JP3394847B2 - Parts transfer device - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a parts transfer device for automatically transferring parts such as semiconductor processed products from a certain position to a specified position, and more particularly to moving a part or a cassette on which parts are mounted to a predetermined position. Then, the present invention relates to a component transporting device capable of vertically moving while moving or moving, and horizontally orienting a component or a cassette after vertical movement.

[0002]

2. Description of the Related Art The structure of a conventional component conveying apparatus of this type is shown in the specification and drawings of Japanese Patent Application No. 63-158786 (Japanese Utility Model Publication No. 7-418) relating to the invention of the present inventors. As shown in FIG. 11 of the present application as its entire configuration, a lift vehicle traveling drive belt 8 and a lift vehicle lifting drive belt 9 connected to a drive motor 2 via drive pulleys 3, 4c, 6 and the like. And two driving belts 8 for driving the lift truck to move the lift truck 10 to a predetermined position by using the slide frame 1a provided on the frame 1 to raise and lower the drive belt 9 for raising and lowering the lift truck. The elevating platform 10h of the elevating vehicle 10 is moved up and down by performing a differential operation with respect to the drive of the vehicle traveling drive belt 8. This conventional component transfer device is provided with a lift truck 1
0, the differential gear drive 4 provided at the required position of the component transfer device differentially operates the elevating / lowering vehicle elevating / lowering drive belt 9 as described above, and the cam follower and the elevating / lowering provided on the elevating / lowering vehicle 10 are moved. Since the lifting and lowering operation is performed by the action with the groove, it is not necessary to provide the lifting and lowering carriage 10 with a drive source, and thus the wiring that is moved by being dragged by the carriage is not necessary, and the lifting and lowering carriage is not caught in the wiring. In addition, there is no concern about disconnection of the wiring cord, and the carrying device can be made compact.

[0003]

However, as shown in FIG.
In the conventional example, since the dolly only travels in the horizontal direction and moves up and down, in order to carry while maintaining the correspondence between the dolly and the parts mounted on the dolly, the parts transfer order is also fixed with the cassette. Will be done. Therefore, if parts with different treatments or processing steps are made to flow on the same line, it will be affected by the parts with long process time of the treatments or processing steps, which will reduce production efficiency. There is a problem that it cannot be flushed on the line. That is, description will be made with reference to the transport system diagram shown in FIG. First, 11 to 11 described above the solid line
Reference numeral 15 is a parts processing tank, for example, a cleaning tank, and the arrow indicates the flow of parts, for example, a wafer. A transport device 16 is installed on the alternate long and short dash line, and cassettes 17 to 23 for component mounting are arranged, and the arrow indicates the flow of the cassette. The cassette and the wafer are separated at the separation point B, and the wafer is cleaned in each cleaning tank 11 between the first tank 11 and the fifth tank 15.
Wash at ~ 15.

On the other hand, the remaining empty cassette 17 is carried to the point A and stands by. Next, the second wafer separated at the point a is sent from the first tank 11 to the fifth tank 15, and the empty cassette 18 is carried to the point B and stands by. The following wafers are sequentially cleaned in cleaning tank 1
The cassettes 19 to 23, which have been sent to 1 to 15 and have become empty, are linearly stocked on the transport device 16. The first wafer, which has been cleaned, is sent to the storage point (b) where it is stored in the empty cassette 17 carried by the transfer device 16. Since the empty cassette 17 is sent to the storage point B here,
The point A where there was an empty cassette 17 becomes empty. Therefore, the empty cassette 18 at the point B is sent to the point A and the empty B
The operation of feeding the empty cassette 19 at the point C to the point, that is, the pre-packing operation is required. According to the present invention, two drive belts are used, one of the drive belts conveys and conveys the cassette base to a predetermined position, and the other drive belt causes the cassette base to perform an ascending / descending operation and a horizontal position change. The present invention provides a parts transporting device capable of changing the transporting order of cassettes transported by a cassette table.

