CN115246568A

CN115246568A - Fork type substrate conveying device and substrate conveying method

Info

Publication number: CN115246568A
Application number: CN202110466017.6A
Authority: CN
Inventors: 黄建凯; 陈传宜
Original assignee: Manz Taiwan Ltd
Current assignee: Manz Taiwan Ltd
Priority date: 2021-04-28
Filing date: 2021-04-28
Publication date: 2022-10-28

Abstract

The invention relates to a forked substrate conveying device and a substrate conveying method. The substrate is transported along a first direction on the first transport layer. The second conveying layer has a space with the first conveying layer, and the substrate is conveyed on the second conveying layer along the direction opposite to the first direction. The first fork type conveying module bears the substrate and moves between a first position corresponding to the first conveying layer and a second position corresponding to the second conveying layer. The second fork type conveying module is arranged on the second conveying layer, can move to be overlapped with the first fork type conveying module at the second position in a staggered mode, and conveys the substrate in the second conveying layer along the direction opposite to the first direction.

Description

Fork type substrate conveying device and substrate conveying method

Technical Field

The present invention relates to a substrate transfer apparatus and method, and more particularly, to a forked substrate transfer apparatus and method for transferring a substrate between an upper transfer layer and a lower transfer layer.

Background

Generally, a conventional substrate transportation device generally transfers a substrate to a transportation structure composed of a plurality of transportation rollers by a transportation line, and then moves the substrate to a designated position by a robot arm disposed near the transportation structure, or picks up the substrate by the robot arm and then lifts the substrate to another group of transportation structures.

Therefore, it is an object of the present invention to provide a method for transporting a substrate to a predetermined position without size limitation, which can shorten the transportation time, and can solve the problem that the substrate cannot be transported to the predetermined position in a short time during the transportation process.

Disclosure of Invention

In view of the above, the present invention provides a fork type substrate conveying apparatus and a method for conveying a substrate, in which two fork type conveying modules are overlapped in a staggered manner to achieve a horizontal conveying effect of the substrate.

Another objective of the present invention is to provide a substrate transfer apparatus and a substrate transfer method, which can control the rotation of the rotary driving member and the horizontal separation of the third bases on both sides by the control module, and then control the vertical descent of the first driving member, so as to achieve the simultaneous actions of rotation and horizontal movement, thereby saving the substrate transfer time and effectively shortening the substrate transfer time.

Another objective of the present invention is to provide a forked substrate transporting device and a method thereof, which can control the rotation of the rotary driving member and the horizontal separation of the third bases on both sides by the control module, and simultaneously control the vertical descending of the first driving member to achieve synchronous control, thereby achieving simultaneous actions of rotation, horizontal movement and vertical movement, saving approximately three-fold transporting time, and effectively shortening the substrate transporting time.

One embodiment of the forked substrate conveying device comprises a first conveying layer, a second conveying layer, a first forked conveying module and a second forked conveying module. The substrate is transported along a first direction on the first transport layer. The second conveying layer has a space with the first conveying layer, and the substrate is conveyed on the second conveying layer along the direction opposite to the first direction. The first fork type conveying module bears the substrate and moves between a first position corresponding to the first conveying layer and a second position corresponding to the second conveying layer. The second fork type conveying module is arranged on the second conveying layer, can move to be overlapped with the first fork type conveying module at the second position in a staggered mode, and conveys the substrate in the second conveying layer along the direction opposite to the first direction.

The forked substrate conveying device as described above, wherein the first forked conveying module includes a first driving assembly and a first forked assembly, and the first driving assembly drives the first forked assembly to move between the first conveying layer and the second conveying layer.

The tooth fork type substrate conveying device as described above, wherein the first driving component includes a first base, a first driving component and a first guiding component, the first driving component and the first guiding component are disposed on the first base, the first tooth fork type component is connected to the first driving component, and the first driving component drives the first tooth fork type component to move on the first base under the guiding of the first guiding component.

The forked substrate transporting device as described above, wherein the first driving member includes a first servo motor and a first lead screw, the first forked component is movably disposed on the first lead screw, and the first servo motor rotates the first lead screw to move the first forked component along the first lead screw.

The forked substrate conveying device as described above, wherein the first forked assembly includes a second base, a second guiding member, a second driving member and a pair of first forked carrying arms, the second driving member and the second guiding member are disposed on the second base, and the second driving member drives the pair of first forked carrying arms to move relatively along the second guiding member.

The forked substrate transporting device as described above, wherein the second driving member includes a second servo motor and a pair of second lead screws, the pair of first forked carrying arms are disposed on the pair of second lead screws, and the second servo motor rotates the pair of second lead screws to move the pair of first forked carrying arms relative to each other.

The substrate transfer apparatus further includes a pair of third bases and a pair of rotary driving members, wherein the pair of third bases is movably disposed on the pair of second lead screws, the pair of first fork-type carrying arms are rotatably disposed on the pair of third bases, and the pair of rotary driving members drives the pair of first fork-type carrying arms to rotate.

In the above-mentioned substrate transportation device, the rotary driving member includes a third servo motor and a transmission gear set, and a torque of the third servo motor is transmitted to the pair of first tooth fork type carrying arms via the transmission gear set, so as to rotate the pair of first tooth fork type carrying arms.

The forked substrate conveying device as described above, wherein the second forked conveying module comprises a second driving assembly and a second forked assembly, and the second driving assembly drives the second forked assembly to move on the second conveying layer.

