JPS54149471A - Object moving unit - Google Patents
Object moving unitInfo
- Publication number
- JPS54149471A JPS54149471A JP5860678A JP5860678A JPS54149471A JP S54149471 A JPS54149471 A JP S54149471A JP 5860678 A JP5860678 A JP 5860678A JP 5860678 A JP5860678 A JP 5860678A JP S54149471 A JPS54149471 A JP S54149471A
- Authority
- JP
- Japan
- Prior art keywords
- cylindrical material
- cylindrical
- object moving
- moving unit
- move
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
Abstract
PURPOSE: To carry an object into a cylindrical material and move it without requiring space in front of and in back of the cylindrical material in the unit which causes the object such as a semiconductor wafer to pass and move in the cylindrical material.
CONSTITUTION: Heater 2 is arranged surrounding heat-proof cylindrical material 1, and is covered with adiabator 3. Support material 4 and moving material 5 of object M are arranged in parallel in cylindrical material, and driving mechanism 7 moves vertically and horizontally object moving material 5 through rod 7A at a fixed cycle for the object supporting face of support material 4.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5860678A JPS54149471A (en) | 1978-05-16 | 1978-05-16 | Object moving unit |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5860678A JPS54149471A (en) | 1978-05-16 | 1978-05-16 | Object moving unit |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS54149471A true JPS54149471A (en) | 1979-11-22 |
Family
ID=13089170
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5860678A Pending JPS54149471A (en) | 1978-05-16 | 1978-05-16 | Object moving unit |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54149471A (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5844721A (en) * | 1982-08-31 | 1983-03-15 | Toshiba Corp | Baking device for semiconductor wafer |
JPS5875154A (en) * | 1981-10-29 | 1983-05-06 | Toppan Printing Co Ltd | Heater |
JPS5911439U (en) * | 1982-07-13 | 1984-01-24 | エム・セテツク株式会社 | Semiconductor wafer heating equipment |
JPS5961027A (en) * | 1982-09-29 | 1984-04-07 | Toshiba Corp | Semiconductor substrate heating apparatus |
JPS5970068U (en) * | 1982-11-02 | 1984-05-12 | 本田技研工業株式会社 | Engine secondary air supply system |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5118908A (en) * | 1974-08-09 | 1976-02-14 | Kawasaki Steel Co | UOOKINGUBIIMUSHIKIKANETSURONO REIFUSHINNYUBOSHISOCHI |
-
1978
- 1978-05-16 JP JP5860678A patent/JPS54149471A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5118908A (en) * | 1974-08-09 | 1976-02-14 | Kawasaki Steel Co | UOOKINGUBIIMUSHIKIKANETSURONO REIFUSHINNYUBOSHISOCHI |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5875154A (en) * | 1981-10-29 | 1983-05-06 | Toppan Printing Co Ltd | Heater |
JPH0241163B2 (en) * | 1981-10-29 | 1990-09-14 | Toppan Printing Co Ltd | |
JPS5911439U (en) * | 1982-07-13 | 1984-01-24 | エム・セテツク株式会社 | Semiconductor wafer heating equipment |
JPS6342528Y2 (en) * | 1982-07-13 | 1988-11-08 | ||
JPS5844721A (en) * | 1982-08-31 | 1983-03-15 | Toshiba Corp | Baking device for semiconductor wafer |
JPS5961027A (en) * | 1982-09-29 | 1984-04-07 | Toshiba Corp | Semiconductor substrate heating apparatus |
JPS5970068U (en) * | 1982-11-02 | 1984-05-12 | 本田技研工業株式会社 | Engine secondary air supply system |
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