[0005]

According to the present invention, there is provided a component transfer device, which moves horizontally on a rail provided on a base, and at the same time, a moving portion which gives an arm driving mechanism an ascending / descending operation and a horizontal rotating operation. A first driving belt for moving the moving unit and a driving unit for driving a second driving belt for applying a driving force to the moving unit for controlling the arm driving mechanism, wherein the driving unit is provided. The first base provided on the mounting base fixed to the base,
A first motor for applying a driving force to the driving belt of the device through a pulley, and a lifting drive shaft having a screw screw portion that is vertically supported by a bearing provided on the mounting base and that moves up and down without rotating; a first consisting of the first change nut which is connected to the drive pulley differential mechanism portion is engaged with the Sukuryuuneji section of the elevator drive shaft providing a driving force of a differential operation in the second drive belt, the A second motor provided on the mounting base for applying a driving force for raising and lowering the elevating and lowering drive shaft of the operating mechanism section, and the moving section is connected to the first drive belt and moves on the rail. With a moving slide base,
An elevating base rotatably supported by the slide base and rotatably supported by the slide base;
Further, a change nut shaft having a screw thread portion that engages with a second change nut rotatably provided on the elevating base, and a rotational force generated by the second drive belt integrally provided on the change nut shaft. A second drive pulley provided, a first synchronous gear provided on the second change nut so as to rotate integrally with the rotation of the second change nut, and rotatably provided on the lifting base. A cam shaft having a crank type groove, an inner shaft supported by the elevating base and penetrating through the center of the cam shaft, and meshed with the first synchronous gear integrally provided on the cam shaft. A second synchronous gear, a roller bracket having a cam follower fixed to the slide base and engaging with a crank type groove of the cam shaft, and a roller bracket connected to the cam shaft. Were joint axis is Toka et constituted by the driving force of the first drive belt of the drive unit, to travel and move the mobile unit in a horizontal direction, a first drive that rotates based on the vertical movement of the lift drive shaft of the drive unit The second driving belt is driven by the pulley, and the second driving belt is driven by the driving force.
The change nut shaft that rotates coaxially with the drive pulley is rotated, and a vertical force and a rotational force are applied to the change nut that engages with the change nut shaft, and the change nut shaft is provided integrally with the change nut. The cam shaft is rotated and lifted up and down based on its crank-shaped groove through a second sync gear that meshes with the sync gear, and the non-rotating inner shaft and cam shaft that move up and down integrally with the cam shaft The arm drive mechanism is configured to control vertical movement and position change in the horizontal direction by means of a joint shaft connected thereto.

[0006]

1 is a perspective view showing the outline of the overall construction of an embodiment of the present invention. Reference numeral 25 is a base, which is shown in a plate shape in this embodiment, but it may be a frame such as a steel frame. Good. Reference numeral 26 is a rail for moving the moving unit 50 by horizontal traveling. 30 moves the moving unit 50 and moves the moving unit 5
0 is a drive unit that gives a driving force for moving the arm drive mechanism (not shown in FIG. 1) up and down and changing the position in the horizontal direction. The drive unit 30 is a lifting base that is lifted by driving a mounting base 31 fixed to the base 25, a conveyance motor 32 fixed to the mounting base 31, a differential mechanism driving motor 33, and a differential mechanism driving motor 33. The shaft 34, the elevating and lowering drive shaft 34 includes a differential mechanism driving pulley 35 that rotates by elevating and lowering the shaft 34,
The conveyor belt 27 is driven by the operation of the conveyor motor 32, and the differential mechanism drive pulley 35 is rotated by the elevating operation of the elevating drive shaft 34 by the drive of the differential mechanism drive motor 33 to drive the differential mechanism drive. The belt 28 is driven. When the transport belt 27 is driven by the operation of the transport motor 32, the lift drive shaft 34 rotates together with the rotation of the idler pulley 38 of the transport belt 27 connected to the lift drive shaft 34. It is supposed to do. Therefore, at this time, if the elevating drive shaft 34 does not move up and down, the differential mechanism driving belt 28 is driven at the same speed as the conveying belt 27.

The moving section 50 is composed of a slide base 51, an elevating base 52 and the like.
1 is fixed to the conveyor belt 27 and moves on the rail 26 by its operation. Reference numeral 53 denotes a change nut shaft driving pulley, which is given a rotational force by driving the differential mechanism driving belt 28. Reference numeral 54 is a change nut shaft that rotates integrally with the change nut shaft driving pulley 53, and 55 is an inner shaft that is non-rotatable to the elevating base 52 and is provided so as to elevate as the elevating base 52 moves up and down. There is. Reference numeral 56 is for raising and lowering and rotating based on rotation of the change nut shaft driving pulley 53 on the cam shaft, and the raising and lowering base 52 is raised and lowered as the cam shaft 56 is raised and lowered. 5
A joint shaft 7 operates integrally with the cam shaft 56. Reference numeral 58 denotes an LM shaft, which has a function of moving up and down the elevating base 52 while maintaining the horizontal position.

