JPH0940168A - Differential operation control mechanism for part conveying device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To relax an impact and vibration owing to inertia at the change point of each operation and to perform smooth operation by controlling an operation speed in a process of elevation operation of an arm drive mechanism and horizontal operation including direction change of elevation operation and horizontal operation. SOLUTION: When a cam follower mounting block 86 is rotated clockwise through operation of a motor 13 for driving a differential mechanism, two cam followers 89x and 89y respectively engaged with a cam groove 84 start circular movement centering a motor shaft 87 and a Geneva cam 82 is raised. In raising of the Geneva cam 82, a raising speed is changed at a specified period. Namely, the cam followers 89x and 89y are gradually increased in a speed within some cam groove 84 during movement from a state where the cam follower is positioned in the vertical direction and ending to a state where the cam followers are turned at 90 deg. to the horizontal direction position, and gradually decreased in the speed in a turning state from 90 deg. to 180 deg. and the speed changes are repeated. The movement speed of a differential mechanism drive belt repeates a similar change described above along with the above.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention, after moving a cassette on which parts such as semiconductor processed products are mounted to a predetermined position,
More specifically, the present invention relates to a component transfer device that vertically moves while moving and then vertically shifts a component or a cassette after the vertical movement, and particularly, a driving speed of an arm drive mechanism that vertically moves the cassette and shifts the position in the horizontal direction. The present invention relates to a differential operation control mechanism in a component transfer device for controlling the above.

[0002]

2. Description of the Related Art A "parts conveying device" invented by the inventor of the present application and previously filed for patent will be described with reference to FIGS. FIG. 7 is a perspective view showing an outline of the entire configuration of the component transfer device of the invention of the prior application. Reference numeral 1 is a base, which is shown in a plate shape in this example, but a frame body such as a steel frame is also used. Two
Is for moving the moving unit 30 by horizontal traveling on a rail. Reference numeral 10 denotes a driving unit that moves the moving unit 30 and also provides a driving force for moving the arm driving mechanism (not shown in FIG. 7) by the moving unit 30 so as to move up and down and change the position in the horizontal direction. The drive unit 10 is an elevating drive that is moved up and down by driving a mounting base 11 fixed to the base 1, a conveyance motor 12 and a differential mechanism driving motor 13 fixed to the mounting base 11, and a differential mechanism driving motor 13. The shaft 14 and the elevating and lowering drive shaft 14 are composed of a differential mechanism driving pulley 15 that rotates by elevating and lowering the shaft 14.

The conveyor belt 3 is driven by the operation of the conveyor motor 12, and the differential mechanism drive motor 1 is driven.
The differential mechanism drive belt 4 is driven by rotating the differential mechanism drive pulley 15 by the vertical movement of the vertical drive shaft 14 driven by 3. When the conveyor belt 3 is driven by the operation of the conveyor motor 12,
A conveyor belt 3 connected to the lifting drive shaft 14.
With the rotation of the idler pulley 18, the lifting drive shaft 14 also rotates together with the idler pulley 18. Therefore, at this time, if the elevating drive shaft 14 does not move up and down, the differential mechanism driving belt 4 is driven at the same speed as the conveying belt 3.

The moving section 30 is composed of a slide base 31, an elevating base 32 and the like.
1 is fixed to a conveyor belt 3 and moves on the rail 2 by its operation. Reference numeral 33 is a pulley for driving the change nut shaft, and a rotational force is given by driving the belt 4 for driving the differential mechanism. Reference numeral 34 is a change nut shaft that rotates integrally with the change nut shaft driving pulley 33, and 35 is an inner shaft that is not rotatable with respect to the elevating base 32 and is provided so as to elevate as the elevating base 32 moves up and down. There is. 36 is a cam shaft and a pulley 33 for driving the change nut shaft
It moves up and down and rotates based on the rotation of the cam shaft 36
The elevating base 32 moves up and down as it goes up and down. A joint shaft 37 operates integrally with the cam shaft 36. Reference numeral 38 denotes an LM shaft, which has a function of raising and lowering the elevating base 32 while maintaining the horizontal position.

Next, the structure and operation of the drive unit 10 shown in FIG. 7 will be described with reference to the perspective view shown in FIG. 8 and the side view of the moving unit shown in FIG. Reference numeral 11 is a mounting base fixed to the base 1, 12 is a transporting motor for driving the transporting belt 3 mounted on the mounting base 11 in both forward and reverse directions, and the transporting motor 12 is normally rotating (direction A). Then, the first drive belt 3 performs the operation A-1 via the motor pulley 16, the idler pulleys 17, 18, 19 and the fulcrum pulleys 28, 29. Also, the motor 12 rotates in the reverse direction (direction B).
Then, the conveyor belt 3 is moved to the operation B via the pulleys.
Do -1. Therefore, the moving portion 30 is attached to the carrying belt 3.
By connecting the moving parts 30, the moving part 30 can be moved in the horizontal direction.

Reference numeral 13 denotes a differential mechanism driving motor mounted on the mounting base 11 for raising and lowering the rack 20 to which the support plate 21 is coupled. Reference numeral 14 denotes an elevating and lowering drive shaft, the upper end of which is connected to a bearing 22 connected to a support plate 21.
It is guided in the vertical direction by bearings 23a and 23b provided on the mounting base 11, and a screw screw portion 24 is provided below it. Further, a key 25 is provided on the elevating drive shaft 14 so that the elevating drive shaft 14 can move up and down without rotating. 26 is a change nut,
The bearing 27 is mounted on the mounting base 11 so as to be rotatable, and the change nut 26 is integrally provided with a pulley 15 for driving a differential mechanism. Therefore, when the elevating drive shaft 14 is lowered (in the C direction) via the rack 20 and the support plate 21 by the drive of the differential mechanism driving motor 13, the change nut 26 becomes the screw thread portion 2.
4 is rotated in the E direction by the interaction with 4, the differential mechanism driving pulley 15 is rotated in the same direction, and the differential mechanism driving belt 4 is driven in the E-1 direction. When the elevating drive shaft 14 is raised (D direction), the differential mechanism driving pulley 15 rotates in the F direction by the action opposite to the action described above, and the differential mechanism driving belt 4 is moved to the F-1 direction. Drive in the direction.

