JPS5966849U - 電子顕微鏡等用絞り装置 - Google Patents

電子顕微鏡等用絞り装置

Info

Publication number
JPS5966849U
JPS5966849U JP16349482U JP16349482U JPS5966849U JP S5966849 U JPS5966849 U JP S5966849U JP 16349482 U JP16349482 U JP 16349482U JP 16349482 U JP16349482 U JP 16349482U JP S5966849 U JPS5966849 U JP S5966849U
Authority
JP
Japan
Prior art keywords
aperture
electron microscope
piece
aperture device
detection means
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16349482U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6342455Y2 (enrdf_load_stackoverflow
Inventor
柴田　信正
本田　敏和
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Priority to JP16349482U priority Critical patent/JPS5966849U/ja
Publication of JPS5966849U publication Critical patent/JPS5966849U/ja
Application granted granted Critical
Publication of JPS6342455Y2 publication Critical patent/JPS6342455Y2/ja
Granted legal-status Critical Current

Links

JP16349482U 1982-10-28 1982-10-28 電子顕微鏡等用絞り装置 Granted JPS5966849U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16349482U JPS5966849U (ja) 1982-10-28 1982-10-28 電子顕微鏡等用絞り装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16349482U JPS5966849U (ja) 1982-10-28 1982-10-28 電子顕微鏡等用絞り装置

Publications (2)

Publication Number Publication Date
JPS5966849U true JPS5966849U (ja) 1984-05-04
JPS6342455Y2 JPS6342455Y2 (enrdf_load_stackoverflow) 1988-11-07

Family

ID=30358723

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16349482U Granted JPS5966849U (ja) 1982-10-28 1982-10-28 電子顕微鏡等用絞り装置

Country Status (1)

Country Link
JP (1) JPS5966849U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2019186937A1 (ja) * 2018-03-29 2021-02-25 株式会社日立ハイテク 荷電粒子線装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2019186937A1 (ja) * 2018-03-29 2021-02-25 株式会社日立ハイテク 荷電粒子線装置
US11335532B2 (en) 2018-03-29 2022-05-17 Hitachi High-Tech Corporation Charged particle beam device
US11817289B2 (en) 2018-03-29 2023-11-14 Hitachi High-Tech Corporation Charged particle beam device

Also Published As

Publication number Publication date
JPS6342455Y2 (enrdf_load_stackoverflow) 1988-11-07

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