JPS634626A - 液相エピタキシヤル結晶成長用基板保持治具 - Google Patents

液相エピタキシヤル結晶成長用基板保持治具

Info

Publication number
JPS634626A
JPS634626A JP61149267A JP14926786A JPS634626A JP S634626 A JPS634626 A JP S634626A JP 61149267 A JP61149267 A JP 61149267A JP 14926786 A JP14926786 A JP 14926786A JP S634626 A JPS634626 A JP S634626A
Authority
JP
Japan
Prior art keywords
crystal growth
substrate
melt
holding jig
liquid phase
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61149267A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0260226B2 (enrdf_load_stackoverflow
Inventor
Koji Hirota
廣田　耕治
Michiharu Ito
伊藤　道春
Kosaku Yamamoto
山本　功作
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP61149267A priority Critical patent/JPS634626A/ja
Publication of JPS634626A publication Critical patent/JPS634626A/ja
Publication of JPH0260226B2 publication Critical patent/JPH0260226B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electroluminescent Light Sources (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP61149267A 1986-06-24 1986-06-24 液相エピタキシヤル結晶成長用基板保持治具 Granted JPS634626A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61149267A JPS634626A (ja) 1986-06-24 1986-06-24 液相エピタキシヤル結晶成長用基板保持治具

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61149267A JPS634626A (ja) 1986-06-24 1986-06-24 液相エピタキシヤル結晶成長用基板保持治具

Publications (2)

Publication Number Publication Date
JPS634626A true JPS634626A (ja) 1988-01-09
JPH0260226B2 JPH0260226B2 (enrdf_load_stackoverflow) 1990-12-14

Family

ID=15471503

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61149267A Granted JPS634626A (ja) 1986-06-24 1986-06-24 液相エピタキシヤル結晶成長用基板保持治具

Country Status (1)

Country Link
JP (1) JPS634626A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0260226B2 (enrdf_load_stackoverflow) 1990-12-14

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