Next, the structure and operation of the moving section 30 shown in FIG. 7 will be described with reference to FIGS. 9 and 10. FIG.
9A is a side view, and FIG. 9B is a top view taken along line XX of FIG. 9A. In FIG. 9, 31 is a slide base, 32 is an elevating base, 34 is a change nut shaft, which is rotatably supported by the slide base 31 and a change nut 40 provided on the elevating base 32. A change nut shaft drive pulley 33, to which a rotational force is applied by the differential mechanism drive belt 4, is coupled to the change nut shaft 34. 41 is a synchronous gear B
Thus, the change nut 40 is integrally connected, and rotates as the change nut 40 rotates. An inner shaft 35 moves up and down without rotating as the lift base 32 moves up and down. The inner shaft 35 is integrally provided with a cam shaft 36, a joint shaft 37, and a synchronous gear A42 that meshes with the synchronous gear B41, and is rotatable by an angle defined by the cam shaft 36. It is installed so that it goes up and down as it goes up and down.

Reference numeral 38 denotes LM shafts which are respectively set up on both sides of the slide base 31, 39 is a linear bush fixed to the elevating base 32, which is inserted into the LM shaft 38 to smoothly elevate the elevating base 32 in a horizontal state. It is something to do. 43 is an idler pulley, 44 is a cross roller bearing A, 45 is a cross roller bearing B, 46 is a cross roller bearing C, 47 is a bearing, and 48 is a roller bracket.

FIG. 10A shows the relationship between the roller bracket 48 and the cam shaft 36 provided on the slide base 31. A cam follower 49 is provided on the upper end portion of the roller bracket 48, and a crank-shaped cam groove 50 shown in a developed state in FIG. 10B is provided on the circumferential surface of the cam shaft 36. The cam groove 50 engages with the cam follower 49, and the upper lateral groove 50a and the vertical groove 50
b and the lower lateral groove 50c. Therefore, as will be described later, the rotational force of the synchronous gear B41 and the lifting base 32
The positional relationship of the cam follower 49 engaged with the groove end of the upper lateral groove 50a shown in FIG. 10 by the ascending force of the upper lateral groove 50a is A → B (rotation angle 180 °) of the upper lateral groove 50a, B → C of the vertical groove 50b, Lower lateral groove 50c C → D (rotation angle 180 °)
Change along the way to. The reverse rotational force and the downward force change the positional relationship between the cam follower 49 and the cam groove 50 in the reverse path. That is, the joint shaft 37 connected to the cam shaft 36 is rotated forwardly → upward → forwardly and reversely →
The operation of descending → reverse rotation is performed.

Next, the operation of the moving unit 30 will be described with reference to FIGS. 9 and 10.
It will be described based on. As in the operation of the drive unit 10 in FIG. 8, the differential mechanism drive belt 4 is driven by a predetermined distance in the F-1 direction by the elevation drive shaft 14 rising from the lower end position. This driving force is transmitted to the change nut shaft driving bulley 33 via the idler pulley 43, and the change nut shaft driving bulley 33 is rotated in the F-2 direction. This rotating force is applied to the change nut 40 as an ascending force.
If it cannot rise, it is given as a rotational force.
When the cam follower 49 provided on the roller bracket 48 is present at the groove end A of the upper lateral groove 50a of the cam shaft 36, the upward force of the change nut 40, that is, the lifting base 32 is suppressed by the upper lateral groove 50a.
It will be given as rotational force, and the change nut 4
The synchronous gear B41 provided integrally with 0 is rotated in the F-2 direction. This rotational force is transmitted to the synchronous gear A42 to rotate the synchronous gear A42 in the F-3 direction,
The cam shaft 36 and the joint shaft 37 which are integrated are F-3.
Rotate in the direction. This rotational force causes the tip shaft 68 of the arm drive mechanism, which will be described later, to change its position in the horizontal direction, so that the movable cassette plate 75 attached to the tip shaft 68 is projected.

By this operation, the cam shaft 36 rotates, and the cam groove 50 of the cam follower 49 of the roller bracket 48.
When the relative position with respect to the contact point B between the upper lateral groove 50a and the vertical groove 50b is reached, the change nut 40 becomes unrotatable and the restraint of the upward force is released, and the change nut 40 is released.
At the same time, the cam shaft 36 is raised until the cam follower 49 reaches the lower end C of the vertical groove 50b. Therefore, the elevation base 32 attached to the cam shaft 36, and the joint shaft 37 and the inner shaft 35 attached to the elevation base 32 also rise. When the lower end C of the vertical groove 50b rises to the position of the cam follower 49, the raising force of the change nut 40 is suppressed again, and the synchronous gear B41
Is given a rotational force in the F-2 direction by the lower lateral groove 50c, and is in the raised position by the same action as the upper lateral groove 50a, and the cam shaft 36 is in the F-direction until the cam follower 49 reaches the groove end D of the lower lateral groove 50c. The joint shaft 37 rotates in three directions, and at the same time, the joint shaft 37 also performs the same rotating operation.

