JPS6341879B2 - - Google Patents

Info

Publication number
JPS6341879B2
JPS6341879B2 JP59109632A JP10963284A JPS6341879B2 JP S6341879 B2 JPS6341879 B2 JP S6341879B2 JP 59109632 A JP59109632 A JP 59109632A JP 10963284 A JP10963284 A JP 10963284A JP S6341879 B2 JPS6341879 B2 JP S6341879B2
Authority
JP
Japan
Prior art keywords
container
high dissociation
dissociation pressure
single crystal
compound semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP59109632A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60255692A (ja
Inventor
Koichi Sasa
Kenji Tomizawa
Yasushi Shimanuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Metal Corp
Shingijutsu Kaihatsu Jigyodan
Original Assignee
Mitsubishi Metal Corp
Shingijutsu Kaihatsu Jigyodan
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Metal Corp, Shingijutsu Kaihatsu Jigyodan filed Critical Mitsubishi Metal Corp
Priority to JP10963284A priority Critical patent/JPS60255692A/ja
Priority to DE8484109948T priority patent/DE3472577D1/de
Priority to DE198484109948T priority patent/DE139157T1/de
Priority to EP84109948A priority patent/EP0139157B1/en
Priority to US06/644,840 priority patent/US4704257A/en
Publication of JPS60255692A publication Critical patent/JPS60255692A/ja
Publication of JPS6341879B2 publication Critical patent/JPS6341879B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP10963284A 1983-08-31 1984-05-31 高解離圧化合物半導体単結晶引き上げ装置 Granted JPS60255692A (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP10963284A JPS60255692A (ja) 1984-05-31 1984-05-31 高解離圧化合物半導体単結晶引き上げ装置
DE8484109948T DE3472577D1 (en) 1983-08-31 1984-08-21 Apparatus for growing single crystals of dissociative compounds
DE198484109948T DE139157T1 (de) 1983-08-31 1984-08-21 Vorrichtung zur zuechtung von einkristallinen zersetzbaren verbindungen.
EP84109948A EP0139157B1 (en) 1983-08-31 1984-08-21 Apparatus for growing single crystals of dissociative compounds
US06/644,840 US4704257A (en) 1983-08-31 1984-08-28 Apparatus for growing single crystals of dissociative compounds

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10963284A JPS60255692A (ja) 1984-05-31 1984-05-31 高解離圧化合物半導体単結晶引き上げ装置

Publications (2)

Publication Number Publication Date
JPS60255692A JPS60255692A (ja) 1985-12-17
JPS6341879B2 true JPS6341879B2 (enrdf_load_stackoverflow) 1988-08-19

Family

ID=14515195

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10963284A Granted JPS60255692A (ja) 1983-08-31 1984-05-31 高解離圧化合物半導体単結晶引き上げ装置

Country Status (1)

Country Link
JP (1) JPS60255692A (enrdf_load_stackoverflow)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62197390A (ja) * 1986-02-25 1987-09-01 Mitsubishi Metal Corp 二重構造容器
JPS62297291A (ja) * 1986-06-18 1987-12-24 Res Dev Corp Of Japan 砒化ガリウム単結晶引き上げ装置
DE68917052T2 (de) * 1988-08-19 1994-12-22 Mitsubishi Materials Corp Verfahren zur Einkristallzüchtung von zersetzbaren Halbleiter-Verbindungen.
DE68917054T2 (de) * 1988-08-19 1995-01-05 Mitsubishi Materials Corp Verfahren zur Einkristallzüchtung von zersetzbaren Halbleiter-Verbindungen.
JPH085745B2 (ja) * 1992-09-22 1996-01-24 三菱マテリアル株式会社 化合物半導体引き上げ装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS516871A (ja) * 1974-06-03 1976-01-20 Little Inc A Mukikagobutsunoyojugoseinotamenohannoyoki oyobi sochi

Also Published As

Publication number Publication date
JPS60255692A (ja) 1985-12-17

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