JPS6343438U - - Google Patents

Info

Publication number
JPS6343438U
JPS6343438U JP13688886U JP13688886U JPS6343438U JP S6343438 U JPS6343438 U JP S6343438U JP 13688886 U JP13688886 U JP 13688886U JP 13688886 U JP13688886 U JP 13688886U JP S6343438 U JPS6343438 U JP S6343438U
Authority
JP
Japan
Prior art keywords
tool
semiconductor chip
vacuum
shaft
correction member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13688886U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13688886U priority Critical patent/JPS6343438U/ja
Publication of JPS6343438U publication Critical patent/JPS6343438U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Die Bonding (AREA)
JP13688886U 1986-09-04 1986-09-04 Pending JPS6343438U (OSRAM)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13688886U JPS6343438U (OSRAM) 1986-09-04 1986-09-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13688886U JPS6343438U (OSRAM) 1986-09-04 1986-09-04

Publications (1)

Publication Number Publication Date
JPS6343438U true JPS6343438U (OSRAM) 1988-03-23

Family

ID=31040424

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13688886U Pending JPS6343438U (OSRAM) 1986-09-04 1986-09-04

Country Status (1)

Country Link
JP (1) JPS6343438U (OSRAM)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01179330A (ja) * 1987-12-30 1989-07-17 Nec Yamagata Ltd ペレットマウント装置
JP2016140851A (ja) * 2015-02-04 2016-08-08 株式会社 ハリーズ 透明板検査装置及び透明板清掃検査システム

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01179330A (ja) * 1987-12-30 1989-07-17 Nec Yamagata Ltd ペレットマウント装置
JP2016140851A (ja) * 2015-02-04 2016-08-08 株式会社 ハリーズ 透明板検査装置及び透明板清掃検査システム

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