JPS58172503A - 膜厚測定装置 - Google Patents

膜厚測定装置

Info

Publication number
JPS58172503A
JPS58172503A JP57055787A JP5578782A JPS58172503A JP S58172503 A JPS58172503 A JP S58172503A JP 57055787 A JP57055787 A JP 57055787A JP 5578782 A JP5578782 A JP 5578782A JP S58172503 A JPS58172503 A JP S58172503A
Authority
JP
Japan
Prior art keywords
light
film thickness
light source
measuring device
output
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57055787A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6344165B2 (enrdf_load_stackoverflow
Inventor
Takafumi Sugano
菅野　隆文
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP57055787A priority Critical patent/JPS58172503A/ja
Publication of JPS58172503A publication Critical patent/JPS58172503A/ja
Publication of JPS6344165B2 publication Critical patent/JPS6344165B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP57055787A 1982-04-02 1982-04-02 膜厚測定装置 Granted JPS58172503A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57055787A JPS58172503A (ja) 1982-04-02 1982-04-02 膜厚測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57055787A JPS58172503A (ja) 1982-04-02 1982-04-02 膜厚測定装置

Publications (2)

Publication Number Publication Date
JPS58172503A true JPS58172503A (ja) 1983-10-11
JPS6344165B2 JPS6344165B2 (enrdf_load_stackoverflow) 1988-09-02

Family

ID=13008611

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57055787A Granted JPS58172503A (ja) 1982-04-02 1982-04-02 膜厚測定装置

Country Status (1)

Country Link
JP (1) JPS58172503A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06147841A (ja) * 1992-11-06 1994-05-27 Ibm Japan Ltd ヘッド浮上量測定装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06147841A (ja) * 1992-11-06 1994-05-27 Ibm Japan Ltd ヘッド浮上量測定装置

Also Published As

Publication number Publication date
JPS6344165B2 (enrdf_load_stackoverflow) 1988-09-02

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