JPS6335480Y2 - - Google Patents
Info
- Publication number
- JPS6335480Y2 JPS6335480Y2 JP17023082U JP17023082U JPS6335480Y2 JP S6335480 Y2 JPS6335480 Y2 JP S6335480Y2 JP 17023082 U JP17023082 U JP 17023082U JP 17023082 U JP17023082 U JP 17023082U JP S6335480 Y2 JPS6335480 Y2 JP S6335480Y2
- Authority
- JP
- Japan
- Prior art keywords
- sample
- holder
- temperature
- gas
- refrigerant tank
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000003507 refrigerant Substances 0.000 claims description 11
- 238000001816 cooling Methods 0.000 claims description 6
- 238000001073 sample cooling Methods 0.000 claims description 3
- 239000007789 gas Substances 0.000 description 19
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 10
- 238000010894 electron beam technology Methods 0.000 description 8
- 239000007788 liquid Substances 0.000 description 5
- 238000007711 solidification Methods 0.000 description 5
- 230000008023 solidification Effects 0.000 description 5
- 229910001873 dinitrogen Inorganic materials 0.000 description 4
- 239000001307 helium Substances 0.000 description 4
- 229910052734 helium Inorganic materials 0.000 description 4
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 4
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 2
- 238000007664 blowing Methods 0.000 description 1
- 238000012790 confirmation Methods 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000002003 electron diffraction Methods 0.000 description 1
- 238000001493 electron microscopy Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17023082U JPS5974661U (ja) | 1982-11-10 | 1982-11-10 | 電子顕微鏡等の試料冷却装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17023082U JPS5974661U (ja) | 1982-11-10 | 1982-11-10 | 電子顕微鏡等の試料冷却装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5974661U JPS5974661U (ja) | 1984-05-21 |
| JPS6335480Y2 true JPS6335480Y2 (fr) | 1988-09-20 |
Family
ID=30371674
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17023082U Granted JPS5974661U (ja) | 1982-11-10 | 1982-11-10 | 電子顕微鏡等の試料冷却装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5974661U (fr) |
-
1982
- 1982-11-10 JP JP17023082U patent/JPS5974661U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5974661U (ja) | 1984-05-21 |
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