The forked substrate transporting device as described above, wherein the second driving assembly includes a fourth base, a third driving member and a third guiding member, the fourth base is disposed along the second transporting layer, the third guiding member and the third driving member are disposed on the fourth base, and the third driving member drives the pair of forked assemblies to move along the first direction on the fourth base under the guidance of the third guiding member.

The forked substrate transporting device as described above, wherein the third driving member includes a fourth servo motor and a third lead screw, the second forked assembly is disposed on the third lead screw, and the fourth servo motor rotates the third lead screw to move the second forked assembly along the third lead screw.

In the above-mentioned feeding device for feeding forked substrates, the second forked assembly includes a fifth base and a second forked carrying arm, the second forked carrying arm is disposed on the fifth base, and the fifth base is driven by the third driving member to move on the fourth base.

One embodiment of the substrate transfer method of the present invention comprises the steps of: a substrate is conveyed along a first direction on a first conveying layer; transferring the substrate from the first transfer layer to a second transfer layer by the first fork-type transfer module; moving the second forked transmission module to be overlapped with the first forked transmission module in a staggered manner on the second transmission layer; moving the first forked transmission module from the second transmission layer to the first transmission layer, and the substrate is carried by the second forked transmission module; the second forked transmission module carrying the substrate is transmitted along the direction opposite to the first direction on the second transmission layer.

The substrate conveying method as described above, wherein the steps from S2 to S3 further include the following steps: step S21: a first fork type conveying module is positioned below the first position of the first conveying layer to be ready; step S22: the first fork type conveying module is lifted upwards from the bottom by a first driving component and is positioned in a crossed way with the first conveying layer to bear the substrate; step S23: the first fork type conveying module bears the weight of the substrate, and is horizontally positioned with the second conveying layer after the substrate is lifted upwards to the top; step S24: the second conveying layer moves to enter the lower part of the substrate and is positioned with the first fork type conveying module in a staggered mode, and the second conveying layer carries the substrate and then moves in the horizontal direction to take the substrate away; step S25: the first fork type transmission module is pivoted by a rotary driving piece and is moved outwards by a second driving component; step S26: the first forked transmission module is directly lowered to the first position; step S27: the first forked transmission module is pivoted by the rotary driving piece so as to lead the first forked transmission module to be vertical to the first driving component; step S28: entering a standby state, positioning the substrate after the substrate is conveyed to the first conveying layer, and repeating the steps S21 to S27.

In the substrate transporting method as described above, the step S25 and the step S26 are performed synchronously to pivot, horizontally move and vertically move the first fork-type transporting module at the same time.

In another embodiment of the present invention, the apparatus comprises at least a first transporting layer, a substrate being transported along a first direction on the first transporting layer; a second transport layer having a spacing from the first transport layer, the substrate being transported on the second transport layer in a direction opposite to the first direction; a first fork type conveying module for bearing the substrate and moving between a first position corresponding to the first conveying layer and a second position corresponding to the second conveying layer; the first fork type conveying module comprises a first driving component and a first fork type component, and the first driving component drives the first fork type component to move between the first conveying layer and the second conveying layer; the first driving component comprises a first base, a first driving component and a first guiding component, the first driving component and the first guiding component are arranged on the first base, the first tooth fork type component is connected to the first driving component, and the first driving component drives the first tooth fork type component to move on the first base under the guidance of the first guiding component; the first fork type assembly comprises a second base, a second guide piece, a second driving piece and a pair of first fork type bearing arms, wherein the second driving piece and the second guide piece are arranged on the second base, and the second driving piece drives the pair of first fork type bearing arms to move relatively along the second guide piece; wherein the first fork assembly further comprises a pair of third bases and a pair of rotary driving members, the pair of third bases are movably arranged on the pair of second guide screws, the pair of first fork bearing arms are respectively and rotatably arranged on the pair of third bases, and the pair of first fork bearing arms are driven by the rotary driving members to rotate.

The dental fork type substrate conveying device as described above, wherein the first driving member includes a first servo motor and a first lead screw, the first dental fork type component is movably disposed on the first lead screw, and the first servo motor rotates the first lead screw to move the first dental fork type component along the first lead screw.

The substrate transfer apparatus with a fork structure as described above, wherein the second driving member includes a second servo motor and a pair of second lead screws, the pair of first fork arms are disposed on the pair of second lead screws, and the second servo motor rotates the pair of second lead screws to move the pair of first fork arms relative to each other.

The rotary driving member includes a third servo motor and a transmission gear set, and the torque of the third servo motor is transmitted to the pair of first tooth fork type carrying arms through the transmission gear set, so that the pair of first tooth fork type carrying arms rotate.

Another embodiment of the substrate conveying method of the present invention comprises the steps of: step S100: a substrate is conveyed along a first direction on a first conveying layer; step S200: transferring the substrate from the first conveying layer to a second conveying layer by a first fork type transfer module; wherein the step S200 further comprises the following steps: step S201: a first fork type conveying module is positioned below the first position of the first conveying layer to be ready; step S202: the first fork type conveying module is lifted upwards from the bottom by a first driving component and is positioned in a crossed way with the first conveying layer to bear the substrate; step S203: the first fork type conveying module bears the weight of the substrate, and is horizontally positioned with the second conveying layer after the substrate is lifted upwards to the top; step S204: the second conveying layer carries the substrate away; step S205: the first fork type transmission module is pivoted by a rotary driving piece and is moved outwards by the second driving component; step S206: the first forked transmission module is directly lowered to the first position; step S207: then the rotary driving piece is used for pivoting, so that the first fork type transmission module is vertical to the first driving component; step S208: entering the standby state, positioning the substrate after the substrate is transferred to the first transfer layer, and repeating the steps S201 to S207.