Next, the structure and operation of the drive unit 30 shown in FIG. 1 will be described based on the embodiment shown in the perspective view of FIG. In FIG. 2, 31 is a mounting base fixed to the base 25, 32 is a conveying motor for driving the conveying belt 27 attached to the mounting base 31 in both forward and reverse directions. Then, the first drive belt 27 performs the operation A-1 via the motor pulley 36, the idler pulleys 37, 38 and 39, and the fulcrum pulleys 40 and 41. Also, the motor 32 rotates in the reverse direction (direction B).
Then, the conveyor belt 27 performs the operation B-1 via the pulleys. Therefore, by connecting the moving section 50 to the carrying belt 27, the moving section 50 can be moved horizontally.

Reference numeral 33 denotes a differential mechanism driving motor mounted on the mounting base 31 for raising and lowering the rack 40 to which the support plate 41 is coupled. 34 is an elevating and lowering drive shaft, the upper end of which is connected to a bearing 42 connected to a support plate 41,
It is guided in the vertical direction by bearings 43a and 43b provided on the mounting base 31, and a screw thread portion 44 is provided below it. A key 45 is provided on the lifting drive shaft 34 so that the lifting drive shaft 34 can move up and down without rotating. A change nut 46 is rotatably provided on a bearing 47 attached to the attachment base 31, and the change nut 46 is integrally provided with a differential mechanism driving pulley 35. Therefore, by driving the differential mechanism driving motor 33, the rack 4
0, when the up-and-down drive shaft 34 is lowered through the support plate 41 (C direction), the change nut 46 is rotated in the E direction by the interaction with the screw thread portion 44, and the differential mechanism drive pulley 35 is moved in the same direction. The belt 28 for rotating the differential mechanism is driven in the E-1 direction by rotating. When the elevating drive shaft 34 is raised (D direction), the differential mechanism drive pulley 35 rotates in the F direction by the action opposite to the action described above, and the differential mechanism drive belt 28 is moved to the F-1 direction. Drive in the direction.

Next, the structure and operation of the moving unit 50 shown in FIG. 1 will be described based on the embodiment shown in FIGS.
3A is a side view, and FIG. 3B is XX of FIG. 3A.
It is a top view in arrow direction. In FIG. 3, reference numeral 51 is a slide base, 52 is an elevation base, and 54 is a change nut shaft, which is rotatably supported by the slide base 51 and a change nut 60 provided on the elevation base 52. A change nut shaft drive pulley 53 to which a rotational force is applied by the differential mechanism drive belt 28 is coupled to the change nut shaft 54. Reference numeral 61 denotes a synchronous gear B, which is integrally connected to the change nut 60 and rotates with the rotation of the change nut 60. 55
Is an inner shaft, and is raised and lowered without rotating as the raising and lowering base 52 is raised and lowered. The inner shaft 55 is integrally provided with a cam shaft 56, a joint shaft 57, and a synchronous gear A62 that meshes with the synchronous gear B61, and is rotatable by an angle defined by the cam shaft 56. It is installed so that it goes up and down as it goes up and down.

Reference numeral 58 denotes LM shafts which are respectively set up on both sides of the slide base 51, and 59 denotes a linear bush fixed to the elevating base 52, which is inserted into the LM shaft 58 to smoothly elevate the elevating base 52 in a horizontal state. It is something to do. 63 is an idler pulley, 64 is a cross roller bearing A, 65 is a cross roller bearing B, 66 is a cross roller bearing C, 67 is a bearing, and 68 is a roller bracket.

FIG. 4A shows the relationship between the roller bracket 68 and the cam shaft 56 provided on the slide base 51. A cam follower 69 is provided on an upper end portion of the roller bracket 68, and a crank-shaped cam groove 70 shown in a developed state in FIG. 4B is provided on a peripheral surface of the cam shaft 56.
Is provided. The cam groove 70 is engaged with the cam follower 69, and is composed of an upper lateral groove 70a, a vertical groove 70b and a lower lateral groove 70c. Therefore, as will be described later, the positional relationship of the cam follower 69 engaged with the groove end of the upper lateral groove 70a shown in FIG.
It changes in the path from a to the groove end of the lower lateral groove 70c through the vertical groove 70b. And by the reverse rotation force and descending force,
The positional relationship between the cam follower 69 and the cam groove 70 changes in the opposite route. That is, the joint shaft 57 connected to the cam groove 70 performs the operations of forward rotation → upward → forward rotation → reverse rotation → downward → reverse rotation.

