JPS6339962Y2 - - Google Patents
Info
- Publication number
- JPS6339962Y2 JPS6339962Y2 JP11408983U JP11408983U JPS6339962Y2 JP S6339962 Y2 JPS6339962 Y2 JP S6339962Y2 JP 11408983 U JP11408983 U JP 11408983U JP 11408983 U JP11408983 U JP 11408983U JP S6339962 Y2 JPS6339962 Y2 JP S6339962Y2
- Authority
- JP
- Japan
- Prior art keywords
- heater wire
- furnace core
- core tube
- heat treatment
- heater
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010438 heat treatment Methods 0.000 claims description 14
- 239000004065 semiconductor Substances 0.000 description 9
- 235000012431 wafers Nutrition 0.000 description 9
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 2
- 229910010271 silicon carbide Inorganic materials 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000035882 stress Effects 0.000 description 1
- 230000008646 thermal stress Effects 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Landscapes
- Furnace Details (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11408983U JPS6022831U (ja) | 1983-07-21 | 1983-07-21 | 熱処理装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11408983U JPS6022831U (ja) | 1983-07-21 | 1983-07-21 | 熱処理装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6022831U JPS6022831U (ja) | 1985-02-16 |
| JPS6339962Y2 true JPS6339962Y2 (zh) | 1988-10-19 |
Family
ID=30263860
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11408983U Granted JPS6022831U (ja) | 1983-07-21 | 1983-07-21 | 熱処理装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6022831U (zh) |
-
1983
- 1983-07-21 JP JP11408983U patent/JPS6022831U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6022831U (ja) | 1985-02-16 |
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