JPS6342528Y2 - - Google Patents

Info

Publication number
JPS6342528Y2
JPS6342528Y2 JP1982106031U JP10603182U JPS6342528Y2 JP S6342528 Y2 JPS6342528 Y2 JP S6342528Y2 JP 1982106031 U JP1982106031 U JP 1982106031U JP 10603182 U JP10603182 U JP 10603182U JP S6342528 Y2 JPS6342528 Y2 JP S6342528Y2
Authority
JP
Japan
Prior art keywords
wafer
heating
photoresist
section
semiconductor wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1982106031U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5911439U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10603182U priority Critical patent/JPS5911439U/ja
Publication of JPS5911439U publication Critical patent/JPS5911439U/ja
Application granted granted Critical
Publication of JPS6342528Y2 publication Critical patent/JPS6342528Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Reciprocating Conveyors (AREA)
  • Drying Of Solid Materials (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
JP10603182U 1982-07-13 1982-07-13 半導体ウエフアの加熱装置 Granted JPS5911439U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10603182U JPS5911439U (ja) 1982-07-13 1982-07-13 半導体ウエフアの加熱装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10603182U JPS5911439U (ja) 1982-07-13 1982-07-13 半導体ウエフアの加熱装置

Publications (2)

Publication Number Publication Date
JPS5911439U JPS5911439U (ja) 1984-01-24
JPS6342528Y2 true JPS6342528Y2 (cg-RX-API-DMAC7.html) 1988-11-08

Family

ID=30248294

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10603182U Granted JPS5911439U (ja) 1982-07-13 1982-07-13 半導体ウエフアの加熱装置

Country Status (1)

Country Link
JP (1) JPS5911439U (cg-RX-API-DMAC7.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0746678B2 (ja) * 1985-05-10 1995-05-17 株式会社東芝 フォトマスク加熱搬送装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5031643Y2 (cg-RX-API-DMAC7.html) * 1971-01-27 1975-09-16
JPS5335906U (cg-RX-API-DMAC7.html) * 1976-09-03 1978-03-29
JPS54149471A (en) * 1978-05-16 1979-11-22 Nec Corp Object moving unit

Also Published As

Publication number Publication date
JPS5911439U (ja) 1984-01-24

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