JPS5928952U - イオン源 - Google Patents

イオン源

Info

Publication number
JPS5928952U
JPS5928952U JP12524382U JP12524382U JPS5928952U JP S5928952 U JPS5928952 U JP S5928952U JP 12524382 U JP12524382 U JP 12524382U JP 12524382 U JP12524382 U JP 12524382U JP S5928952 U JPS5928952 U JP S5928952U
Authority
JP
Japan
Prior art keywords
filament
ionization chamber
ion source
product
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12524382U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6348930Y2 (enrdf_load_stackoverflow
Inventor
哲 関根
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Priority to JP12524382U priority Critical patent/JPS5928952U/ja
Publication of JPS5928952U publication Critical patent/JPS5928952U/ja
Application granted granted Critical
Publication of JPS6348930Y2 publication Critical patent/JPS6348930Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Particle Accelerators (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Electron Tubes For Measurement (AREA)
JP12524382U 1982-08-18 1982-08-18 イオン源 Granted JPS5928952U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12524382U JPS5928952U (ja) 1982-08-18 1982-08-18 イオン源

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12524382U JPS5928952U (ja) 1982-08-18 1982-08-18 イオン源

Publications (2)

Publication Number Publication Date
JPS5928952U true JPS5928952U (ja) 1984-02-23
JPS6348930Y2 JPS6348930Y2 (enrdf_load_stackoverflow) 1988-12-15

Family

ID=30285221

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12524382U Granted JPS5928952U (ja) 1982-08-18 1982-08-18 イオン源

Country Status (1)

Country Link
JP (1) JPS5928952U (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS6348930Y2 (enrdf_load_stackoverflow) 1988-12-15

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