In the substrate conveying method, the step S205 and the step S206 are performed simultaneously to pivot, horizontally move and vertically move the first fork type conveying module.

The forked conveying module can move to the position where the forked conveying module is staggered and overlapped, so that the substrate is conveyed between the first conveying layer and the second conveying layer with different heights, the conveying time can be shortened, and the substrate can be conveyed to be positioned in a short time.

Drawings

FIG. 1: is a perspective view of an embodiment of the first forked transmission module of the present invention.

FIG. 2 is a schematic diagram: which is a schematic view of the rotation of the fork carrying arm of the first fork type transferring module shown in fig. 1.

FIG. 3: is a perspective view of an embodiment of the second forked transmission module of the present invention.

FIG. 4 is a schematic view of: the present invention is a perspective view of an embodiment of a substrate transfer apparatus of a fork type, wherein a substrate is transferred to a first fork type transfer module at a first transfer layer.

FIG. 5: is a schematic diagram of the first forked transmission module of the forked substrate transmission device in fig. 4 transmitting the substrate from the first transmission layer to the second transmission layer.

FIG. 6: the schematic diagram of the first forked transmission module and the second forked transmission module of the forked substrate conveying device shown in fig. 4 is shown in a staggered and overlapped manner.

FIG. 7: fig. 4 is a schematic view illustrating the second forked transmission module of the forked substrate transportation device of fig. 4 transmitting substrates on the second transmission layer and the forked carrying arm of the first forked transmission module rotating and descending.

FIG. 8: fig. 4 is a schematic view illustrating a first forked transmission module of the forked substrate conveying device transmitting another substrate from a first transmission layer to a second transmission layer.

FIG. 9: a first schematic flow chart of a first embodiment of the substrate transport apparatus with a fork is shown.

FIG. 10: a second schematic view of the process of the first embodiment of the substrate transfer apparatus.

FIG. 11: a flow chart of a second embodiment of the forked substrate conveying device is shown.

Description of the figures

1: tooth fork type substrate conveying device

10: first conveying layer

20: second conveying layer

30: first fork type conveying module

31: first drive assembly

32: first tooth fork type component

40: second fork type conveying module

41: second drive assembly

42: second fork assembly

311: first base

312: first driving member

313: first guide member

314: sliding member

3141: sliding block piece

315: first fixed seat

321: second base

322: second guide member

323: second driving member

324: first fork type bearing arm

325: third base

326: rotary driving member

411: fourth base

412: third driving member

413: third guide member

421: the fifth base

422: second fork type bearing arm

3121: first servo motor

3122: first lead screw

3123: first gear speed reducer

3231: second servo motor

3232: second lead screw

3233: second gear speed reducer

3261: third servomotor

3262: steering gear

4121: fourth servomotor

4122: third lead screw

F: frame structure

F1: lower part

F2: upper part of the layer

L1: a first direction

P: vertical column

S: substrate board

S1 to S5: step (ii) of

S21 to S28: step (ii) of

S100: step (ii) of

S200 to S208: and (5) carrying out the following steps.

Detailed Description

Referring to fig. 1, fig. 2, fig. 3 and fig. 4, a forked substrate transportation device according to an embodiment of the present invention is shown. The substrate transfer apparatus 1 of the present embodiment includes a first transfer layer 10, a second transfer layer 20, a first fork transfer module 30 and a second fork transfer module 40.

The substrate transfer apparatus 1 of the present embodiment has a frame F, the frame F includes a lower portion F1 and an upper portion F2, in a preferred embodiment of the present invention, the lower portion F1 is used as the first transfer layer 10, and the upper portion F2 is used as the second transfer layer 20. The first fork type transfer module 30 is disposed near the frame F, and the second fork type transfer module 40 is disposed at the upper layer F2 of the frame F.

The substrate S is transported along a first direction L1 on the first transport layer 10, for example, the substrate S is transported along the first direction L1 on the first transport layer 10 by a robot or a fork-type carrying arm. The second conveying layer 20 has a spacing from the first conveying layer 10. The first forked conveying module 30 carries the substrate S conveyed along the first direction L1 on the first conveying layer 10, then moves between a first position corresponding to the first conveying layer 10 and a second position corresponding to the second conveying layer 20 to convey the substrate S from the first conveying layer 10 to the second conveying layer 20, the second forked conveying module 40 and the first forked conveying module 30 are overlapped in a staggered manner at the second position, the first forked conveying module 30 moves from the second position back to the first position, the substrate S is carried by the second forked conveying module 40, and then the substrate S is conveyed on the second conveying layer 20 along the direction opposite to the first direction L1.

As shown in fig. 1 and fig. 2, the first forked transmission module 30 includes a first driving element 31 and a first forked element 32, and the first driving element 31 drives the first forked element 32 to move between the first conveying layer 10 and the second conveying layer 20.

