JPS54149471A - Object moving unit - Google Patents

Object moving unit

Info

Publication number
JPS54149471A
JPS54149471A JP5860678A JP5860678A JPS54149471A JP S54149471 A JPS54149471 A JP S54149471A JP 5860678 A JP5860678 A JP 5860678A JP 5860678 A JP5860678 A JP 5860678A JP S54149471 A JPS54149471 A JP S54149471A
Authority
JP
Japan
Prior art keywords
cylindrical material
cylindrical
object moving
moving unit
move
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5860678A
Other languages
Japanese (ja)
Inventor
Hiroshi Suzuki
Mamoru Sato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP5860678A priority Critical patent/JPS54149471A/en
Publication of JPS54149471A publication Critical patent/JPS54149471A/en
Pending legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)

Abstract

PURPOSE: To carry an object into a cylindrical material and move it without requiring space in front of and in back of the cylindrical material in the unit which causes the object such as a semiconductor wafer to pass and move in the cylindrical material.
CONSTITUTION: Heater 2 is arranged surrounding heat-proof cylindrical material 1, and is covered with adiabator 3. Support material 4 and moving material 5 of object M are arranged in parallel in cylindrical material, and driving mechanism 7 moves vertically and horizontally object moving material 5 through rod 7A at a fixed cycle for the object supporting face of support material 4.
COPYRIGHT: (C)1979,JPO&Japio
JP5860678A 1978-05-16 1978-05-16 Object moving unit Pending JPS54149471A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5860678A JPS54149471A (en) 1978-05-16 1978-05-16 Object moving unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5860678A JPS54149471A (en) 1978-05-16 1978-05-16 Object moving unit

Publications (1)

Publication Number Publication Date
JPS54149471A true JPS54149471A (en) 1979-11-22

Family

ID=13089170

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5860678A Pending JPS54149471A (en) 1978-05-16 1978-05-16 Object moving unit

Country Status (1)

Country Link
JP (1) JPS54149471A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5844721A (en) * 1982-08-31 1983-03-15 Toshiba Corp Baking device for semiconductor wafer
JPS5875154A (en) * 1981-10-29 1983-05-06 Toppan Printing Co Ltd Heater
JPS5911439U (en) * 1982-07-13 1984-01-24 エム・セテツク株式会社 Semiconductor wafer heating equipment
JPS5961027A (en) * 1982-09-29 1984-04-07 Toshiba Corp Semiconductor substrate heating apparatus
JPS5970068U (en) * 1982-11-02 1984-05-12 本田技研工業株式会社 Engine secondary air supply system

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5118908A (en) * 1974-08-09 1976-02-14 Kawasaki Steel Co UOOKINGUBIIMUSHIKIKANETSURONO REIFUSHINNYUBOSHISOCHI

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5118908A (en) * 1974-08-09 1976-02-14 Kawasaki Steel Co UOOKINGUBIIMUSHIKIKANETSURONO REIFUSHINNYUBOSHISOCHI

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5875154A (en) * 1981-10-29 1983-05-06 Toppan Printing Co Ltd Heater
JPH0241163B2 (en) * 1981-10-29 1990-09-14 Toppan Printing Co Ltd
JPS5911439U (en) * 1982-07-13 1984-01-24 エム・セテツク株式会社 Semiconductor wafer heating equipment
JPS6342528Y2 (en) * 1982-07-13 1988-11-08
JPS5844721A (en) * 1982-08-31 1983-03-15 Toshiba Corp Baking device for semiconductor wafer
JPS5961027A (en) * 1982-09-29 1984-04-07 Toshiba Corp Semiconductor substrate heating apparatus
JPS5970068U (en) * 1982-11-02 1984-05-12 本田技研工業株式会社 Engine secondary air supply system

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