Further, as shown in FIG. 5, weight mounting plates 71 are fixed to both sides of the slide base 51, and action plates 72 are fixed to both sides of the elevating base 52. Then, one end is pivotally supported on the upper parts of both weight mounting plates 71, and a balance weight 74 having a cam follower 75 is mounted on the other end, and a cam groove 73 is provided in the horizontal direction at the lower part of both action plates 72, A cam follower 75 of a balance weight 74 is movably fitted in the cam groove 73. Balance weights 7 attached to both sides
A tension spring 76 is provided between the cam followers 75 of the No. 4 and the opposite side of the mounting position so that the lift base 52 is stably held at the lower end position and the upper end position. An upward or downward tension is applied to 52.

Next, the operation of the moving section 50 will be described with reference to FIGS. As described with reference to the operation of the drive unit 30 in FIG. 2, the differential mechanism drive belt 28 is driven by a predetermined distance in the F-1 direction by the elevation drive shaft 34 rising from the lower end position. This driving force is transmitted to the change nut shaft driving bulley 53 through the idler pulley 63, and the change nut shaft driving bully 53 is F-2.
Is rotated in the direction. This torque is applied to the change nut 60
Change nut 6
If 0 cannot rise, it is given as a rotational force. When the cam follower 69 provided on the roller bracket 68 is present at the groove end of the upper lateral groove 70a of the cam shaft 56, the upward force of the change nut 60, that is, the elevating base 52 is suppressed by the upper lateral groove 70a. The force is given as force, and the synchronous gear B61 provided integrally with the change nut 60 is moved to the F-
Rotate in two directions. This rotational force is transmitted to the synchronous gear A62, rotates the synchronous gear A62 in the F-3 direction, and causes the integrated cam shaft 56 and joint shaft 57 to move in the F direction.
-Rotate in the -3 direction. This rotation force causes the arm drive mechanism described later to change the position of the tip shaft 88 in the horizontal direction, and the movable cassette plate 95 attached to the tip shaft 88 is projected.

The cam shaft 56 is also rotated by the rotation of the synchronous gear A62, and the relative position of the roller bracket 68 to the cam groove 70 of the cam follower 69 is the upper lateral groove 7.
0a and the vertical groove 70b (the upper end of the vertical groove 70b), the change nut 60 becomes unrotatable and the rising force is released, and the change nut 60 and the camshaft 5 are released.
6 raises the cam follower 69 until it reaches the lower end of the vertical groove 70b. Therefore, the elevation base 52 attached to the cam shaft 56, and the joint shaft 57 and the inner shaft 55 attached to the elevation base 52 also rise. When the lower end of the vertical groove 70b rises to the position of the cam follower 69, the upward force of the change nut 60 is suppressed again, and the synchronous gear B61 moves in the F-2 direction to the lower lateral groove 7b.
The rotational force is given by 0c, and the cam shaft 56 moves to the lower lateral groove 7 in the raised position by the same action as the upper lateral groove 70a.
It rotates in the F-3 direction until the cam follower 69 reaches the groove end (left end) of 0c, and at the same time, the joint shaft 57 also performs the same rotation operation.

That is, F-1 of the differential mechanism driving belt 28
Driven in the direction, the joint shaft 57 rotates at a predetermined angle in the lower position (F-3 direction), then moves upward, and then rotates at a predetermined angle in the upper position (F-3 direction). By this operation, the raising / lowering base 52 and each component attached to the raising / lowering base 52 are raised to the position shown by the one-dot chain line in FIG. Further, when the differential mechanism driving belt 28 is driven in the E-1 direction due to the lowering of the elevating drive shaft 34 of the driving unit 30, the operation reverse to the above operation is performed. That is, with respect to the cam follower 69 of the roller bracket 68, the cam shaft 56 includes the lower lateral groove 70c, the vertical groove 70b, and the upper lateral groove 70a.
Of the joint shaft 5 which operates in the path of and is connected to the cam shaft 56.
7 performs a predetermined angle rotation (E-3 direction) at the lower position, a downward movement, and a predetermined angle rotation operation (E-3 direction) at the upper position.