As shown in fig. 1 and fig. 2, the first driving assembly 31 includes a first base 311, a first driving member 312 and a first guiding member 313. The first base 311 of the present embodiment is a plate-shaped body and is disposed on a vertical column P, and one end of the vertical column P is disposed on a mounting surface. The first driving member 312 and the first guiding member 313 are disposed on the first base 311, the first guiding member 313 of the embodiment is a pair of rails, the first forked component 32 can move on the first guiding member 313, the first forked component 32 is connected to the first driving member 312, and the first driving member 312 drives the first forked component 32 to move on the first base 311 through the guiding of the first guiding member 313.

As shown in fig. 1 and fig. 2, the first driving element 312 includes a first servo motor 3121 and a first lead screw 3122, the first lead screw 3122 is rotatably disposed on the first base 311 through two first fixing seats 315. The first fork assembly 32 is screwed with the first lead screw 3122, and the first servo motor 3121 is connected to the first lead screw 3122 through a first gear reducer 3123 and rotates the first lead screw 3122, so that the first fork assembly 32 moves along the first lead screw 3122. The first servo motor 3121 rotates the first lead screw 3122 clockwise or counterclockwise and the first fork assembly 32 moves up and down along the first lead screw 3122. In a preferred embodiment of the present invention, the first driving assembly 31 further includes a sliding member 314 and two sliding members 3141 disposed between the sliding member 314 and the first guiding member 313, wherein the sliding member 314 is used to support the first forked assembly 32, and the sliding members 3141 are aligned on a line for assisting the linear movement.

As shown in fig. 1 and 2, the first forked assembly 32 includes a second base 321, a second guiding element 322, a second driving element 323, and a pair of first forked carrying arms 324, wherein the second driving element 323 and the second guiding element 322 are disposed on the second base 321. The second base 321 of the present embodiment is a plate-shaped body, and the second base 321 is screwed to the first lead screw 3122 and movably coupled to the first guide member 313. The second driving member 323 drives the pair of first forked carrying arms 324 to move relatively along the second guiding member 322, i.e. to move closer to or away from each other.

The second driving member 323 includes a second servo motor 3231 and a pair of second lead screws 3232, the pair of first forked carrying arms 324 are disposed on the pair of second lead screws 3232, and the second servo motor 3231 rotates the pair of second lead screws 3232 via a second fixing seat (not shown), so that the pair of first forked carrying arms 324 move relatively to each other. The second servomotor 3231 is connected to the pair of second lead screws 3232 through a second gear reducer 3233, for example, the second servomotor 3231 is disposed at the center of the second base 321, the output shaft of the second servomotor 3231 is connected to the second lead screws 3232 at two sides through the second gear reducer 3233, respectively, when the output shaft of the second servomotor 3231 rotates, the second gear reducer 3233 (e.g., a bevel gear set) rotates the second lead screws 3232 at two sides in opposite directions, so that the two first forked carrier arms 324 approach or separate from each other relatively.

As shown in fig. 1 and fig. 2, the first forked assembly 32 further includes a pair of third bases 325 and a pair of rotary driving members 326, the pair of third bases 325 are disposed on the pair of second lead screws 3232, and the two third bases 325 of the present embodiment are respectively screwed on the two second lead screws 3232 and slidably combined with the second guiding members 322. The pair of first fork arms 324 are rotatably disposed on the pair of third bases 325, respectively, and the pair of rotary driving members 326 drives the pair of first fork arms 324 to rotate. The rotary driving member 326 includes a third servo motor 3261 and a steering gear 3262, a torque of the third servo motor 3261 is transmitted to the pair of first fork arms 324 through the steering gear 3262 to rotate the pair of first fork arms 324, for example, an output shaft of the third servo motor 3261 is connected to a rotating shaft of the first fork arms 324 through a plurality of sets of gears constituting the steering gear 3262, and when the output shaft of the third servo motor 3261 rotates, the first fork arms 324 are driven to rotate through the gear set. The steering device 3262 of the present embodiment can rotate 360 degrees, and further drives the first forked carrying arm 324 to rotate 360 degrees.

Referring to fig. 3, the second forked conveying module 40 includes a second driving element 41 and a second forked element 42, and the second driving element 41 drives the second forked element 42 to move on the second conveying layer 20. The second driving assembly 41 includes a fourth base 411, a third driving member 412 and a third guiding member 413, the fourth base 411 is disposed along the second conveying layer 20, the fourth base 411 of the embodiment is a plate-shaped body, the third guiding member 413 and the third driving member 412 are disposed on the fourth base 411, the third guiding member 413 of the embodiment is a pair of tracks, and the second forked assembly 42 is movably coupled to the third guiding member 413. The third driving member 412 drives the pair of second forked elements 42 to move along the first direction L1 on the fourth base 411 guided by the third guiding member 413.

Referring to fig. 3, the third driving member 412 includes a fourth servo motor 4121 and a third lead screw 4122, the second forked assembly 42 is disposed on the third lead screw 4122, the second forked assembly 42 is screwed with the third lead screw 4122, and the fourth servo motor 4121 rotates the third lead screw 4122 via a gear reducer (not shown) to move the second forked assembly 42 along the third lead screw 4122.

