JPS6345874B2 - - Google Patents

Info

Publication number
JPS6345874B2
JPS6345874B2 JP59179291A JP17929184A JPS6345874B2 JP S6345874 B2 JPS6345874 B2 JP S6345874B2 JP 59179291 A JP59179291 A JP 59179291A JP 17929184 A JP17929184 A JP 17929184A JP S6345874 B2 JPS6345874 B2 JP S6345874B2
Authority
JP
Japan
Prior art keywords
cleaning
workpiece
arm
frame
cleaning tank
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP59179291A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6157282A (ja
Inventor
Tooru Usui
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SONITSUKU FUEROO KK
Original Assignee
SONITSUKU FUEROO KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SONITSUKU FUEROO KK filed Critical SONITSUKU FUEROO KK
Priority to JP17929184A priority Critical patent/JPS6157282A/ja
Publication of JPS6157282A publication Critical patent/JPS6157282A/ja
Publication of JPS6345874B2 publication Critical patent/JPS6345874B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Cleaning Or Drying Semiconductors (AREA)
  • Cleaning By Liquid Or Steam (AREA)
  • Surface Treatment Of Glass (AREA)
JP17929184A 1984-08-30 1984-08-30 洗浄装置 Granted JPS6157282A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17929184A JPS6157282A (ja) 1984-08-30 1984-08-30 洗浄装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17929184A JPS6157282A (ja) 1984-08-30 1984-08-30 洗浄装置

Publications (2)

Publication Number Publication Date
JPS6157282A JPS6157282A (ja) 1986-03-24
JPS6345874B2 true JPS6345874B2 (Direct) 1988-09-12

Family

ID=16063256

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17929184A Granted JPS6157282A (ja) 1984-08-30 1984-08-30 洗浄装置

Country Status (1)

Country Link
JP (1) JPS6157282A (Direct)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0339655Y2 (Direct) * 1987-03-16 1991-08-21
JPH0610677Y2 (ja) * 1988-08-03 1994-03-16 森尾電機株式会社 洗浄物移動機
DE10321413B4 (de) * 2003-05-13 2014-06-26 Robert Bosch Gmbh Elektromagnetisch betätigbares Ventil

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56115680A (en) * 1980-02-19 1981-09-10 Chiyoda Seisakusho Automatic ultrasonic washer
JPS5928038U (ja) * 1982-08-13 1984-02-21 東洋科学株式会社 容器

Also Published As

Publication number Publication date
JPS6157282A (ja) 1986-03-24

Similar Documents

Publication Publication Date Title
JP2599571B2 (ja) 基板搬送ロボット
JPWO2000068118A1 (ja) Ｌｃｄガラス基板の搬送システム
JP3954686B2 (ja) 基板の搬送装置及び基板の搬送方法
CN108807146A (zh) 一种半导体光刻板清洗生产方法
CN108816960A (zh) 一种半导体光刻板清洗装置
CN108816959B (zh) 一种半导体光刻板清洗生产系统
WO2015114765A1 (ja) 基板搬送装置およびそれを含んで構成された対基板作業システム
JPS6345874B2 (Direct)
CN109848056B (zh) 一种检测装置
JP3394847B2 (ja) 部品搬送装置
JP3131751B2 (ja) 被処理体検出装置
CN108831846A (zh) 一种半导体光刻板清洗的除尘装置
CN108816961A (zh) 一种定位输送的半导体光刻板清洗装置
JPS6293112A (ja) 搬送装置
JP2864326B2 (ja) 基板洗浄処理装置
JP3853093B2 (ja) 自動洗浄装置の搬送機構
JP2868169B2 (ja) ショットブラスト装置
CN114476487A (zh) 一种平铺式升降回流精准定位输送装置
KR101173120B1 (ko) 천정 주행차 시스템
JP3954664B2 (ja) 洗浄装置
CN211762360U (zh) 喷釉线自动防护设备及喷釉系统
JPS63213355A (ja) 基板移載装置
CN216582438U (zh) 一种可定向输送物料的传输装置
JPH0429903Y2 (Direct)
JPS6082512A (ja) 自動洗浄装置の板状ワ−ク保持搬送方法及び装置