Next, the structure and operation of the arm drive mechanism will be described. However, this arm driving mechanism is a general mechanism that has been conventionally used, and the moving unit 50 of the present invention is used.
The joint drive shaft 57 is moved up and down and rotated, and the inner shaft 55 is integrally moved up and down with the joint shaft 57 to the arm drive mechanism. An example of this arm drive mechanism will be described with reference to FIGS. 6 and 7. 6 (a) is a side sectional view and FIG. 6 (b) is a top view showing the meshing relationship of each gear. In addition, FIG.
It shows the operating state of the two arms. In FIG. 6, reference numeral 55 denotes an inner shaft, and a gear A83 is fixed to the tip end included in the arm A81. 57 is a joint shaft fixed to the case of the arm A81.
The arm A81 also rotates with the rotation of.

An intermediate shaft 87 is non-rotatably fixed to the arm A81. A gear C84 is rotatably supported on the intermediate shaft 87 and meshed with a gear A83 via an idler gear 89. Has been. An arm B82 is rotatably supported on the intermediate shaft 87, and a gear D85 is fixed to a tip end portion of the intermediate shaft 87 included in the arm B82. A tip shaft 88 is rotatably provided on the arm B82, and a gear B8 that meshes with a gear D85 via an idler gear 90 is attached to the tip shaft 88.
6 is provided. Reference numerals 91 and 92 are cross roller bearings, and 93 is a bearing. The gear ratio between the gears is as follows. The gear ratio between the gear A83 and the gear B86 is set to 1: 1, the ratio of the gear C84 to the gear A83 and the ratio of the gear D85 to the gear B86 are set to 1: 1/2, respectively.

The operation of this arm drive mechanism is performed by the joint shaft 57.
When the arm rotates in the F-3 direction, the arm A81 also rotates in the same direction. At this time, since the inner shaft 55 does not operate, the gear A83 also does not operate. However, arm A8
1 performs the rotation operation F-3, the gear A83 imparts the rotation operation F-4 to the idler gear 89, and the idler gear 89 performs the rotation operation F-5. The rotational movement F-5 of the idler gear 89 is transmitted to the gear C84 via the cross roller bearing 91, and the gear C84 obtains the rotational movement F-6. The gear C84 is united with the arm B82, and the arm B82 performs the rotation operation F-7. The gear C84 is fixed to the arm B82 via the intermediate shaft 87. The rotation operation F-7 of the arm B82 described above gives a rotation operation F-8 to the gear D85, and this operation gives a rotation operation F-9 to the idler gear 90, and this rotation operation F-9. Gives rotational movement F-10 to gear B86.

The rotary arm A81 by the series of operations described above.
A specific operation of the arm B82 will be described with reference to FIG.
FIG. 7 (1) shows the home position, and in this state, as the joint shaft 57 rotates, the rotary arm A81 causes the joint shaft 57 to move.
When the intermediate shaft 87 performs the rotational movement B (counterclockwise) around the support axis X corresponding to the center axis of the arm B, the arm B 82 uses the center line Z of the tip shaft 88 as a fulcrum as shown in FIG. 7B. The tip shaft 88 is drawn toward the support shaft X along the straight line of motion W while performing the rotation operation C (clockwise direction). That is, when the rotating arm A81 rotates 45 °, the rotating arm A81
The relative angle between 81 and the rotating arm B82 is 90 ° with the intermediate shaft 87 as the intersection. When the rotation angle of the rotation arm A81 becomes 90 °, the rotation arm A81 and the rotation arm B82 are overlapped as shown in FIG. 7C, and when the rotation arm A81 rotates 135 °, the rotation arm A81 is rotated by 135 °.
7A and the rotation arm A81 rotates 180 °, the tip shaft 88 is moved in a straight path on the opposite side of the home position across the support shaft X, as shown in FIG. 7 (5).

This operation is given by an operation in which the upper lateral groove 70a of the cam shaft 56 of the moving portion 50 moves the cam follower 69 of the roller bracket 68 to the vertical groove 70b, that is, a rotational operation of the cam shaft 56. Next, as described above, when the cam follower 69 reaches the position of the vertical groove 70b, the cam shaft 56 moves up together with the change nut 60 until the cam follower 69 reaches the lower end of the vertical groove 70b. The joint shaft 57 and the inner shaft 55 also rise. Therefore, the tip shaft 88 is raised in the position state of FIG. 7 (5) according to the operation of the rotary arm A81 and the rotary arm B82. This ascending distance substantially corresponds to the length of the vertical groove 70b of the cam shaft 56.