The second forked assembly 42 includes a fifth base 421 and a second forked carrying arm 422, the second forked carrying arm 422 is disposed on the fifth base 421, the fifth base 421 is screwed to the third lead screw 4122 and movably coupled to the third guiding element 413, and the fifth base 421 is driven by the third driving element 412 to move on the fourth base 411. Fourth servo motor 4121 rotates third lead screw 4122 to move fifth base 421 along third lead screw 4122 and to move second fork-type carrier arm 422 on fourth base 411 in first direction L1.

Fig. 4 to 8 show a substrate transfer method using the above-described forked substrate transfer device 1. As shown in fig. 4, the substrate S is transported on the first transport layer 10 along the first direction L1 and is carried by the first fork carrying arm 324 of the first fork assembly 32 of the first fork transport module 30. Next, as shown in fig. 5, the first forked transfer module 30 transfers the substrate S from the first transfer layer 10 to the second transfer layer 20. Then, as shown in fig. 6, the second fork transport module 40 moves to overlap the first fork transport module 30 in the second transport layer 20, i.e. the second fork carrying arm 422 of the second fork transport module 40 moves to overlap the first fork carrying arm 324 of the first fork transport module 30. Next, as shown in fig. 7, the first forked transmission module 30 is moved from the second transmission layer 20 to the first transmission layer 10, the substrate S is carried by the second forked transmission module 40, and the second forked transmission module 40 carrying the substrate S is transmitted in the direction opposite to the first direction L1 on the second transmission layer 20. Next, as shown in fig. 8, another substrate S is transported on the first transport layer 10 along the first direction L1 and carried by the first fork carrying arm 324 of the first fork assembly 32 of the first fork transport module 30.

Referring to fig. 9 and 10, a first schematic view and a second schematic view of a process of a first embodiment of the forked substrate transfer device are shown, and a substrate transfer method is provided, which is suitable for the forked substrate transfer device 1, and at least includes the following steps:

step S1: a substrate S is transported on a first transport layer 10 along a first direction L1. Step S2: the substrate S is transferred from the first transfer layer 10 to a second transfer layer 20 by a first fork transfer module 30.

And step S3: a second forked transmission module 40 moves to overlap with the first forked transmission module 30 in the second transmission layer 20.

And step S4: the first forked transport module 30 is moved from the second transport layer 20 to the first transport layer 10, and the substrate S is carried by the second forked transport module 40.

Step S5: the second forked transmission module 40 carrying the substrate S is transmitted along the direction opposite to the first direction L1 on the second transmission layer 20.

Therefore, the two forked transmission modules are staggered and overlapped with each other to achieve the effect of horizontally transmitting the substrate.

Further, in another embodiment, the step S2 to the step S3 further include the following steps:

step S21: a substrate S is positioned at a first position of a first conveyor 10, and a first forked conveying module 30 is positioned below the first position of the first conveyor 10.

Step S22: the first fork-type transfer module 30 is lifted from the bottom by a first driving assembly 31 and is positioned across the first transport layer 10 to carry the substrate S.

Step S23: the first forked transport module 30 carries the substrate S and lifts it to the top, and then horizontally positions it with the second transport layer 20.

Step S24: the second transporting layer 20 moves to enter under the substrate S and is positioned with the first forked transmission module 30 in a staggered manner, and the substrate S is carried by the second transporting layer 20 and then is moved in the horizontal direction.

Step S25: the first fork carriage module 30 is pivoted by a rotary drive 326 and is simultaneously moved outwardly by the second drive assembly 41. Step S26: the first forked transport module 30 is then lowered directly to the first position.

Step S27: the first forked transport module 30 is pivoted by the rotary driving member 326, so that the first forked transport module 30 is perpendicular to the first driving member 31. Step S28: entering the standby state, positioning the substrate S after being transferred to the first transfer layer 10, and repeating the steps S21 to S27.

In an embodiment of the present invention, the steps S25 and S26 are performed simultaneously to pivot, horizontally move and vertically move the first forked transmission module 30. Wherein, the device of the invention can further link a control module (not marked in the figure), the control module is a PLC controller to control the operation of each tooth fork type transmission module; accordingly, the control module (not shown) controls the rotation of the rotary driving member 326 and the second driving member 323 to horizontally separate the third susceptors 325 at the two sides, and then controls the first driving member 31 to vertically descend, thereby achieving the simultaneous actions of rotation and horizontal movement, saving the substrate conveying time, and effectively shortening the substrate conveying time.

In addition, referring back to fig. 1 and fig. 2, in another embodiment of the substrate transfer apparatus of the present invention, a substrate transfer apparatus 1 of the present invention is provided, wherein the substrate transfer apparatus 1 at least comprises: a first conveying layer 10, on which a substrate S is conveyed along a first direction L1 on the first conveying layer 10; a second transporting layer 20 having a distance from the first transporting layer 10, the substrate S being transported on the second transporting layer 20 along a direction opposite to the first direction L1; a first fork-type transfer module 30 for carrying the substrate S and moving between a first position corresponding to the first transport layer 10 and a second position corresponding to the second transport layer 20; wherein the first forked transmission module 30 comprises a first driving component 31 and a first forked component 32, the first driving component 31 drives the first forked component 32 to move between the first conveying layer 10 and the second conveying layer 20; the first driving assembly 31 includes a first base 311, a first driving member 312 and a first guiding member 313, the first driving member 312 and the first guiding member 313 are disposed on the first base 311, the first fork assembly 32 is connected to the first driving member 312, and the first driving member 312 drives the first fork assembly 32 to move on the first base 311 under the guidance of the first guiding member 313; the first forked assembly 32 includes a second base 321, a second guiding member 322, a second driving member 323, and a pair of first forked carrying arms 324, the second driving member 323 and the second guiding member 322 are disposed on the second base 321, the second driving member 323 drives the pair of first forked carrying arms 324 to move relatively along the second guiding member 322; the first fork assembly 32 further includes a pair of third bases 325 and a pair of rotation driving members 326, the pair of third bases 325 are movably disposed on the pair of second lead screws 3232, the pair of first fork carrying arms 324 are respectively rotatably disposed on the pair of third bases 325, and the pair of rotation driving members 326 drives the pair of first fork carrying arms 324 to rotate.

