JPS6348930Y2 - - Google Patents

Info

Publication number
JPS6348930Y2
JPS6348930Y2 JP12524382U JP12524382U JPS6348930Y2 JP S6348930 Y2 JPS6348930 Y2 JP S6348930Y2 JP 12524382 U JP12524382 U JP 12524382U JP 12524382 U JP12524382 U JP 12524382U JP S6348930 Y2 JPS6348930 Y2 JP S6348930Y2
Authority
JP
Japan
Prior art keywords
filament
ionization chamber
pressure
gas
voltage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP12524382U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5928952U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12524382U priority Critical patent/JPS5928952U/ja
Publication of JPS5928952U publication Critical patent/JPS5928952U/ja
Application granted granted Critical
Publication of JPS6348930Y2 publication Critical patent/JPS6348930Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Particle Accelerators (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Electron Tubes For Measurement (AREA)
JP12524382U 1982-08-18 1982-08-18 イオン源 Granted JPS5928952U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12524382U JPS5928952U (ja) 1982-08-18 1982-08-18 イオン源

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12524382U JPS5928952U (ja) 1982-08-18 1982-08-18 イオン源

Publications (2)

Publication Number Publication Date
JPS5928952U JPS5928952U (ja) 1984-02-23
JPS6348930Y2 true JPS6348930Y2 (enrdf_load_stackoverflow) 1988-12-15

Family

ID=30285221

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12524382U Granted JPS5928952U (ja) 1982-08-18 1982-08-18 イオン源

Country Status (1)

Country Link
JP (1) JPS5928952U (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS5928952U (ja) 1984-02-23

Similar Documents

Publication Publication Date Title
Maul et al. Secondary ion emission from silicon and silicon oxide
US11764026B2 (en) Electron source
JP2511201B2 (ja) 改良型真空計
Gopinath Estimate of minimum measurable voltage in the SEM
GB1339828A (en) Sensitivity control for mass spectrometer
WO1998024536A1 (en) High pressure, electron multiplier for ion detection
CN110146588A (zh) 一种用于分析气体中杂质的电离探测器及其运行方法
JPS6348930Y2 (enrdf_load_stackoverflow)
US3168418A (en) Device for monitoring and controlling evaporation rate in vacuum deposition
US3505554A (en) Ionization pressure gauge
US2543859A (en) System and method for analyzing substance by mass spectrometry
JPS6335399Y2 (enrdf_load_stackoverflow)
US4367427A (en) Glow discharge lamp for qualitative and quantitative spectrum analysis
US2662184A (en) Mass spectrometry
JPS5832200Y2 (ja) イオン源装置
JPH061683B2 (ja) 二次イオン質量分析計
JP2765013B2 (ja) イオン源装置
JP2765014B2 (ja) イオン源装置
JP3241164B2 (ja) 励起分子線源
JPH061260B2 (ja) 質量分析計
JPS58185768A (ja) 蒸発速度制御装置
JPH0652651B2 (ja) 微細加工装置
US3958848A (en) Method of fabricating field desorption ion source
JPH07122229A (ja) 質量分析装置
JPS6052389B2 (ja) 原子ビ−ム検出装置