When the cam shaft 56 moves up and the lower end of the vertical groove 70b reaches the cam follower 69, the change nut 60 is restrained from moving upward, and the cam shaft 56 cams to the groove end (left end) of the lower lateral groove 70c. Rotate until the follower 69 reaches. This rotational force causes the joint shaft 57 to rotate in the same direction. Due to this rotation, the rotary arm A81 also rotates in the same direction (counterclockwise direction) as described above, and the distal end shaft 88 causes the linear motion line W by the same operation as described with reference to FIG.
Return to the top and move to the top of the home position in the raised state. In this return operation, the intermediate shaft 87 moves the linear operation line W.
It goes through the arc trajectory above.

Next, the elevating and lowering drive shaft 34 of the drive unit 30 is lowered from the ascending end position, so that the differential mechanism driving belt 28 is driven by a predetermined distance in the E-1 direction. By this drive, the above-described differential mechanism driving belt 28 is F-1.
The reverse operation of driving in the direction is performed. That is, the cam follower 69 of the roller bracket 68 passes through the vertical groove 70b from the groove end of the lower horizontal groove 70c of the cam shaft 56, and then the upper horizontal groove 70c.
The movement of the cam shaft 56 up to the groove end of a, that is, the cam shaft 56
The reverse rotation → falling → reverse rotation operation of B is transmitted to the rotation arm A81 of the arm drive mechanism, whereby the rotation arm B8
The tip shaft 88 of No. 2 moves from a position in the upper position of the home position in a raised state to a predetermined position on the opposite side across the support shaft X of the rotary arm A81 through the linear movement line W, and 7 (5) → FIG. 7 after descending at the position
In the operation path of (1), the tip shaft 88 returns to the home position.

The transport state of the cassette for transporting the components by the operation of the tip shaft 88 will be described with reference to the side view of FIG. 8 and the top view of FIG. In FIG. 8 and FIG. 9, reference numeral 97 denotes a cassette base attachment device provided along the conveyor belt 27 of the conveyor device. The cassette base attachment device 97 is provided with a plurality of cassette bases 96.
Further, the cassette base 96 is provided with a wedge-shaped projection 98 for preventing positional displacement when the cassette 94 is placed. Figure 8
As shown in the side view of FIG. 1, the rotary arm A81 is attached to the tip of the joint shaft 57 which includes the inner shaft 55 in the center thereof.
And a rotating arm B82 are provided, and a movable cassette plate 95 is fixed to the tip end shaft 88 of the rotating arm B82. In this embodiment, the moving cassette plate 95 can take out and take in two cassettes 94 placed on the cassette table 96 at the same time. In the side view of FIG. 8 and the top view of FIG.
The state in which the cassette 94 is placed on the cassette table 96 is shown.

Next, the operation of taking in and taking out the cassette 94 by the moving cassette plate 95 will be described. First, the cassette 94 is taken into the cassette base 96 when the cam shaft 56 is raised, that is, when the cam follower 69 of the roller bracket 68 is located at the groove end (left end) of the lower lateral groove 70c of the cam shaft 56. The cassette 94 placed on 95 is transported to a fixed position by the transport belt 27 (position in FIG. 8). Then, the differential mechanism driving belt 28 is driven to rotate the joint shaft 57 by rotating the cam shaft 56 in the range of the lower lateral groove 70c of the movable cassette plate 95 fixed to the tip shaft 88 of the rotating arm B82. Move to the right (arrow i) in the drawing (position in FIG. 8). Here, the cam follower 69 enters the vertical groove 70b of the cam shaft 56,
As the cam shaft 56 descends, the joint shaft 57 and the inner shaft 55 descend, and the moving cassette plate 95 also descends by the length of the groove 70b (arrow j) (position in FIG. 8). The cassette 94 is placed on the cassette table 96 during the downward movement. When the cam shaft 56 descends and the engagement with the cam follower 69 shifts from the vertical groove 70b to the upper horizontal groove 70a and the cam shaft 56 rotates, the moving cassette plate 95 moves in the left direction (arrow k) in the drawing. Move and return to the home position (position in Figure 8). 8 and 9 show the state of this home position.