The first driving member 312 includes a first servo motor 3121 and a first lead screw 3122, the first lead screw 3122 is rotatably disposed on the first base 311 through two first fixing seats 315, the first fixing seats 315 can make the first lead screw 3122 linearly convey, and the stability of vertical conveying is improved. The first forked assembly 32 is engaged with the first lead screw 3122 such that the first servo motor 3121 rotates the first lead screw 3122 to move the first forked assembly 32 along the first lead screw 3122. The first servo motor 3121 is connected to the first lead screw 3122 via a first gear reducer 3123 and rotates the first lead screw 3122 to move the first fork assembly 32 along the first lead screw 3122. The first servo motor 3121 rotates the first lead screw 3122 clockwise or counterclockwise and the first fork assembly 32 moves up and down along the first lead screw 3122. In a preferred embodiment of the present invention, the first driving assembly 31 further includes a sliding member 314 and two sliding members 3141 disposed between the sliding member 314 and the first guiding member 313, wherein the sliding member 314 is used to support the first forked assembly 32, the sliding members 3141 are aligned on a line for assisting the linear movement, and the first lead screw 3122 is rotated by the first servo motor 3121, so that the sliding member 314 moves up and down, which may be a forward rotation, a reverse rotation, or a reverse rotation; in another embodiment, a first coupling block (not shown) is further disposed between the slider 314 and the first lead screw 3122, and the first coupling block is converted into a linear motion by the rotation of the first lead screw 3122.

The second driving element 323 includes a second servo motor 3231 and a pair of second lead screws 3232, the pair of first forked carrying arms 324 are disposed on the pair of second lead screws 3232, and the second servo motor 3231 rotates the pair of second lead screws 3232 to move the pair of first forked carrying arms 324 relatively to each other. Further, a second connection block (not shown) is further disposed between the third base 325 and the second lead screw 3232, and the second connection block is converted into a linear motion by the rotation of the second lead screw 3232; wherein, an output shaft of the second servo motor 3231 is connected to the second lead screws 3232 at both sides via a second gear reducer 3233; furthermore, the second driving member 323 rotates the second lead screw 3232 via the second servo motor 3231, and the second connecting block is converted into a linear motion due to the rotation of the second lead screw 3232, wherein the second lead screw 3232 is a dual ball screw, the screw direction is a right screw direction and a left screw direction, the second servo motor 3231 rotates to drive the second lead screw 3232 via the dual output shafts of the second gear reducer 3233, and the horizontal position can be adjusted independently and horizontally, and can be opened and closed synchronously, the horizontal motion track is limited by the linear slide block, and the horizontal motion speed and position can be controlled by the input of instructions of the second servo motor 3231.

The rotation driving member 326 includes a third servo motor 3261 and a transmission gear set, the torque of the third servo motor 3261 is transmitted to the pair of first tooth-fork type bearing arms 324 through the transmission gear set, so that the pair of first tooth-fork type bearing arms 324 rotates, the third servo motor 3261 rotates the rotation driving member 326, the plate surface of the rotation driving member 326 can rotate 360 degrees, and further the rotation of the first tooth-fork type bearing arms 324 is driven.

Referring to fig. 11, a schematic flow chart of a second embodiment of the forked substrate conveying device is shown, which is suitable for the forked substrate conveying device, and at least includes the following steps:

step S100: a substrate S is transported along a first direction on a first transport layer 10.

Step S200: transferring the substrate S from the first transporting layer 10 to a second transporting layer 20 by a first forked transferring module 30; wherein the step S200 further comprises the following steps:

step S201: a substrate S is positioned at a first position of a first transport layer 10, and a first fork type transfer module 30 is positioned below the first position of the first transport layer 10.

Step S202: the first fork-type transfer module 30 is lifted from the bottom by a first driving assembly 31 and is positioned across the first transport layer 10 to carry the substrate S.

Step S203: the first forked transport module 30 carries the substrate S and lifts it to the top, and then horizontally positions it with the second transport layer 20.

Step S204: the second conveyance layer 20 carries away the substrate S.

Step S205: the first forked transmission module 30 is pivoted by a rotary driving member 326 and is moved outward by the second driving element 41.

Step S206: the first forked transport module 30 is then lowered directly to the first position.

Step S207: the first forked transport module 30 is then pivoted by the rotary driving member 326 to be perpendicular to the first driving member 31.

Step S208: entering the standby state, the substrate S is positioned after being transported to the first transport layer 10, and the steps S201 to S207 are repeated.

In yet another embodiment, the step S205 and the step S206 are performed simultaneously to perform the pivoting, the horizontal movement and the vertical movement of the first forked conveying module 30; therefore, the pivoting, horizontal and vertical movements can achieve synchronous operation through the independent driving components, the time for transmitting the substrate can be effectively shortened, and the conveying efficiency is greatly improved.

