JPS6345874B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION <Industrial Application Field> The disclosed technology belongs to the technical field of cleaning devices that clean glass products and the like with high precision.

<Summary of the gist> The present invention is a cleaning device for precisely cleaning glass products, integrated circuit boards, etc. using ultrasonic waves, etc. A plurality of cleaning tanks are provided, and, for example, a workpiece receiver is provided in each cleaning tank, and each workpiece is placed between the workpiece receiver and the workpiece loading/unloading side of the frame. The present invention relates to a cleaning device that is provided with a conveyor that conveys the workpiece to a receiving body, and in particular, the conveyor that moves along the cleaning tank is equipped with a rotating arm that has a locking part for the workpiece, and the rotating arm has a base portion thereof. This invention relates to a cleaning device that is slidably supported along a horizontal guide of a conveyor and has an engaging body that engages with a vertical guide of the conveyor in a part thereof.

<Prior art> In general, workpieces such as optical lenses and wafers for electronic component integrated circuits must be cleaned at the time of finishing because they must maintain an extremely high degree of cleanliness. It is considered desirable.

As is well known, the above-mentioned cleaning apparatus has conventionally provided a plurality of cleaning tanks supported by a frame between the workpiece loading side and the workpiece unloading side, and a workpiece receiver is suspended in each cleaning tank. There were some that were piled up.

Even if the cleaning liquid in the cleaning tank is clean, if there is intrusion of fine dust from mechanical parts between the cleaning tanks due to mechanical wear or sliding, etc. In many cases, the finished cleanliness of the items to be washed becomes poor.

<Problems to be Solved by the Invention> However, in the cleaning device based on the above-mentioned prior art, a carrier is provided between the workpiece loading/unloading side of the frame and the workpiece receiving body immersed in each cleaning tank. The transfer body was made movable along each cleaning tank, and the workpieces were handed over in a baton-touch manner using a rotating arm provided on the transfer body, so the trajectory of the tip of the rotating arm traced an arc. Therefore, there is a possibility that it may come into contact with the workpiece receiver, etc.
In order to avoid this, if extra space is secured, the apparatus becomes larger, which has the drawback of extending the conveyance stroke and lengthening the cleaning time.

To deal with this, for example, JP-A-56-115680
If a device is provided to rotate the swivel arm so that the trajectory of the tip of the swivel arm is straight, as proposed in the invention published in No. 59-28038, the structure becomes extremely complicated, which increases the cost. There is also the disadvantage that installing a rotating arm between each tank increases the pitch between each tank, making the entire plant larger.
In addition, there is the disadvantage that the interlocking mechanism portion becomes irregular, and furthermore, it is necessary to form a large-area long hole for the rotating arm in the upper part between each tank, and it is necessary to provide such a large-area long hole in the frame. Dust from the torch drive unit, etc. may enter the passage of the object to be cleaned.
There is a problem that unexpected stains may occur.

<Purpose of the Invention> The purpose of the present invention is to solve the problems of the cleaning equipment based on the prior art described above, and to solve the problems of cleaning equipment based on the prior art described above. It is an object of the present invention to provide an excellent cleaning device that prevents the intrusion of dust and the like as much as possible, allows efficient cleaning in a cleaning tank, and is useful for fields in which finishing technology is used in various industries.

<Means/effects for solving the problems> In order to solve the above-mentioned problems, the structure of the present invention, which is based on the above-mentioned claims and in accordance with the above-mentioned object, is to solve the above-mentioned problems. In the case of supplying workpieces to multiple cleaning tanks arranged in The workpieces supplied by the arm are sequentially supplied to the workpiece receivers of each cleaning tank and subjected to ultrasonic cleaning in each cleaning tank, and the cleaned workpieces are transported to the workpiece unloading side of the frame by the rotating arm, during which time, The revolving arm of the transport body transferred to each cleaning tank position operates in a posture extending outward into the long hole formed in the vertical wall of the frame, to prevent dust from entering from the mechanism, and to prevent dust from entering the base of the transport body. It can be slid freely along the horizontal guide, and furthermore, since the engaging body formed in a part of the rotating arm is engaged with the vertical guide of the carrier, the tip of the rotating arm can move the workpiece without drawing an arc. A technical measure was taken to allow the robot to move up and down in a straight line.

<Embodiment - Configuration> Next, one embodiment of the present invention will be described below based on the drawings.

The embodiment shown in FIGS. 1 to 3 is a cleaning device 1 that constitutes the gist of the present invention, and belt conveyors 3 and 4 are connected to the carry-in side and the carry-out side of the frame 2, respectively. Note that 5 is a control panel.

A plurality of cleaning tanks 8, 8, . A vibrator 10 connected to an ultrasonic oscillator 9 provided at the top of the frame 2 is attached.

Note that between each cleaning tank 8, 8... there is a duct 1 that sucks filtered clean air supplied from a clean unit 11 provided at the top of the frame 2.
2, and a vapor cleaning tank 13 is interposed between the cleaning tank 8 near the discharge side of the frame 2 and the belt conveyor 4, as shown in FIG.