Next, the operation of taking out the cassette 94 from the cassette table 96 will be described. The take-out operation is the reverse of the take-in operation. After the moving section 50 is conveyed to the take-out position of the cassette 94 by the conveying belt 27, the differential mechanism driving belt 28 moves in the opposite direction to the take-in operation. Driven by, the groove 70 of the cam shaft 56 with respect to the cam follower 69 of the roller bracket 68 moves in the order of upper lateral groove 70a → vertical groove 70b → lower lateral groove 70c,
The movable cassette plate 95 moves from the home position (position in FIG. 8) to the right (arrow m) in the drawing (position in FIG. 8). From this state, the movable cassette plate 95 rises (arrow n) corresponding to the length of the vertical groove 70b (position in FIG. 8). During this ascending process, the moving cassette plate 95 scoops up the cassette 94 from below and places it on the moving cassette plate 95. After that, the moving cassette plate 95 is moved leftward in the drawing (arrow o).
Move to (position in Figure 8). In this state, the moving belt 50 is carried to a predetermined position by the carrying belt 27.
After that, the taking-in operation is performed again, and the cassette 94 is placed on the predetermined cassette base 96.

As described above, according to the present invention, the operation of the moving unit 50 for carrying and traveling can be performed not only the raising and lowering operation but also the position change in the horizontal direction. A transfer unit 50 as a transfer unit is provided on the alternate long and short dash line of the transfer device 116 shown, and a plurality of cassette bases 96 are provided as cassette stock units on the cassette base attachment device 97 provided adjacent to this transfer line. The stock part is separated so that the pre-clamping operation, which is inevitable in the conventional device, can be avoided. That is, FIG.
As shown in FIG. 5, the cassette 94 and the wafer are separated at the point A, and the wafer is cleaned in each of the cleaning tanks 1 to 11. On the other hand, the separated empty cassette 94 is moved to the moving section 50 after confirming that it is empty with an optical sensor.
And transport it to the position of the predetermined cassette table 96,
The cassette 94 can be placed on the cassette table 96 by driving the differential mechanism driving belt of the driving unit 30 described above.

Therefore, the following processing becomes possible. That is, the empty cassette 943 separated at the point a
Accommodated in 63. Wafers that do not require cleaning treatment in the four tanks 14 are cleaned in each tank except the four tanks 14. If the empty cassette suitable for storage is the cassette 942, the wafer subjected to this processing can be taken out without selecting the cassette 943 and transferred to the point B which is the storage point of the processed wafer. .

[0029]

As described above in detail, according to the present invention, the conveyor belt is fixed to a predetermined position of the conveyor unit and is driven and controlled by two drive sources provided in the conveyor unit. And a differential mechanism drive belt are provided.The transport belt is used to control the transport travel of the moving section, and the differential mechanism drive belt is used to raise and lower the moving cassette plate of the moving section and to control the position change in the horizontal direction. I tried to get it. Therefore, as described above, the moving part of the transfer line and the cassette base for stocking the cassettes can be provided on different lines, and the transfer order of a plurality of cassettes can be exchanged, and the processing of semiconductor device parts, etc. This greatly contributes to the efficiency of transportation in the process. In addition, even with a long transport structure, it is possible to eliminate the need for moving wiring air tubes, eliminating the conventional disconnection failure of distribution lines, and eliminating the need for a cable duct that is a dust source. You can

[Brief description of drawings]

FIG. 1 is a perspective view showing the outline of the overall configuration of an embodiment of the present invention.

FIG. 2 is a perspective view showing an embodiment of a driving unit of the present invention.

3A and 3B are a side view and a top view showing an embodiment of a moving unit of the present invention.

FIG. 4 is a perspective view illustrating a main part of a moving unit according to the present invention.

FIG. 5 is a side view showing another structure of the moving unit of the present invention.

6A and 6B are a side view and a top view illustrating an arm drive mechanism to which the present invention is applied.

FIG. 7 is a top view illustrating the operation of the arm drive mechanism to which the present invention is applied.

FIG. 8 is a side view for explaining the operation of the moving cassette plate by the arm driving mechanism to which the present invention has been applied.

9A and 9B are a top view and a side view for explaining the operation of the moving cassette plate by the arm driving mechanism to which the present invention is applied.

FIG. 10 is a transport system diagram illustrating the relationship between the transport component, the cassette, and the cassette base in the present invention.

FIG. 11 is a perspective view showing an example of the overall configuration of a conventional conveying device.

FIG. 12 is a transport system diagram illustrating a relationship between a transport component and an empty cassette in a conventional example.

