JPS6438546U - - Google Patents
Info
- Publication number
- JPS6438546U JPS6438546U JP13420087U JP13420087U JPS6438546U JP S6438546 U JPS6438546 U JP S6438546U JP 13420087 U JP13420087 U JP 13420087U JP 13420087 U JP13420087 U JP 13420087U JP S6438546 U JPS6438546 U JP S6438546U
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- recess
- semiconductor
- semiconductor substrate
- flexible portion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 8
- 239000000758 substrate Substances 0.000 claims description 4
- 238000001514 detection method Methods 0.000 claims 1
- 238000009792 diffusion process Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
Description
第１図および第２図ａ〜ｇは本考案の一実施例
を示し、第１図は半導体圧力センサの断面図、第
２図ａ〜ｇはその製造工程を順を追つて説明する
図である。第３図は従来の半導体圧力センサの断
面図である。
１１：Ｎ型半導体基板、１２：下部電極用Ｐ型
拡散層、１３：配線用Ｐ型拡散層、１４：酸化膜
、１４ａ〜１４ｃ：コンタクトホール、１５，１
６：配線、１７：ポリシリコン層、２１：上部電
極用Ｐ型拡散層、２２：埋め込みＰ型拡散層、２
４：凹部、２５：撓み部、１０１：センサ本体、
１０２：センサカバー、ＲＲ：基準圧力室。
Figures 1 and 2a to 2g show an embodiment of the present invention, in which Figure 1 is a sectional view of a semiconductor pressure sensor, and Figures 2a to 2g are diagrams explaining the manufacturing process step by step. be. FIG. 3 is a sectional view of a conventional semiconductor pressure sensor. 11: N-type semiconductor substrate, 12: P-type diffusion layer for lower electrode, 13: P-type diffusion layer for wiring, 14: oxide film, 14a to 14c: contact hole, 15, 1
6: Wiring, 17: Polysilicon layer, 21: P-type diffusion layer for upper electrode, 22: Buried P-type diffusion layer, 2
4: recessed part, 25: flexible part, 101: sensor body,
102: Sensor cover, RR: Reference pressure chamber.
Claims (1)
圧力が作用する基準圧力室と、前記撓み部の撓み
量に応じた信号を得る検出手段とを備え、前記基
準圧力と外部圧力との圧力差に応じて前記撓み部
が撓むようにされた半導体圧力センサにおいて、 下部電極を有する第１の半導体基板と、 前記撓み部を形成する凹部およびこの凹部の内
面に設けられた上部電極を有する第２の半導体基
板とを備え、前記上下両電極を対向させて第１お
よび第２の半導体基板を所定の圧力雰囲気中で互
いに接合し前記凹部で前記基準圧力室を構成した
ことを特徴とする半導体圧力センサ。[Claims for Utility Model Registration] A reference pressure chamber set at a predetermined reference pressure and to which external pressure acts via a flexible section, and a detection means for obtaining a signal according to the amount of deflection of the flexible section, A semiconductor pressure sensor in which the flexible portion is bent in response to a pressure difference between pressure and external pressure, comprising: a first semiconductor substrate having a lower electrode; a recess forming the flexible portion; and a recess provided on the inner surface of the recess. a second semiconductor substrate having an upper electrode, the first and second semiconductor substrates are bonded to each other in a predetermined pressure atmosphere with the upper and lower electrodes facing each other, and the recess constitutes the reference pressure chamber. A semiconductor pressure sensor characterized by:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13420087U JPS6438546U (en) | 1987-09-02 | 1987-09-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13420087U JPS6438546U (en) | 1987-09-02 | 1987-09-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6438546U true JPS6438546U (en) | 1989-03-08 |
Family
ID=31392741
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13420087U Pending JPS6438546U (en) | 1987-09-02 | 1987-09-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6438546U (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5654331A (en) * | 1979-09-21 | 1981-05-14 | Bosch Gmbh Robert | Volumetric pressure sensor |
| JPS57137831A (en) * | 1981-02-20 | 1982-08-25 | Nippon Soken Inc | Capacitive pressure detector |
-
1987
- 1987-09-02 JP JP13420087U patent/JPS6438546U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5654331A (en) * | 1979-09-21 | 1981-05-14 | Bosch Gmbh Robert | Volumetric pressure sensor |
| JPS57137831A (en) * | 1981-02-20 | 1982-08-25 | Nippon Soken Inc | Capacitive pressure detector |