That is, by driving the differential mechanism driving belt 4 in the F-1 direction, the joint shaft 37 rotates at a predetermined angle in the lower position (F-3 direction), then ascends, and rotates at the predetermined angle in the upper position. The operation (F-3 direction) is performed. By this operation, the elevating base 32 and each component attached to the elevating base 32 are raised. Further, by lowering the elevating drive shaft 14 of the drive unit 10, the differential mechanism drive belt 4 is driven.
Is driven in the E-1 direction, the operation reverse to the above operation is performed. That is, the cam follower 4 of the roller bracket 48
9, the camshaft 36 has a lower lateral groove 50c → a vertical groove 50b.
→ The joint shaft 37, which operates in the path of the upper lateral groove 50a and is coupled to the cam shaft 36, rotates by a predetermined angle (E) at the lower position.
-3 direction) → descending → rotating at a predetermined angle in the upper position (E
-3 direction) operation is performed.

Next, the raising and lowering operation and the rotating operation of the joint shaft 37 of the moving portion 30, and the joint shaft 37 of the inner shaft 35.
The configuration and operation of the arm drive mechanism that is driven by the ascending / descending operation with and will be described with reference to FIGS. 11 and 12. Note that FIG. 11A is a side sectional view and FIG. 11B is a top view showing the meshing relationship of the gears. Also,
FIG. 12 shows an operating state of two arms by the arm driving mechanism. In FIG. 11, reference numeral 35 is an inner shaft, and a gear A63 is attached to the tip of the arm A61.
Has been fixed. 37 is a joint shaft which is fixed to the case of the arm A61.
61 also rotates.

An intermediate shaft 67 is non-rotatably fixed to the arm A61, and a gear C64 is rotatably supported by the intermediate shaft 67 and meshed with a gear A63 via an idler gear 69. Has been. An arm B62 is rotatably supported on the intermediate shaft 67, and a gear D65 is fixed to the tip of the intermediate shaft 67 contained in the arm B62. A tip shaft 68 is rotatably provided on the arm B62, and a gear B6 that meshes with a gear D65 via an idler gear 70 is attached to the tip shaft 68.
6 are provided. Reference numerals 71 and 72 are cross roller bearings, and 73 is a bearing. The gear ratio between the gears is as follows. The gear ratio of the gear A63 and the gear B66 is set to 1: 1, the ratio of the gear C64 to the gear A63 and the ratio of the gear D65 to the gear B66 are set to 1: 1/2, respectively.

The operation of this arm drive mechanism is performed by the joint shaft 37.
When the arm rotates in the F-3 direction, the arm A61 also rotates in the same direction. At this time, since the inner shaft 35 does not operate, the gear A63 also does not operate. However, arm A6
When 1 performs the rotation operation F-3, the gear A63 provides the rotation operation F-4 to the idler gear 69, and the idler gear 69 performs the rotation operation F-5. The rotational movement F-5 of the idler gear 69 is transmitted to the gear C64 via the cross roller bearing 71, and the gear C64 obtains the rotational movement F-6. The gear C64 is united with the arm B62, and the arm B62 performs the rotation operation F-7. The gear C64 is fixed to the arm B62 via the intermediate shaft 67. The rotation operation F-7 of the arm B62 described above gives a rotation operation F-8 to the gear D65, and this operation gives a rotation operation F-9 to the idler gear 70, and this rotation operation F-9. Gives rotational movement F-10 to gear B66.

The rotary arm A61 by the series of operations described above.
A specific operation of the arm B62 will be described with reference to FIG. FIG. 12 (1) shows the home position, and from this state, as the joint shaft 37 rotates, the rotary arm A61 rotates about the support shaft X corresponding to the center axis of the joint shaft 37 as the fulcrum, and the intermediate shaft 67 rotates (B). (Clockwise)
As shown in (2), the arm B62 performs a rotating operation C (clockwise) about the center line Z of the tip shaft 68 as a fulcrum,
The tip shaft 68 passes through the straight line of motion W and is attracted to the support shaft X. That is, when the rotating arm A61 rotates 45 °, the relative angle between the rotating arm A61 and the rotating arm B62 becomes 90 ° with the intermediate shaft 67 as the intersection. Thereafter, when the rotation angle of the rotation arm A61 becomes 90 °, FIG.
As shown in FIG. 12, the rotating arm A61 and the rotating arm B62 overlap each other, and when the rotating arm A61 rotates 135 °, the state becomes as shown in FIG. 12 (4).
When 180 ° is rotated by 180 °, the tip shaft 68 is moved in a straight path on the opposite side of the home position with the support shaft X interposed therebetween, as shown in FIG. 12 (5).

This operation is performed by the cam follower 49 of the roller bracket 48 of the moving portion 30 from A to B of the upper lateral groove 50a of the cam shaft 36, that is, 1 of the cam shaft 36.
It is given by a rotating motion of 80 °. Next, as described above, when the cam follower 49 reaches the position B of the vertical groove 50b, the cam shaft 36 causes the cam follower 49 to move to the vertical groove 50b.
Ascending until reaching the lower end C of b, as the cam shaft 36 ascends, the change nut 40 as well as the elevating base 32 ascend,
Moreover, the joint shaft 37 and the inner shaft 35 also rise. Therefore, the tip shaft 68 is raised in the position state of FIG. 12 (5) according to the operation of the rotary arm A61 and the rotary arm B62. This ascending distance depends on the camshaft 36.
Substantially corresponds to the length of the vertical groove 50b.