As shown in FIG.
A swing bar 15 is provided which is moved up and down by a drive device (not shown) via the swing bar 15, and the swing bar 15 has approximately L-shaped workpieces immersed inside the washing tank 8 at positions corresponding to each washing tank 8. A receiver 16 is suspended.

A standing wall 17 is provided behind the swing bar 15.
Rails 18, 18 along the swing bar 15 with
is laid, and a carrier 19 installed on top of the rails 18, 18 has a pinion 21 meshed with a rack 20 attached to the frame 2, and moves on the rail 18. As shown in FIG. 1, the rotating arm 22, which is pivotally supported by the vertical wall 17, extends from the elongated hole 23 formed in the vertical wall 17, and transfers the workpiece 24 in and out between the belt conveyors 3 and 4. It is supposed to be done.

As shown in FIGS. 4 to 7, the carrier 19 has wheels 26, 26, . Moving motor 27
A driving device 29 for a swing arm 22 is provided above the cleaning tanks 8, 8 in a longitudinal direction thereof, and is supported so as to be slidable along guide bars 28, 28 as a pair of lateral guides.

The drive device 29 includes a drive shaft 31 serving as a base and a driven shaft 32 located above the drive shaft 31 inside a mouth-shaped slide body 30 that slides along the guide bar 28, and the casing 25 and the vertical wall 17. The drive shaft 3 is rotatably supported through the drive shaft 3.
1 and a motor 34 installed at the top of the slide body 30.
A chain 36 is wound and engaged between the sprocket 35 and the sprocket 35 .

Then, a sixth
As shown in the figure, a driving arm 37 and a driven arm 38 each form a parallel link, and the distal end side is integrated with a bracket 39, and a lifting arm is provided with a hook 40 as a latching portion pivotally supported on the bracket 39. 41 is supported.

Further, inside the casing 25 on the tip side of the drive arm 37 and the driven arm 38, the drive arm 37 is provided.
5, swing arms 42 and 43 as engaging bodies corresponding to the driven arm 38 are engaged with a roller 45 at the tip thereof, as shown in FIG. The guide arms 42 and 43 have the same length as the drive arm 37 and the driven arm 38, respectively, and
The drive shaft 31 and the driven shaft 32 are mounted in a plane that includes the respective axes.

The driving arm 37, the driven arm 38, the lifting arm 41, and the rotating arm 22 are constructed, and the moving motor 27, the motor 34, the pump 7, the ultrasonic oscillator 9, the clean unit 11, and the belt conveyor are also constructed. 3 and 4 are each connected to a control device (not shown) via the control panel 5 described above.

Further, a sealing band for shutting off is stretched around the elongated hole provided in the vertical wall 17 of the frame 2 so as to prevent dust from entering the cleaning tanks 8, 8, . . .

<Embodiment - Effect> In the above-mentioned configuration, the cleaning liquid in the clean tank 6 is filtered in advance by a filter (not shown) by the pump 7 and is supplied to each cleaning tank 8, 8, and at the same time, clean air is supplied from the clean unit 11 to the cleaning tank 8. ，
I will send it to the 8th.

When the workpiece 24 in the bucket containing electronic component wafers and the like is transported to the carry-in end of the belt conveyor 3 for carrying in the frame 2, the motor of the conveyor 19 is controlled via a control device (not shown). 27 is driven, the conveyor 19 is moved on the rail 18 by the rack 20 and pinion 21, and stopped at a position close to the belt conveyor 3 for carrying in the workpiece 24.

Next, the motor 34 is driven and the sprocket 3
3, 35, when the drive shaft 31 rotates through the chain 36, the drive arm 37 and the driven arm 38 are integrated into the swing arm 22 by the bracket 39.
is rotated outside the elongated hole 23 of the frame 17, and the hook 40 supported by the lifting arm 41 is lowered.

By the way, at this time, guide arms 42 and 43, which are integrally fixed to the drive shaft 31 and rotate integrally with the rotating arm 22, engage a roller 45 at the tip with a vertical guide 44 provided upright on the casing 25. Therefore, when the drive shaft 31 rotates, the guide bar 2
The drive device 29 supported by 8 slides to the left in FIG. 6 in the direction indicated by the arrow.

Therefore, the hooks 40, 40 descend linearly without drawing an arcuate trajectory, and stop at the bottom dead center position shown by the two-dot chain line in FIG. 6 without contacting the workpiece 24.

Then, the carrier 19 is slightly moved on the rail 18 by the motor 27 (hereinafter referred to as inching). The hooks 40, 40 are located below the workpiece 24, and the swing arm 22 swings in the opposite direction to the above-mentioned direction via the motor 34, so that the hook 4 rises vertically.
0,40, the workpiece 24 rises smoothly and stops at the top dead center position of the swing arm 22.

Then, the workpiece 24 suspended by the hooks 40, 40 of the swing arm 22 is transferred to the upper part of the cleaning tank 8 closest to the loading side by the transport body 19 that moves on the rail 18 by the moving motor 27, and is moved by the swing arm 22. Workpiece receiver 1 inside cleaning tank 8
6, and after the carrier 19 moves slightly, the swing arm 22 swings again to the top dead center position, the ultrasonic oscillator 9 is turned on, and the vibrator 10 starts ultrasonic cleaning.

