JPS6339558B2 - - Google Patents

Info

Publication number
JPS6339558B2
JPS6339558B2 JP18321883A JP18321883A JPS6339558B2 JP S6339558 B2 JPS6339558 B2 JP S6339558B2 JP 18321883 A JP18321883 A JP 18321883A JP 18321883 A JP18321883 A JP 18321883A JP S6339558 B2 JPS6339558 B2 JP S6339558B2
Authority
JP
Japan
Prior art keywords
crystal
cylindrical member
crucible
heater
temperature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP18321883A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6077195A (ja
Inventor
Takashi Shimada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP18321883A priority Critical patent/JPS6077195A/ja
Publication of JPS6077195A publication Critical patent/JPS6077195A/ja
Publication of JPS6339558B2 publication Critical patent/JPS6339558B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/14—Heating of the melt or the crystallised materials

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP18321883A 1983-10-03 1983-10-03 ３―５族化合物半導体単結晶の製造装置 Granted JPS6077195A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18321883A JPS6077195A (ja) 1983-10-03 1983-10-03 ３―５族化合物半導体単結晶の製造装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18321883A JPS6077195A (ja) 1983-10-03 1983-10-03 ３―５族化合物半導体単結晶の製造装置

Publications (2)

Publication Number Publication Date
JPS6077195A JPS6077195A (ja) 1985-05-01
JPS6339558B2 true JPS6339558B2 (enExample) 1988-08-05

Family

ID=16131847

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18321883A Granted JPS6077195A (ja) 1983-10-03 1983-10-03 ３―５族化合物半導体単結晶の製造装置

Country Status (1)

Country Link
JP (1) JPS6077195A (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4786479A (en) * 1987-09-02 1988-11-22 The United States Of America As Represented By The United States Department Of Energy Apparatus for dendritic web growth systems
JPH09110582A (ja) * 1995-10-11 1997-04-28 Kokusai Chodendo Sangyo Gijutsu Kenkyu Center 結晶製造装置

Also Published As

Publication number Publication date
JPS6077195A (ja) 1985-05-01

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