The cam shaft 36 moves up to move the cam follower 49.
However, when the lower end C of the vertical groove 50b is reached, the change nut 40 is restrained from rising and is rotated, and the cam shaft 36 is rotated by 180 ° until the cam follower 49 reaches D of the lower lateral groove 70c. This rotating force causes the joint shaft 37 to rotate in the same direction. Due to this rotation, the rotary arm A61 also rotates in the same direction (counterclockwise direction) as described above, and the tip shaft 68 returns on the linear motion line W by the same action as described with reference to FIG. Move to the top of the home position. In this returning operation, the intermediate shaft 67 passes along the arcuate path above the linear operation line W.

Next, the elevating drive shaft 14 of the drive unit 10 is lowered from the ascending end position, whereby the differential mechanism drive belt 4 is driven by a predetermined distance in the E-1 direction. By this drive, the above-described differential mechanism drive belt 4 operates in the opposite direction to the drive in the F-1 direction. That is, the cam follower 49 of the roller bracket 48 is moved from the groove end D of the lower lateral groove 50c of the cam shaft 36 through the vertical groove 50b to the upper lateral groove 50a.
Of the cam shaft 36 up to the groove end A of the
The reverse rotation → falling → reverse rotation operation of B is transmitted to the rotation arm A61 of the arm drive mechanism, whereby the rotation arm B6
The second tip shaft 68 moves from the upper position of the home position in the ascended state to the predetermined position on the opposite side of the support axis X of the rotary arm A61 through the linear motion line W. 12 (5) → FIG. 12 after descending at the position
In the operation path of (1), the tip shaft 68 returns to the home position.

The carrying state of the cassette for carrying components by the operation of the tip shaft 68 will be described with reference to the side view of FIG. 13A and the top view of FIG. 13B. FIG.
In the figure, reference numeral 77 denotes a cassette base mounting device provided along the transport belt 3 of the transport device, and the cassette base mounting device 77 is provided with a plurality of cassette bases 76. Further, the cassette base 76 is provided with a wedge-shaped projection 78 for preventing the positional displacement when the cassette 74 is placed.
As shown in the side view of FIG. 13A, a rotary arm A61 and a rotary arm B62 are provided at the tip of a joint shaft 37 that encloses the inner shaft 35 in the center thereof. Is the moving cassette plate 75
Has been fixed. This moving cassette plate 75
In this example, two cassettes 74 placed on the cassette table 76 can be taken out and taken in at the same time. Note that FIG. 13 shows a state in which the cassette 74 is placed on the cassette table 76.

Next, the operation of taking in and taking out the cassette 74 by the moving cassette plate 75 will be described. First, the cassette 74 is taken into the cassette base 76 with the cam shaft 36 raised, that is, with the cam follower 49 of the roller bracket 48 positioned at the groove end D of the lower lateral groove 50c of the cam shaft 36.
The cassette 74 placed on the transfer belt 3 is placed at a fixed position.
Are transported by the (position in FIG. 13A). Then, the joint shaft 3 by driving the differential mechanism driving belt 4 and rotating the cam shaft 36 in the range of the lower lateral groove 50c thereof.
By the rotation of 7, the movable cassette plate 75 fixed to the tip shaft 68 of the rotary arm B62 moves in the right direction (arrow i) in the drawing, so-called a protruding operation (FIG. 13A).
Position). Here, the cam follower 49 enters the vertical groove 50b of the cam shaft 36, the joint shaft 37 and the inner shaft 35 lower as the cam shaft 36 lowers, and the movable cassette plate 75 also lowers by the length of the vertical groove 50b (arrow). j) (position in FIG. 13 (a)). The cassette 74 is placed on the cassette table 76 in the middle of this descent. The cam shaft 36 descends and the cam follower 49
When the engagement with respect to shifts from the vertical groove 50b to the upper lateral groove 50a and performs a so-called retraction operation in which the cam shaft 36 rotates, the movable cassette plate 75 moves in the left direction (arrow k) in the drawing to move to the home. Return to position (Fig. 13 (a))
Position). The position in FIG. 13A shows the state of this home position.

Next, the operation of taking out the cassette 74 from the cassette table 76 will be described. The take-out operation is the reverse of the take-in operation. After the moving portion 30 is conveyed to the take-out position of the cassette 74 by the conveying belt 3, the differential mechanism driving belt 4 moves in the opposite direction to the take-in operation. When the groove 50 of the cam shaft 36 with respect to the cam follower 49 of the roller bracket 48 moves in the order of the upper lateral groove 50a → the vertical groove 50b → the lower lateral groove 50c, the movable cassette plate 75 performs a protruding operation. Home position (position in Figure 13 (a))
To the right (arrow m) on the drawing (Fig. 13
(A) position). From this state, the movable cassette plate 75 rises (arrow n) corresponding to the length of the vertical groove 50b (position in FIG. 13A). During this ascending process, the moving cassette plate 75 is placed on the moving cassette plate 75 so as to scoop up the cassette 74 from below. After that, the moving cassette plate 75 performs a retracting operation and moves to the left (arrow o) in the drawing (FIG. 13).
(A) position). In this state, the moving portion 30 is carried to a predetermined position by the carrying belt 3. After that, the taking-in operation is performed again, and the cassette 74 is placed on the predetermined cassette base 76.

As described above, in the parts conveying apparatus of the invention of the prior application, the driving section is fixed to a predetermined position of the conveying apparatus, and the driving belt and the differential belt are driven and controlled by the two driving sources provided in the driving section. A mechanism drive belt is provided, the transfer belt is used to control the transfer travel of the moving unit, and the differential mechanism drive belt raises and lowers the moving cassette plate of the moving unit.
The position change can be controlled in the horizontal direction. Therefore, the moving part of the transfer line and the cassette stand for stocking the cassettes can be on separate lines, and the transfer order of a plurality of cassettes can be changed,
In addition to improving the efficiency of transportation of semiconductor device parts in the processing process, it is possible to eliminate the need for moving wiring air tubes despite the long transportation structure, and to prevent the occurrence of disconnection failures in distribution lines. It is an extremely excellent component transfer device.

