JPS6342455Y2 - - Google Patents

Info

Publication number
JPS6342455Y2
JPS6342455Y2 JP16349482U JP16349482U JPS6342455Y2 JP S6342455 Y2 JPS6342455 Y2 JP S6342455Y2 JP 16349482 U JP16349482 U JP 16349482U JP 16349482 U JP16349482 U JP 16349482U JP S6342455 Y2 JPS6342455 Y2 JP S6342455Y2
Authority
JP
Japan
Prior art keywords
aperture
diaphragm
piece
mirror body
sample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP16349482U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5966849U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16349482U priority Critical patent/JPS5966849U/ja
Publication of JPS5966849U publication Critical patent/JPS5966849U/ja
Application granted granted Critical
Publication of JPS6342455Y2 publication Critical patent/JPS6342455Y2/ja
Granted legal-status Critical Current

Links

JP16349482U 1982-10-28 1982-10-28 電子顕微鏡等用絞り装置 Granted JPS5966849U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16349482U JPS5966849U (ja) 1982-10-28 1982-10-28 電子顕微鏡等用絞り装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16349482U JPS5966849U (ja) 1982-10-28 1982-10-28 電子顕微鏡等用絞り装置

Publications (2)

Publication Number Publication Date
JPS5966849U JPS5966849U (ja) 1984-05-04
JPS6342455Y2 true JPS6342455Y2 (enrdf_load_stackoverflow) 1988-11-07

Family

ID=30358723

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16349482U Granted JPS5966849U (ja) 1982-10-28 1982-10-28 電子顕微鏡等用絞り装置

Country Status (1)

Country Link
JP (1) JPS5966849U (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019186937A1 (ja) * 2018-03-29 2019-10-03 株式会社日立ハイテクノロジーズ 荷電粒子線装置

Also Published As

Publication number Publication date
JPS5966849U (ja) 1984-05-04

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