JPS6340013B2 - - Google Patents

Info

Publication number
JPS6340013B2
JPS6340013B2 JP57051626A JP5162682A JPS6340013B2 JP S6340013 B2 JPS6340013 B2 JP S6340013B2 JP 57051626 A JP57051626 A JP 57051626A JP 5162682 A JP5162682 A JP 5162682A JP S6340013 B2 JPS6340013 B2 JP S6340013B2
Authority
JP
Japan
Prior art keywords
ion beam
signal
liquid metal
electric field
tip
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP57051626A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58169761A (ja
Inventor
Ryuzo Aihara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Denshi KK filed Critical Nihon Denshi KK
Priority to JP57051626A priority Critical patent/JPS58169761A/ja
Publication of JPS58169761A publication Critical patent/JPS58169761A/ja
Publication of JPS6340013B2 publication Critical patent/JPS6340013B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/08—Ion sources; Ion guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/26—Ion sources; Ion guns using surface ionisation, e.g. field effect ion sources, thermionic ion sources

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
JP57051626A 1982-03-30 1982-03-30 電界放出型イオンビ−ム発生装置 Granted JPS58169761A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57051626A JPS58169761A (ja) 1982-03-30 1982-03-30 電界放出型イオンビ−ム発生装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57051626A JPS58169761A (ja) 1982-03-30 1982-03-30 電界放出型イオンビ−ム発生装置

Publications (2)

Publication Number Publication Date
JPS58169761A JPS58169761A (ja) 1983-10-06
JPS6340013B2 true JPS6340013B2 (enrdf_load_stackoverflow) 1988-08-09

Family

ID=12892062

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57051626A Granted JPS58169761A (ja) 1982-03-30 1982-03-30 電界放出型イオンビ−ム発生装置

Country Status (1)

Country Link
JP (1) JPS58169761A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03254504A (ja) * 1990-03-05 1991-11-13 Pioneer Electron Corp アンテナ装置
JPH0539011U (ja) * 1991-10-21 1993-05-25 株式会社ケンウツド 車載用アンテナの取付構造

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0746585B2 (ja) * 1985-05-24 1995-05-17 株式会社日立製作所 イオンビーム装置およびイオンビーム形成方法
JP4991410B2 (ja) * 2006-07-06 2012-08-01 株式会社日立ハイテクノロジーズ 集束イオンビーム装置
US7667209B2 (en) * 2006-07-06 2010-02-23 Hitachi High-Technologies Corporation Focused ION beam apparatus

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56112058A (en) * 1980-02-08 1981-09-04 Hitachi Ltd High brightness ion source

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03254504A (ja) * 1990-03-05 1991-11-13 Pioneer Electron Corp アンテナ装置
JPH0539011U (ja) * 1991-10-21 1993-05-25 株式会社ケンウツド 車載用アンテナの取付構造

Also Published As

Publication number Publication date
JPS58169761A (ja) 1983-10-06

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