[0024]

However, in the component transfer device of the above-mentioned prior invention, the differential mechanism driving belt 4 for raising and lowering the movable cassette plate 75 and for controlling the horizontal position change is provided. Since the differential mechanism driving motor 13 raises and lowers the rack 20 at a constant speed, it is driven at a constant speed in both forward and reverse directions. Therefore, the rotation of the change nut shaft 34 of the moving portion 30 and the 180 ° rotation of the cam shaft 36 controlled by this rotation → elevating operation → 180 ° rotation also operate at a constant speed, and the moving cassette plate 7
The differential operation control mechanism, which moves the position 5 up and down and carries out the drive operation for horizontal position conversion, also operates at a constant speed.

Therefore, since the operation is performed at a constant speed even at the turning point of each operation, a smooth switching of the operation cannot be obtained due to the inertia of each of the horizontal operation and the up-and-down operation, and the vibration of the moving cassette plate 75 is caused. Will be given. That is, when the cassette 74 on the cassette stand 76 is taken out by the moving cassette plate 75, the moving cassette plate 75 projects to reach the lower part of the cassette stand 76, and a point at which it moves upward (a turning point from position to position) and The moving cassette plate 75 continues to rise, and the cassette 74 on the cassette table 76
After placing, the vibration occurs at the point where it reaches the ascending end and turns into the retracting action (the turning point from position to position). Further, since the ascending operation is also performed at a constant speed, when the cassette 74 on the cassette table 76 is placed, a phenomenon occurs in which the cassette 74 and a component (for example, a semiconductor substrate) in the cassette 74 are vibrated.

In contrast to the above-described operation, the operation of loading (mounting) the cassette 74 on the moving cassette plate 75 into the cassette base 76 is similarly performed.
The moving cassette plate 75 on which the
The point at which the cassette table 76 reaches the upper part and falls down (a turning point from position to position), and the moving cassette plate 75 descends, and after the cassette 74 is placed on the cassette table 76, the descending end is reached. A vibration occurs at the point at which the retracting movement is started (the turning point from position to position). Further, since the descending operation is also performed at a constant speed, when the cassette 74 is placed on the cassette table 76, a phenomenon of giving vibration to the cassette 74 and the components in the cassette 74 occurs.

In particular, when the moving cassette plate 75 is switched from the horizontal position changing operation (horizontal operation) to the ascending or descending operation (elevating operation), or when the ascending / descending operation is switched to the horizontal operation, the moving cassette plate 75 moves at a constant speed. Since it is a motion, it switches abruptly, so smooth switching cannot be performed due to the inertia of each of the horizontal movement and the vertical movement, and the placement state is unstable especially when the cassette 74 is placed on the moving cassette plate 75. There was a problem such as becoming. According to the present invention, when the moving cassette plate 75 is switched from the horizontal operation to the lifting operation and from the lifting operation to the horizontal operation, when the cassette 74 on the cassette table 76 is placed on the moving cassette plate 75, and the moving cassette plate 75 is used. Upper cassette 74
When mounting the parts on the cassette table 76, the moving speed of the moving cassette plate 75 is moderated to reduce the impact and vibration due to the inertia force at the turning point of each of the operations, and the smooth parts can be moved. A differential operation control mechanism in an apparatus is provided.

[0028]

A differential operation control mechanism in a parts conveying apparatus according to the present invention travels horizontally on a rail provided on a base, and at the same time causes an arm drive mechanism to perform an elevating operation and a horizontal rotating operation. And a drive unit that drives a first drive belt that drives the drive unit and a second drive belt that applies a drive force to the drive unit that controls the arm drive mechanism. The drive unit is provided on a mounting base fixed to the base, and a first motor that applies a driving force to the first drive belt via a pulley and a bearing vertically provided on the mounting base. Up-down drive shaft having a screw screw portion that is supported in the direction of rotation and that moves up and down without rotating, and the second screw drive unit connected to the screw screw portion of the up-down drive shaft. A differential mechanism section including a first change nut connected to a first drive pulley for applying a differential driving force to the belt, and a driving force for vertically moving the lifting drive shaft of the operating mechanism section. A second motor provided on the mounting base, wherein the moving unit is connected to the first drive belt and moves on the rail; A change nut shaft having a lift base provided therein, a screw screw portion rotatably supported by the slide base, and a screw thread portion engaging with a second change nut rotatably provided on the lift base, and the change nut shaft. A second drive pulley integrally provided on the nut shaft and given a rotational force by the second drive belt, and the second change nut on the second change nut. A first synchronous gear provided to rotate integrally with the rotation of the shaft, a cam shaft having a crank type cam groove in a deployed state rotatably provided to the elevating base, and supported on the elevating base. An inner shaft that penetrates through the center of the cam shaft, a second synchronous gear that is integrally provided on the cam shaft and meshes with the first synchronous gear, and the cam shaft that is fixed to the slide base. A roller bracket having a cam follower that engages with the cam groove and a joint shaft coupled to the cam shaft. The driving force of the first driving belt of the driving unit causes the traveling unit to travel horizontally. The second drive belt is driven by the first drive pulley that is moved and rotates based on the up-and-down motion of the up-and-down drive shaft of the drive unit, and the second drive belt is driven by the drive force to be the same as the second drive pulley of the moving unit. The change nut shaft that rotates around the shaft is rotated to apply a lifting force and a rotating force to the change nut that engages with the change nut shaft, and meshes with the first synchronous gear that is integrally provided with the change nut. The rotating shaft is rotated and moved up and down on the basis of the cam groove via the second synchronous gear, and the inner shaft that does not rotate and moves up and down integrally with the cam shaft and the joint shaft connected to the cam shaft. And the arm drive mechanism is configured to be controlled to move up and down and to change the position in the horizontal direction. In the component transfer device, the arm drive mechanism is connected to the up-and-down drive shaft of the differential mechanism and can be moved up and down on the mounting base. And a cam follower block having two cam followers that engage with the two cam grooves of the Geneva cam. , 2 of the cam follower block
And a second motor for rotating the cam follower block so that the two cam followers rotate at a fixed position around the middle point thereof. The operation speed is controlled in the process of horizontal operation including conversion.