During this time, the hook 40 at the tip of the swing arm 22,
40 rises vertically as described above, so it does not come into contact with the inner wall of the cleaning tank 8 or the workpiece 24.
No dust is generated due to contact and the cleaning quality is not reduced.

After cleaning the workpiece 24 for a predetermined period of time, it is transferred to the next-stage cleaning tank 8 by the conveyor 19 and its rotating arm 22 in the same manner as described above, and the subsequent workpiece 24 carried in from the belt conveyor 3 on the carry-in side is again washed. It is supplied to the cleaning tank 8 closest to the import side.

In this way, the sequentially supplied workpieces 24 are efficiently cleaned in a plurality of cleaning tanks 8, 8, while being moved up and down via the swing bar 15, and are finally cleaned in the vapor cleaning tank 13 disposed on the unloading side. Then, it is carried out from the belt conveyor 4 on the carry-out side.

By the way, workpiece 2 cleaned through the above-mentioned process
4, since the conveyor 19 is isolated by the vertical wall 17, the rotating arm that touches the workpiece 24 at the outer extension of the long hole bored in the vertical wall 17 operates. The total area is small, so there is no risk of dust etc. from the mechanical parts entering and adhering to each cleaning tank 8 or the workpiece 24.

The cleaning tanks 8 and 8 are then moved by the conveyor 19.
... is not contaminated, and furthermore, the rotating arm 2
Since the hooks 40, 40 supported by 2 move up and down in the vertical direction, each part including the cleaning tanks 8, 8... can be made compact, and an increase in the number of contamination sources caused by increasing the size of the entire device can be prevented. You can.

<Other Embodiments> It goes without saying that the embodiments of the present invention are not limited to the above-mentioned embodiments. For example, the length of the guide bar that rotates along the vertical guide may be shortened. Further, various embodiments can be adopted, such as a projection may be provided on the revolving arm and engaged with the guide groove, or the conveyor may be moved by a chain and a sprocket.

<Effects of the Invention> As described above, according to the present invention, the only advantage in ultrasonic cleaning is that it is necessary not only to maintain the cleanliness of the cleaning liquid itself but also to maintain the external atmosphere in a clean state. By minimizing the trajectory of the rotating arm when loading and unloading workpieces, which can be a source of contamination, the cleaning tank can be kept as clean as possible, and the reliability of precision parts during the finishing process is extremely high. Excellent effects can be achieved.

In addition, since the transport body is made movable along the cleaning tank and is equipped with a rotating arm that has a locking part for the workpiece, there is no need for a large drive stroke like in a device that moves the workpiece up and down, and there is no waste. An excellent effect is achieved in that the operation can be realized.

Furthermore, the swing arm is supported so that its base can slide freely along the horizontal guide of the carrier, and has an engaging body in a part thereof that engages with the vertical guide of the carrier, so that it is not restricted by the vertical guide. The locking part of the rotating arm moves up and down in the vertical direction and does not come into contact with the inner wall of the cleaning tank and reduce the cleaning quality, and as a result, the space can be reduced accordingly.
An excellent effect is achieved in that the entire device including the cleaning tank can be made more compact.

In addition, the structure is simple, so there are fewer failures.
Another advantage is that it can be manufactured at low cost.

Furthermore, since the swing arm operates at the outer extension of the long hole bored in the vertical wall of the frame in the length direction of the arrangement of the cleaning tanks, the area of the long hole can be reduced.
As a result, dust caused by friction and impulses in each mechanical part may adhere to the workpiece during each baton touch process,
There is almost no risk of it entering the cleaning tank.
This also provides the excellent effect of significantly improving the accuracy of the cleaning finish.

[Brief explanation of drawings]

The drawings are explanatory diagrams of one embodiment of the present invention, and FIG. 1 is an overall front view of a cleaning tank that constitutes the gist of the invention, FIG. 2 is a side view of the same, FIG. 3 is a plan view of the same, and FIG.
5 is a side sectional view of the carrier, FIG. 5 is a front sectional view, FIG. 6 is a front view, and FIG. 7 is a plan view. 2...Frame, 24...Workpiece, 8...Cleaning tank, 1
9...Transportation body, 40...Latching part, 22...Swivel arm,
31...Base, 28...Horizontal guide, 44...Vertical guide,
42, 43...Arm.

Claims (1)

[Claims] 1. A transporting body in which a plurality of cleaning tanks supported by the frame are disposed between the workpiece loading side and the workpiece unloading side of the frame, and the workpieces are transported to each cleaning tank between each cleaning tank and the workpiece loading/unloading side of the frame. In the cleaning device, the carrier is movable along each cleaning tank and has a hook for the workpiece, and has long holes formed in the vertical wall of the frame in the direction in which the cleaning tanks are arranged. A pair of link-type pivoting arms that are provided with outwardly extending pivoting arms, the pivoting arms having their bases slidably supported along the horizontal guides of the carrier, and whose tips engage with the vertical guides of the carrier. A cleaning device characterized by having an arm.