Claims

1. A substrate transfer apparatus of a fork type, comprising at least:

a first transport layer (10) on which a substrate (S) is transported in a first direction (L1) on the first transport layer (10);

a second transport layer (20) spaced apart from the first transport layer (10), the substrate (S) being transported on the second transport layer (20) in a direction opposite to the first direction (L1);

a first fork-type transfer module (30) carrying the substrate (S) and moving between a first position corresponding to the first transport layer (10) and a second position corresponding to the second transport layer (20);

a second forked conveying module (40) which is arranged on the second conveying layer (20), can move to be overlapped with the first forked conveying module (30) at the second position in a staggered mode, and conveys the substrate (S) in the direction opposite to the first direction (L1) on the second conveying layer (20).

2. The apparatus according to claim 1, wherein the first forked transport module (30) comprises a first driving element (31) and a first forked element (32), the first driving element (31) driving the first forked element (32) to move between the first transport layer (10) and the second transport layer (20).

3. The apparatus according to claim 2, wherein the first driving assembly (31) comprises a first base (311), a first driving member (312) and a first guiding member (313), the first driving member (312) and the first guiding member (313) are disposed on the first base (311), the first fork assembly (32) is connected to the first driving member (312), and the first driving member (312) drives the first fork assembly (32) to move on the first base (311) guided by the first guiding member (313).

4. The apparatus of claim 3, wherein the first driving member (312) comprises a first servo motor (3121) and a first lead screw (3122), the first fork assembly (32) is movably disposed on the first lead screw (3122), and the first servo motor (3121) rotates the first lead screw (3122) to move the first fork assembly (32) along the first lead screw (3122).

5. The apparatus according to any one of claims 2 to 4, wherein the first forked assembly (32) comprises a second base (321), a second guiding member (322), a second driving member (323), and a pair of first forked carrying arms (324), the second driving member (323) and the second guiding member (322) are disposed on the second base (321), and the second driving member (323) drives the pair of first forked carrying arms (324) to move relatively along the second guiding member (322).

6. The apparatus for transporting a substrate with a fork as claimed in claim 5, wherein the second driving member (323) comprises a second servo motor (3231) and a pair of second lead screws (3232), the pair of first fork arms (324) is disposed on the pair of second lead screws (3232), and the second servo motor (3231) rotates the pair of second lead screws (3232) to move the pair of first fork arms (324) relative to each other.

7. The apparatus for transporting a forked substrate according to claim 6, wherein the first forked assembly (32) further comprises a pair of third bases (325) and a pair of rotary driving members (326), the pair of third bases (325) are movably disposed on the pair of second lead screws (3232), the pair of first forked carrying arms (324) are respectively rotatably disposed on the pair of third bases (325), and the pair of rotary driving members (326) drive the pair of first forked carrying arms (324) to rotate.

8. The apparatus for transporting a forked substrate according to claim 7, wherein the rotary drive (326) comprises a third servo motor (3261) and a transmission gear set, and the torque of the third servo motor (3261) is transmitted to the pair of first forked carrying arms (324) via the transmission gear set to rotate the pair of first forked carrying arms (324).

9. The apparatus according to claim 1, wherein the second forked transport module (40) comprises a second driving element (41) and a second forked element (42), the second driving element (41) driving the second forked element (42) to move on the second transport layer (20).

10. The apparatus according to claim 9, wherein the second driving assembly (41) comprises a fourth base (411), a third driving member (412) and a third guiding member (413), the fourth base (411) is disposed along the second transporting layer (20), the third guiding member (413) and the third driving member (412) are disposed on the fourth base (411), and the third driving member (412) drives the pair of second fork assemblies (42) to move along the first direction (L1) on the fourth base (411) guided by the third guiding member (413).

11. The apparatus of claim 10, wherein the third driving member (412) comprises a fourth servo motor (4121) and a third lead screw (4122), the second fork assembly (42) is disposed on the third lead screw (4122), and the fourth servo motor (4121) rotates the third lead screw (4122) to move the second fork assembly (42) along the third lead screw (4122).

12. The apparatus for transferring a forked substrate according to claim 9, wherein the second forked assembly (42) comprises a fifth base (421) and a second forked carrying arm (422), the second forked carrying arm (422) is disposed on the fifth base (421), and the fifth base (421) is driven by the third driving member (412) to move on the fourth base (411).

13. A substrate conveying method adapted to the forked substrate conveying device (1) according to any one of claims 1 to 12, characterized by comprising at least the following steps:

step S1: a substrate (S) is transported on a first transport layer (10) along a first direction (L1);

step S2: transferring the substrate (S) from the first transfer layer (10) to a second transfer layer (20) by means of a first forked transfer module (30);

and step S3: a second fork type conveying module (40) moves to be overlapped with the first fork type conveying module (30) in a staggered way on the second conveying layer (20);

and step S4: moving the first forked transport module (30) from the second transport layer (20) to the first transport layer (10) and the substrate (S) is carried by the second forked transport module (40);

step S5: the second forked transport module (40) carrying the substrate (S) is transported in the second transport layer (20) in a direction opposite to the first direction (L1).