[0029]

1 to 3 show the driving unit 1 described above.
FIG. 1A is a top view, FIG. 1B is a side view, and FIG. 1B is a view for explaining the structure and operation of an embodiment of a differential operation control mechanism of the present invention that elevates and lowers the elevation drive shaft 14 of 0. 2 is a partial sectional rear view, and FIG. 3 is a perspective view. 1 to 3, 81a and 81b are L provided on the mounting base 11.
M block 82 is a Geneva cam having a plurality of stages of cam grooves 84, and LM rails 83 that engage with the LM blocks 81a and 81b are provided on the side surfaces so that lifting and lowering operations can be performed. In this embodiment, the cam groove 84 includes
Six 84f are provided. A differential mechanism driving motor 13 is fixed to a motor mounting plate 85 provided on the mounting base 11. A cam follower mounting block 86 is fixed to a motor shaft 87 of the differential mechanism driving motor 13, and is supported by a guide plate 88.
At the tip of this cam follower mounting block 86, there are two cylindrical cam followers 89x, 8x that engage with two of the cam grooves 84a to 84f of the Geneva cam 82.
9y is provided.

These two cam followers 89x and 89y
Is arranged so that the center of the motor shaft 87 is located at the midpoint thereof, and is slightly displaced to the left or right (right side in the drawing) with respect to the longitudinal center axis of the cam groove 84 of the Geneva cam 82. And the diameter thereof is slightly smaller than the groove width of the cam groove 84. Also, 90
Is a sensor mounting bracket fixed to the motor mounting plate 85. The mounting bracket 90 has a sensor 9 for detecting the upper and lower ends for detecting the operation start point and the stop point of the Geneva cam 82.
Two of 1a and 91b are provided. Also, the motor shaft 8
A sensor shading plate 92a is provided in the middle portion of 7, and a shading plate mounting plate 93 provided with a shading plate 92b of a sensor for detecting the upper and lower ends of the Geneva cam 82 is attached to the Geneva cam 82.

Therefore, the cam groove 8 of the Geneva cam 82 shown in FIG.
In the rear view including the vertical cross section in the four parts, when the cam follower mounting block 86 is rotated clockwise by the operation of the differential mechanism driving motor 13, the cam grooves 84a, 84
Two cam followers 89 each fitted to b
When x and 89y start a circular motion around the motor shaft 87, the cam follower 89x is displaced from the right side of the cam groove 84a, and at the same time, the cam follower 89y is rotated while being in contact with the upper side of the cam groove 84b. Therefore, the Geneva cam 82 rises. When the cam follower mounting block 86 rotates 180 °, the cam follower 89y remains engaged with the cam groove 84b, but the cam follower 89x remains engaged with the cam groove 84c. That is, the 180 ° rotation causes the Geneva cam 82 to move into the cam groove 84.
It means that it has risen by one step. This one-step rise substantially coincides with the distance between the center points of the cam followers 89x and 89y.

In this way, the cam follower mounting block 8
Although the Geneva cam 82 is raised by the rotation of 6, the cam follower 89x becomes the cam groove 84e and the cam follower 8 when the cam follower 89x rotates twice because the cam groove 84 has 6 stages in this embodiment.
9y is engaged with the cam groove 84f. Due to the rise of the Geneva cam 82, the elevation drive shaft 14 is raised via the support plate 21, and the differential mechanism drive belt 4 is moved in a predetermined direction. However, Geneva Cam 8
Since the ascent of 2 is due to the circular motion of the cam followers 89x and 89y, the ascending speed changes at a constant cycle. That is, the cam followers 89x and 89y are located in the vertical direction in one of the cam grooves 84, and
The speed gradually increases until it reaches a state where it is rotated and positioned in the horizontal direction, and gradually decreases when it is rotated from 90 ° to 180 °, and such a speed change is repeated. Along with this, the moving speed of the differential mechanism drive belt 4 repeats similar changes. In addition, when the differential mechanism drive motor 13 is reversely rotated to lower the raising / lowering drive shaft 14 and the Geneva cam 82 is lowered, the same operation is performed, and the lowering speed is also lowered by a constant cycle speed change. The differential mechanism drive belt 4 also repeats similar changes in the moving speed in the opposite direction.

Next, the Geneva cam 82 in the drive unit 10
Cam grooves 84a-84f and cam followers 89x, 89
The relationship between the engagement relationship of y and the operation of the cam shaft 36 of the moving unit 30 will be described with reference to FIGS. 4 and 5. Although FIG. 4 and FIG. 5 are drawings for explaining a series of operations, since they are small in one drawing, they are shown in two drawings separately. FIG. 4A shows a state in which the elevating drive shaft 14 in FIG. 8 is at the lower end, and the cam follower 89x of the drive unit 10 is in the cam groove 84a of the Geneva cam 82, and the cam follower 89y is in the cam groove 84b. The cam follower 49 of the roller bracket 48 of the moving portion 30 is in the position of the groove end A of the cam groove 50 of the cam shaft 36 at this time.

