JPS6341220B2 - - Google Patents

Info

Publication number
JPS6341220B2
JPS6341220B2 JP56041345A JP4134581A JPS6341220B2 JP S6341220 B2 JPS6341220 B2 JP S6341220B2 JP 56041345 A JP56041345 A JP 56041345A JP 4134581 A JP4134581 A JP 4134581A JP S6341220 B2 JPS6341220 B2 JP S6341220B2
Authority
JP
Japan
Prior art keywords
semiconductor
bonding wire
wiring
inspection
chip
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56041345A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57155743A (en
Inventor
Masato Myamura
Jushi Inagaki
Masahito Nakajima
Tetsuo Hizuka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP56041345A priority Critical patent/JPS57155743A/ja
Publication of JPS57155743A publication Critical patent/JPS57155743A/ja
Publication of JPS6341220B2 publication Critical patent/JPS6341220B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G01R31/308—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation
    • H10W70/682—
    • H10W72/0711—
    • H10W72/075—
    • H10W72/07531—
    • H10W72/5363—
    • H10W72/884—

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Electromagnetism (AREA)
  • Toxicology (AREA)
  • Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Wire Bonding (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP56041345A 1981-03-20 1981-03-20 Inspection device for semiconductor bonding wire Granted JPS57155743A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56041345A JPS57155743A (en) 1981-03-20 1981-03-20 Inspection device for semiconductor bonding wire

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56041345A JPS57155743A (en) 1981-03-20 1981-03-20 Inspection device for semiconductor bonding wire

Publications (2)

Publication Number Publication Date
JPS57155743A JPS57155743A (en) 1982-09-25
JPS6341220B2 true JPS6341220B2 (esLanguage) 1988-08-16

Family

ID=12605923

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56041345A Granted JPS57155743A (en) 1981-03-20 1981-03-20 Inspection device for semiconductor bonding wire

Country Status (1)

Country Link
JP (1) JPS57155743A (esLanguage)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5989538U (ja) * 1982-12-08 1984-06-18 日本電気ホームエレクトロニクス株式会社 ペレツトピツクアツプ装置
JPS59119843A (ja) * 1982-12-27 1984-07-11 Fujitsu Ltd 自動ワイヤ検査装置
JPS59171129A (ja) * 1983-03-17 1984-09-27 Fujitsu Ltd 自動配線検査装置
JPH0781848B2 (ja) * 1985-05-20 1995-09-06 富士通株式会社 線状物体検査装置
JPH0732188B2 (ja) * 1986-12-03 1995-04-10 ビュー・エンジニアリング・インコーポレーテッド 半導体装置の検査装置
JPH07111998B2 (ja) * 1989-08-18 1995-11-29 株式会社東芝 ワイヤボンディング検査装置
US5298989A (en) * 1990-03-12 1994-03-29 Fujitsu Limited Method of and apparatus for multi-image inspection of bonding wire

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54130880A (en) * 1978-04-03 1979-10-11 Hitachi Ltd Detector for chip position on semiconductor wafer
JPS55165647A (en) * 1979-06-11 1980-12-24 Mitsubishi Electric Corp Device for automatically detecting whether wire bonding position is right or wrong

Also Published As

Publication number Publication date
JPS57155743A (en) 1982-09-25

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