14. The method for transporting a substrate according to claim 13, wherein the steps from S2 to S3 further comprise the steps of:

step S21: a substrate (S) is positioned at a first position of a first conveying layer (10), and a first forked conveying module (30) is positioned below the first position of the first conveying layer (10) to stand by;

step S22: the first fork type conveying module (30) is lifted from the bottom by a first driving component (31) and is positioned to be crossed with the first conveying layer (10) to bear the substrate (S);

step S23: the first fork type conveying module (30) bears the substrate (S) and is horizontally positioned with the second conveying layer (20) after the substrate (S) rises to the top;

step S24: the second conveying layer (20) moves to enter the lower part of the substrate (S) and is positioned with the first fork type conveying module (30) in a staggered mode, and the second conveying layer (20) carries the substrate (S) and then moves in the horizontal direction to take away the substrate (S);

step S25: the first forked transmission module (30) is pivoted by a rotary driving piece (326) and is moved outwards by a second driving component (41);

step S26: the first forked transport module (30) is then lowered directly to the first position;

step S27: the first forked transmission module (30) is pivoted by the rotary driving member (326) so that the first forked transmission module (30) is perpendicular to the first driving component (31);

step S28: entering a standby state, positioning the substrate (S) after the substrate (S) is conveyed to the first conveying layer (10), and repeating the steps S21 to S27.

15. The substrate conveying method according to claim 14, wherein the steps S25 and S26 are performed simultaneously to pivot, horizontally move and vertically move the first fork-type conveying module (30) simultaneously.

16. A substrate transfer apparatus of a fork type, comprising at least:

a first fork-type transfer module (30) carrying the substrate (S) and moving between a first position corresponding to the first transport layer (10) and a second position corresponding to the second transport layer (20); wherein the first forked transmission module (30) comprises a first driving component (31) and a first forked component (32), the first driving component (31) drives the first forked component (32) to move between the first conveying layer (10) and the second conveying layer (20); the first driving component (31) comprises a first base (311), a first driving component (312) and a first guiding component (313), the first driving component (312) and the first guiding component (313) are arranged on the first base (311), the first forked component (32) is connected to the first driving component (312), and the first driving component (312) drives the first forked component (32) to move on the first base (311) under the guidance of the first guiding component (313); wherein the first forked assembly (32) comprises a second base (321), a second guiding member (322), a second driving member (323) and a pair of first forked carrying arms (324), the second driving member (323) and the second guiding member (322) are disposed on the second base (321), the second driving member (323) drives the pair of first forked carrying arms (324) to move relatively along the second guiding member (322); the first forked assembly (32) further includes a pair of third bases (325) and a pair of rotation driving members (326), the pair of third bases (325) is movably disposed on the pair of second lead screws (3232), the pair of first forked carrying arms (324) is respectively rotatably disposed on the pair of third bases (325), and the pair of rotation driving members (326) drives the pair of first forked carrying arms (324) to rotate.

17. The apparatus of claim 16, wherein the first driving member (312) comprises a first servo motor (3121) and a first lead screw (3122), the first fork assembly (32) is movably disposed on the first lead screw (3122), and the first servo motor (3121) rotates the first lead screw (3122) to move the first fork assembly (32) along the first lead screw (3122).

18. The apparatus for transporting a substrate with a fork as claimed in claim 16, wherein the second driving member (323) comprises a second servo motor (3231) and a pair of second lead screws (3232), the pair of first fork arms (324) is disposed on the pair of second lead screws (3232), and the second servo motor (3231) rotates the pair of second lead screws (3232) to move the pair of first fork arms (324) relative to each other.

19. The apparatus of claim 16, wherein the rotary drive (326) comprises a third servo motor (3261) and a transmission gear set, and the torque of the third servo motor (3261) is transmitted to the pair of first fork arms (324) via the transmission gear set to rotate the pair of first fork arms (324).

20. A substrate conveying method suitable for the forked substrate conveying device according to any one of claims 16 to 19, characterized by comprising at least the following steps:

step S100: a substrate (S) is transported in a first transport layer (10) along a first direction;

step S200: transferring the substrate (S) from the first transport layer (10) to a second transport layer (20) by means of a first forked transfer module (30); wherein the step S200 further comprises the following steps:

step S201: the substrate (S) is positioned at a first position of the first conveying layer (10), and the first forked conveying module (30) is positioned below the first position of the first conveying layer (10) to stand by;

step S202: the first fork type conveying module (30) is lifted from the bottom upwards by a first driving component (31) and is positioned in a crossed way with the first conveying layer (10) to bear the substrate (S);

step S203: the first fork type conveying module (30) bears the substrate (S) and is horizontally positioned with the second conveying layer (20) after the substrate (S) rises to the top;

step S204: the second conveying layer (20) carries away the substrate (S);

step S205: the first forked transmission module (30) is pivoted by a rotary driving piece (326) and is moved outwards by a second driving component (41);

step S206: the first forked transport module (30) is then lowered directly to the first position;

step S207: then the rotary driving member (326) is used for pivoting, so that the first forked transmission module (30) is perpendicular to the first driving component (31);

step S208: entering a standby state, positioning the substrate (S) after the substrate (S) is conveyed to the first conveying layer (10), and repeating the steps S201 to S207.

21. The substrate conveying method according to claim 20, wherein the steps S205 and S206 are performed simultaneously to pivot, horizontally move and vertically move the first fork-type conveying module (30) simultaneously.