FIG. 4B shows the differential mechanism drive motor 13 of the drive unit 10 when viewed from the direction of the motor shaft 87 (the same applies hereinafter).
It shows a state of being rotated 180 degrees clockwise, and the cam follower 89x moves to the cam groove 84c of the Geneva cam 82 (moving distance P) (the cam follower 89y indicates the cam groove 8c).
4b), the cam shaft 36 rotates 180 ° counterclockwise by this, and the cam follower 49 of the moving portion 30 is at the position of the connecting portion B of the cam groove 50 of the cam shaft 36. It becomes a state. FIG. 4C shows a state in which the differential mechanism drive motor 13 is further rotated clockwise by 180 °. The cam follower 89y moves to the cam groove 84d of the Geneva cam 82 (moving distance Q) (cam follower). 8
9x remains at the position of the cam groove 84c), whereby the cam shaft 36 is raised Q'and the cam follower 4 of the moving unit 30 is moved.
9 is in an intermediate position between the connecting portions B and C of the cam groove 50 of the cam shaft 36.

FIG. 5A shows a state in which the differential mechanism drive motor 13 is further rotated by 180 ° in the clockwise direction.
The cam follower 89x is a cam groove 84e of the Geneva cam 82.
(The cam follower 89y remains in the position of the cam groove 84d), the cam shaft 36 moves up R ', and the cam follower 49 of the moving portion 30 moves to the cam groove 50 of the cam shaft 36. The state is in the position of the connecting portion C of. FIG. 5B shows a state where the differential mechanism drive motor 13 is further rotated clockwise by 180 °, and the cam follower 89y moves (moving distance S) to the cam groove 84f of the Geneva cam 82 (cam follower). 89x is a cam groove 84
(the position e remains unchanged), whereby the cam shaft 36 rotates 180 ° counterclockwise S ′, and the cam follower 49 of the moving portion 30 is located at the lower groove end D of the cam groove 50 of the cam shaft 36. It becomes a state.

In this way, the differential mechanism drive motor 13 of the drive unit 10 makes two clockwise rotations, whereby the Geneva cam 82 rises (moving distance P + Q + R + S). Also,
When the differential mechanism drive motor 13 makes two counterclockwise rotations from this raised state, the Geneva cam 82 is lowered (moving distance S + R + Q + P). In the process of this operation,
Every time the differential mechanism drive motor 13 of the drive unit 10 rotates by 180 °, the Geneva cam 82 is moved before and after each rotation end position.
At the same time, it is possible to accelerate or decelerate the movement of the lifting drive shaft 14. That is, in the ascending process of the cam shaft 36 of the moving portion 30, between the P'and Q'switching from the upper lateral groove 50a to the vertical groove 50b, the intermediate point Q'of the ascending process of the cam shaft 36.
And R ', and between R'and S'which switch from the vertical groove 50b to the lower horizontal groove 50c. Further, when the cam shaft 36 descends, the lower lateral groove 50c
The camshaft 3 between S'and R'which switch from the vertical groove 50b to the vertical groove 50b.
The speed is reduced between the intermediate points R'and Q'of the descending process of 6 and between Q'and P'which switch from the vertical groove 50b to the upper lateral groove 50a.

The operation of the arm drive mechanism by the above-described differential operation control mechanism of the present invention and the operation of the arm drive mechanism in the prior invention can be expressed as a comparison operation graph of both shown in FIG. That is, FIG. 6 shows the operating speed of the arm drive mechanism when the cassette 74 is taken in or taken out from the movable cassette plate 75.
6A shows the operating characteristics of the prior invention, and FIG. 6B shows the operating characteristics of the present invention. In the invention of the prior application, as shown in FIG. 6A, the operation of the arm drive mechanism operates at a constant speed v1 immediately after the start of the operation until immediately before the stop thereof. It causes a tremor. The present invention, on the other hand, is a turning point of the operation a,
In b and c, the operating speed v1 of the arm drive mechanism is accelerated and decelerated and becomes zero at a moment, but the vibration or the like is suppressed.

[0038]

As described above in detail, according to the present invention, the vertical movement of the vertical drive shaft 14 is accelerated or decelerated by the vertical movement of the Geneva cam 82 for driving the differential mechanism of the drive unit 10. The moving speed of the moving cassette plate 75 provided in the arm drive mechanism is controlled by reducing the moving speed of the moving shaft 30 in the vicinity of a predetermined moving point of the cam shaft 36, and the moving cassette generated in the prior invention is generated. The cassette 74 on the cassette stand 76 by the plate 75
It is possible to prevent a phenomenon that a vibration or the like is given to the cassette 74 and the components in the cassette 74 when the cassette 74 on the movable cassette plate 75 is taken into the cassette stand 76. Further, when the movable cassette plate 75 is switched from the horizontal position changing operation (horizontal operation) to the ascending or descending operation (elevating operation), or when the ascending / descending operation is switched to the horizontal operation, each operation that has occurred in the invention of the prior application. The impact problem due to the inertia force of the is alleviated, and a smooth turning motion can be achieved.

[Brief description of drawings]

FIG. 1 is a top view and a side view of a differential operation control mechanism according to an embodiment of the present invention.

FIG. 2 is a rear view of a partial cross section of the differential operation control mechanism of the embodiment of the present invention.

FIG. 3 is a perspective view of a differential operation control mechanism of one embodiment of the present invention.

