JPS6344165B2 - - Google Patents
Info
- Publication number
- JPS6344165B2 JPS6344165B2 JP5578782A JP5578782A JPS6344165B2 JP S6344165 B2 JPS6344165 B2 JP S6344165B2 JP 5578782 A JP5578782 A JP 5578782A JP 5578782 A JP5578782 A JP 5578782A JP S6344165 B2 JPS6344165 B2 JP S6344165B2
- Authority
- JP
- Japan
- Prior art keywords
- output
- measured
- light source
- photoelectric conversion
- conversion element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000010408 film Substances 0.000 claims description 17
- 238000006243 chemical reaction Methods 0.000 claims description 9
- 230000003287 optical effect Effects 0.000 claims description 7
- 238000001514 detection method Methods 0.000 claims 6
- 239000010409 thin film Substances 0.000 claims 2
- 230000001678 irradiating effect Effects 0.000 claims 1
- 238000005259 measurement Methods 0.000 description 8
- 230000008859 change Effects 0.000 description 7
- 239000002356 single layer Substances 0.000 description 4
- 230000004907 flux Effects 0.000 description 3
- 239000010410 layer Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000012544 monitoring process Methods 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000005305 interferometry Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 239000012788 optical film Substances 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 230000005428 wave function Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57055787A JPS58172503A (ja) | 1982-04-02 | 1982-04-02 | 膜厚測定装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57055787A JPS58172503A (ja) | 1982-04-02 | 1982-04-02 | 膜厚測定装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58172503A JPS58172503A (ja) | 1983-10-11 |
| JPS6344165B2 true JPS6344165B2 (enrdf_load_stackoverflow) | 1988-09-02 |
Family
ID=13008611
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57055787A Granted JPS58172503A (ja) | 1982-04-02 | 1982-04-02 | 膜厚測定装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58172503A (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0827178B2 (ja) * | 1992-11-06 | 1996-03-21 | 日本アイ・ビー・エム株式会社 | ヘッド浮上量測定装置 |
-
1982
- 1982-04-02 JP JP57055787A patent/JPS58172503A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58172503A (ja) | 1983-10-11 |
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