980-06-25 | Preparation of thin oxide magnetic film |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5711832A true JPS5711832A (en) | 1982-01-21 |
| JPS6346970B2 JPS6346970B2 (enrdf_load_stackoverflow) | 1988-09-20 |
Family
ID=13879441
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8617680A Granted JPS5711832A (en) | 1980-06-25 | 1980-06-25 | Preparation of thin oxide magnetic film |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5711832A (enrdf_load_stackoverflow) |
-
1980
- 1980-06-25 JP JP8617680A patent/JPS5711832A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6346970B2 (enrdf_load_stackoverflow) | 1988-09-20 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS5217696A (en) | Manufacturing process of ferromagnetic grit | |
| JPS5418709A (en) | Production of magnetic recording media | |
| JPS5711832A (en) | Preparation of thin oxide magnetic film | |
| JPS5329703A (en) | Production of thin magnetic film | |
| JPS5711833A (en) | Preparation of thin oxide magnetic film | |
| JPS5247702A (en) | Process for producing a recording medium of magnetic iron oxide | |
| JPS5624431A (en) | Treatment for improving polytetrafluoroethylene film | |
| JPS54130497A (en) | Production of indium oxide ( ) film | |
| JPS6415911A (en) | Manufacture of oxide perpendicularly magnetizable film | |
| JPS55165925A (en) | Production of film or sheet having mold releasability | |
| JPS5711834A (en) | Preparation of thin oxide magnetic film | |
| JPS56203A (en) | Manufacture of alloy magnetic powder composed primarily of metallic iron or iron | |
| JPS5711835A (en) | Preparation of thin oxide magnetic film | |
| JPS55167139A (en) | Manufacture of oxide magnetic thin film | |
| JPS5758239A (en) | Manufacture of magnetic recording medium | |
| JPS56164020A (en) | Production of magnetic thin film of oxide | |
| JPS54116202A (en) | Production of magnetic recording media | |
| JPS5582408A (en) | Preparing iron powder and ferrocobalt alloy powder for magnetic tape | |
| JPS5419200A (en) | Magnetic recording medium process | |
| JPS5521143A (en) | Manufacturing method for granular metal magnetic particle powder containing iron mainly | |
| JPS5361310A (en) | Production of magnetic recording medium | |
| JPS5271697A (en) | Production of thin iron oxide magnetic film | |
| JPS5684471A (en) | Vacuum evaporation | |
| JPS5758235A (en) | Manufacture of magnetic recording medium | |
| JPS53115697A (en) | Method for producing ferromagnetic iron oxide powder |