[Explanation of symbols]

11, 12, 13, 14, 15 Processing tank 16, 116 Transfer devices 17-23, 941-945 Cassette 25 Base 26 Rail 27 Transfer belt 28 Differential mechanism drive belt 30 Drive unit 31 Mounting base 32 Transfer motor 33 Differential mechanism drive motor 34 Lifting drive shaft 35 Differential mechanism drive pulley 36 Motor pulleys 37, 38, 39, 63 Idler pulley 40 Rack 41 Support plate 42, 43a, 43b, 47, 48, 49 Bearing 44 Screw screw part 45 Key 46, 60 Change nut 50 Moving part 51 Slide base 52 Elevating base 53 Change nut shaft drive pulley 54 Change nut shaft 55 Inner shaft 56 Cam shaft 57 Joint shaft 58 LM shaft 59 Linear bush 61 Synchronous gear B 62 Synchronous gear A 64 , 65, 66, 91, 2 Cross roller bearing 67, 93 Bearing 68 Roller bracket 69, 75 Cam follower 70, 73 Cam groove 71 Weight mounting plate 72 Working plate 74 Balance weight 76 Tension spring 81 Arm A 82 Arm B 83 Gear A 84 Gear C 85 Gear D 86 Gear B 87 Intermediate shaft 88 Tip shaft 89 Idler gear A 90 Idler gear B 94 Cassette 95 Moving cassette plate 96 Cassette base 97 Cassette base mounting device 98 Wedge projection

─────────────────────────────────────────────────── ─── Continuation of front page (58) Fields surveyed (Int.Cl. ⁷ , DB name) B65G 25/04-25/06 B65G 49/07 B65G 21/68

Claims (2)

(57) [Claims] 1. A moving part that travels horizontally on a rail provided on a base, and that vertically moves and horizontally rotates an arm drive mechanism, and a first drive belt that travels the moving part. A driving unit that drives a second driving belt that applies a driving force to the moving unit that controls the arm driving mechanism, the driving unit being provided on an attachment base fixed to the base. A first motor that applies a driving force to the first drive belt via a pulley, and a screw screw unit that is vertically supported by a bearing provided on the mounting base and that moves vertically without rotating. the was is engaged with the Sukuryuuneji portion of the drive shaft and the elevation drive shaft coupled to the first drive pulley giving the driving force of the differential operation to said second drive belt 1 A differential mechanism including a change nut, and a second motor provided on the mounting base for applying a driving force for moving the lifting drive shaft of the actuating mechanism up and down. A slide base that is connected to a first drive belt and moves on the rail, an elevating base that is rotatably supported by the slide base and is capable of moving up and down, and a lift base that is rotatably supported by the slide base. A change nut shaft having a screw thread portion that is rotatably provided on the change nut shaft and a second change belt that is provided integrally with the change nut shaft and is given a rotational force by the second drive belt. Drive pulley, a first synchronous gear provided on the second change nut so as to rotate integrally with the rotation of the second change nut, and A cam shaft having a rotatably provided crank-shaped groove in the base, and the inner shaft is provided so as to be supported on the elevating base through the center of the cam shaft, wherein the provided integrally with the cam shaft 1 of a second synchronizing gear to synchronize the gear meshing, the a roller bracket having a cam follower which is fixed to the slide base to engage the crank-shaped groove of the cam shaft, combined joint axis Toka et to the camshaft The first driving pulley configured to move the moving section in the horizontal direction by the driving force of the first driving belt of the driving section and rotate based on the lifting operation of the lifting driving shaft of the driving section causes the second driving pulley to rotate. The drive belt is driven to rotate the change nut shaft that rotates coaxially with the second drive pulley of the moving unit by the drive force, and engage with the change nut shaft. Based on the crank-shaped groove of the camshaft, the changeover force is applied to the change nut, and the camshaft is passed through a second synchronous gear that meshes with the first synchronous gear that is provided integrally with the changenut. The arm drive mechanism controls vertical movement and horizontal position shift by the non-rotating inner shaft that rotates and raises and lowers integrally with the cam shaft and the joint shaft that is coupled to the cam shaft. The component transfer device configured as described above. 2. A pair of weight mounting plates provided on the slide base, a pair of working plates having horizontal elongated holes provided on the elevating base, and one end rotatably supported by the weight mounting plate. , A pair of balance weights each having a cam follower whose other end engages with a horizontal elongated hole of the action plate, and the cam follower portions are provided near the cam follower portions of the pair of balance weights so as to attract each other. The component transfer device according to claim 1, further comprising a tension spring.