JPS6335598U - - Google Patents
Info
- Publication number
- JPS6335598U JPS6335598U JP12947886U JP12947886U JPS6335598U JP S6335598 U JPS6335598 U JP S6335598U JP 12947886 U JP12947886 U JP 12947886U JP 12947886 U JP12947886 U JP 12947886U JP S6335598 U JPS6335598 U JP S6335598U
- Authority
- JP
- Japan
- Prior art keywords
- robot arm
- resistance layers
- type
- diffused resistance
- sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 2
- 238000009792 diffusion process Methods 0.000 claims 1
- 238000001514 detection method Methods 0.000 description 1
- 210000000707 wrist Anatomy 0.000 description 1
Description
第１図は本考案の一実施例の平面図（一部断面
図）、第２図は本考案の実施例の応力検出部平面
図を示す。
１…半導体ゲージ、２…ロボツト指部、３…ロ
ボツト手首部、４…ｎ型拡散抵抗層、５…ｐ型拡
散抵抗層、６…半導体基板、７…電極、８…外部
端子、９…ベース。
FIG. 1 is a plan view (partially sectional view) of an embodiment of the present invention, and FIG. 2 is a plan view of a stress detection section of the embodiment of the present invention. DESCRIPTION OF SYMBOLS 1... Semiconductor gauge, 2... Robot finger part, 3... Robot wrist part, 4... N type diffused resistance layer, 5... P type diffused resistance layer, 6... Semiconductor substrate, 7... Electrode, 8... External terminal, 9... Base .
Claims (1)
において、半導体基板内にｐ型とｎ型の拡散抵抗
層を形成し、前記両拡散抵抗層の組合せからなる
ひずみゲージを一組の拡散ゲージとして持つ半導
体ひずみゲージを力センサとして使用したことを
特徴とするロボツトアーム。 In a robot arm having a built-in force sensor as a force sense, a semiconductor strain sensor having p-type and n-type diffused resistance layers formed in a semiconductor substrate, and having a strain gauge made of a combination of both the above-mentioned diffused resistance layers as a set of diffusion gauges. A robot arm characterized by using a gauge as a force sensor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12947886U JPS6335598U (en) | 1986-08-27 | 1986-08-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12947886U JPS6335598U (en) | 1986-08-27 | 1986-08-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6335598U true JPS6335598U (en) | 1988-03-07 |
Family
ID=31026082
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12947886U Pending JPS6335598U (en) | 1986-08-27 | 1986-08-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6335598U (en) |
-
1986
- 1986-08-27 JP JP12947886U patent/JPS6335598U/ja active Pending