JPS6344463Y2 - - Google Patents
Info
- Publication number
- JPS6344463Y2 JPS6344463Y2 JP1983017564U JP1756483U JPS6344463Y2 JP S6344463 Y2 JPS6344463 Y2 JP S6344463Y2 JP 1983017564 U JP1983017564 U JP 1983017564U JP 1756483 U JP1756483 U JP 1756483U JP S6344463 Y2 JPS6344463 Y2 JP S6344463Y2
- Authority
- JP
- Japan
- Prior art keywords
- graphite
- thin film
- graphite heating
- exchange
- heating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 38
- 229910002804 graphite Inorganic materials 0.000 claims description 38
- 239000010439 graphite Substances 0.000 claims description 38
- 238000010438 heat treatment Methods 0.000 claims description 28
- 239000000758 substrate Substances 0.000 claims description 14
- 239000010409 thin film Substances 0.000 claims description 11
- 230000006698 induction Effects 0.000 claims description 5
- 230000008878 coupling Effects 0.000 claims 2
- 238000010168 coupling process Methods 0.000 claims 2
- 238000005859 coupling reaction Methods 0.000 claims 2
- 239000013078 crystal Substances 0.000 description 5
- 238000002488 metal-organic chemical vapour deposition Methods 0.000 description 3
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- RBFQJDQYXXHULB-UHFFFAOYSA-N arsane Chemical compound [AsH3] RBFQJDQYXXHULB-UHFFFAOYSA-N 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Landscapes
- General Induction Heating (AREA)
- Constitution Of High-Frequency Heating (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1756483U JPS59125976U (ja) | 1983-02-10 | 1983-02-10 | 薄膜成長装置用グラファイト加熱台 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1756483U JPS59125976U (ja) | 1983-02-10 | 1983-02-10 | 薄膜成長装置用グラファイト加熱台 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59125976U JPS59125976U (ja) | 1984-08-24 |
| JPS6344463Y2 true JPS6344463Y2 (US20020051482A1-20020502-M00012.png) | 1988-11-18 |
Family
ID=30148797
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1756483U Granted JPS59125976U (ja) | 1983-02-10 | 1983-02-10 | 薄膜成長装置用グラファイト加熱台 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59125976U (US20020051482A1-20020502-M00012.png) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4424426Y1 (US20020051482A1-20020502-M00012.png) * | 1967-07-20 | 1969-10-15 | ||
| JPS5431472A (en) * | 1977-08-15 | 1979-03-08 | Matsushita Electric Works Ltd | Molding of embossed product |
-
1983
- 1983-02-10 JP JP1756483U patent/JPS59125976U/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4424426Y1 (US20020051482A1-20020502-M00012.png) * | 1967-07-20 | 1969-10-15 | ||
| JPS5431472A (en) * | 1977-08-15 | 1979-03-08 | Matsushita Electric Works Ltd | Molding of embossed product |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59125976U (ja) | 1984-08-24 |
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