FIG. 4 is a partial operation diagram (1) for explaining the operation of the differential operation control mechanism of the present invention.

FIG. 5 is a partial operation diagram (2) for explaining the operation of the differential operation control mechanism of the present invention.

FIG. 6 is a graph comparing operating characteristics of the present invention and prior invention.

FIG. 7 is a perspective view showing the outline of the overall configuration of a component carrying device to which the present invention is applied.

FIG. 8 is a perspective view showing an embodiment of a drive unit of the invention of the prior application.

9A and 9B are a side view and a top view showing an embodiment of a moving unit of the component carrying device to which the present invention is applied.

FIG. 10 is a perspective view of a cam mechanism portion of a moving unit of the component carrying device to which the present invention is applied.

11A and 11B are a side view and a top view illustrating an arm drive mechanism provided in a component transfer device to which the present invention is applied.

FIG. 12 is a top view for explaining the operation of the arm drive mechanism provided in the component carrying device to which the present invention is applied.

13A and 13B are a side view and a top view for explaining the operation of the moving cassette plate by the arm driving mechanism provided in the component carrying device to which the present invention is applied.

[Explanation of symbols]

1 Base 2 Rail 3 Conveyor Belt 4 Differential Mechanism Driving Belt 10 Driving Unit 11 Mounting Base 12 Conveying Motor 13 Differential Mechanism Driving Motor 14 Elevating Drive Shaft 15 Differential Mechanism Driving Pulley 16 Motor Pulley 17, 18, 19 , 43 idler pulley 20 rack 21 support plate 22, 23a, 23b, 27 bearing 24 screw screw part 25 key 26, 40 change nut 28, 29 fulcrum pulley 30 moving part 31 slide base 32 lift base 33 change nut shaft drive pulley 34 Change nut shaft 35 Inner shaft 36 Cam shaft 37 Joint shaft 38 LM shaft 39 Linear bush 41 Synchronous gear B 42 Synchronous gear A 44, 45, 46, 71, 72 Cross roller bearing 47, 73 Bearing 48 Roller bracket 49, 89x, 89y Cam follower 50, 84 Cam groove 61 Arm A 62 Arm B 63 Gear A 64 Gear C 65 Gear D 66 Gear B 67 Intermediate shaft 68 Tip shaft 69 Idler gear A 70 Idler gear B 74 Cassette 75 Moving cassette plate 76 Cassette Stand 77 Cassette stand mounting device 78 Wedge type projection 81a, 81b LM block 82 Geneva cam 83 LM rail 85 Motor mounting plate 86 Cam follower mounting block 87 Motor shaft 88 Guide plate 90 Sensor mounting bracket 91a, 91b Sensor 92a, 92b Sensor light shielding plate 93 Shading plate mounting plate

Claims (1)

[Claims] 1. A moving part that travels horizontally on a rail provided on a base, and that vertically moves and horizontally rotates an arm drive mechanism, and a first drive belt that travels the moving part. A driving unit that drives a second driving belt that applies a driving force to the moving unit that controls the arm driving mechanism, the driving unit being provided on an attachment base fixed to the base. A first motor that applies a driving force to the first drive belt via a pulley, and a screw screw unit that is vertically supported by a bearing provided on the mounting base and that moves vertically without rotating. A first drive pulley and a first drive pulley which is connected to a screw thread portion of the elevation drive shaft and is coupled to a first drive pulley for applying a differential driving force to the second drive belt. A differential mechanism including a change nut, and a second motor provided on the mounting base for applying a driving force for moving the lifting drive shaft of the actuating mechanism up and down. A slide base that is connected to a first drive belt and moves on the rail, an elevating base that is rotatably supported by the slide base and is capable of moving up and down, and a lift base that is rotatably supported by the slide base. A change nut shaft having a screw thread portion that is rotatably provided on the change nut shaft and a second change belt that is integrally provided on the change nut shaft and is given a rotational force by the second drive belt. Drive pulley, a first synchronous gear provided on the second change nut so as to rotate integrally with the rotation of the second change nut, and A cam shaft rotatably provided on the base and having a crank type cam groove in an expanded state, an inner shaft supported by the elevating base so as to penetrate the center of the cam shaft, and an integral body to the cam shaft. And a roller bracket having a cam follower that is fixed to the slide base and engages with a cam groove of the cam shaft, and a second synchronous gear that is provided on the slide shaft and is coupled to the cam shaft. A first driving pulley configured to include a joint shaft, the driving unit drivingly moves the moving unit in a horizontal direction by the driving force of the first driving belt, and rotates based on an elevating operation of an elevating drive shaft of the driving unit. Drive the second drive belt, and the drive force rotates the change nut shaft that rotates coaxially with the second drive pulley of the moving unit. A vertical force and a rotational force are applied to the engaging change nut, and the cam shaft is inserted into the cam groove through a second synchronous gear that meshes with the first synchronous gear integrally provided with the change nut. The arm driving mechanism controls the vertical movement and the horizontal position change by the non-rotating inner shaft that integrally rotates with the cam shaft and the joint shaft that is coupled to the cam shaft. In the component transfer device configured as described above, a Geneva cam having a plurality of stages of cam grooves that is connected to the elevating drive shaft of the differential mechanism section and that is vertically movable in the mounting base, and the Geneva cam. A cam follower block having two cam followers that engage with the two-stage cam grooves, and two cam followers of the cam follower block have an intermediate point therebetween. And a second motor that rotates the cam follower block so that the cam follower block rotates at a fixed position, and in a process of horizontal movement including vertical movement of the arm drive mechanism and direction change between vertical movement and horizontal movement. A differential operation control mechanism in a parts transfer device, characterized in that an operation speed is controlled.