JPS6344735A - ウエハ−チツプの検出装置 - Google Patents
ウエハ−チツプの検出装置Info
- Publication number
- JPS6344735A JPS6344735A JP18827486A JP18827486A JPS6344735A JP S6344735 A JPS6344735 A JP S6344735A JP 18827486 A JP18827486 A JP 18827486A JP 18827486 A JP18827486 A JP 18827486A JP S6344735 A JPS6344735 A JP S6344735A
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- wafer chip
- chip
- external shape
- bad
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001514 detection method Methods 0.000 claims abstract description 27
- 230000002950 deficient Effects 0.000 claims abstract description 17
- 238000003384 imaging method Methods 0.000 claims description 14
- 238000005259 measurement Methods 0.000 claims description 7
- 238000000034 method Methods 0.000 abstract description 2
- 230000007547 defect Effects 0.000 description 8
- 238000010586 diagram Methods 0.000 description 7
- 235000018185 Betula X alpestris Nutrition 0.000 description 2
- 235000018212 Betula X uliginosa Nutrition 0.000 description 2
- 241000257465 Echinoidea Species 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 244000292604 Salvia columbariae Species 0.000 description 1
- 235000012377 Salvia columbariae var. columbariae Nutrition 0.000 description 1
- 235000001498 Salvia hispanica Nutrition 0.000 description 1
- 235000014167 chia Nutrition 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18827486A JPS6344735A (ja) | 1986-08-11 | 1986-08-11 | ウエハ−チツプの検出装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18827486A JPS6344735A (ja) | 1986-08-11 | 1986-08-11 | ウエハ−チツプの検出装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6344735A true JPS6344735A (ja) | 1988-02-25 |
| JPH0569302B2 JPH0569302B2 (enrdf_load_html_response) | 1993-09-30 |
Family
ID=16220793
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18827486A Granted JPS6344735A (ja) | 1986-08-11 | 1986-08-11 | ウエハ−チツプの検出装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6344735A (enrdf_load_html_response) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5516953A (en) * | 1994-03-08 | 1996-05-14 | E. I. Du Pont De Nemours And Company | Process for the preparation of optically active cycloolefins |
| JP2003031601A (ja) * | 2001-07-19 | 2003-01-31 | Sony Corp | 電子部品実装装置 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6010746A (ja) * | 1983-06-30 | 1985-01-19 | Nec Home Electronics Ltd | ペレツト外形検査方法 |
| JPS60108914A (ja) * | 1983-11-17 | 1985-06-14 | Nec Corp | ペレット位置検出方法およびその装置 |
| JPS61129839A (ja) * | 1984-11-28 | 1986-06-17 | Toshiba Corp | 半導体ペレツトの不良マ−ク認識方法 |
-
1986
- 1986-08-11 JP JP18827486A patent/JPS6344735A/ja active Granted
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6010746A (ja) * | 1983-06-30 | 1985-01-19 | Nec Home Electronics Ltd | ペレツト外形検査方法 |
| JPS60108914A (ja) * | 1983-11-17 | 1985-06-14 | Nec Corp | ペレット位置検出方法およびその装置 |
| JPS61129839A (ja) * | 1984-11-28 | 1986-06-17 | Toshiba Corp | 半導体ペレツトの不良マ−ク認識方法 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5516953A (en) * | 1994-03-08 | 1996-05-14 | E. I. Du Pont De Nemours And Company | Process for the preparation of optically active cycloolefins |
| JP2003031601A (ja) * | 2001-07-19 | 2003-01-31 | Sony Corp | 電子部品実装装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0569302B2 (enrdf_load_html_response) | 1993-09-30 |
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