JPS63319288A - 鍔付石英るつぼ - Google Patents

鍔付石英るつぼ

Info

Publication number
JPS63319288A
JPS63319288A JP62156263A JP15626387A JPS63319288A JP S63319288 A JPS63319288 A JP S63319288A JP 62156263 A JP62156263 A JP 62156263A JP 15626387 A JP15626387 A JP 15626387A JP S63319288 A JPS63319288 A JP S63319288A
Authority
JP
Japan
Prior art keywords
single crystal
quartz crucible
crucible
upper edge
flange
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62156263A
Other languages
English (en)
Japanese (ja)
Other versions
JPH054358B2 (enExample
Inventor
Hirotoshi Yamagishi
浩利 山岸
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin-Etsu Handotai Co Ltd
Original Assignee
Shin-Etsu Handotai Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin-Etsu Handotai Co Ltd filed Critical Shin-Etsu Handotai Co Ltd
Priority to JP62156263A priority Critical patent/JPS63319288A/ja
Publication of JPS63319288A publication Critical patent/JPS63319288A/ja
Publication of JPH054358B2 publication Critical patent/JPH054358B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP62156263A 1987-06-23 1987-06-23 鍔付石英るつぼ Granted JPS63319288A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62156263A JPS63319288A (ja) 1987-06-23 1987-06-23 鍔付石英るつぼ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62156263A JPS63319288A (ja) 1987-06-23 1987-06-23 鍔付石英るつぼ

Publications (2)

Publication Number Publication Date
JPS63319288A true JPS63319288A (ja) 1988-12-27
JPH054358B2 JPH054358B2 (enExample) 1993-01-19

Family

ID=15623981

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62156263A Granted JPS63319288A (ja) 1987-06-23 1987-06-23 鍔付石英るつぼ

Country Status (1)

Country Link
JP (1) JPS63319288A (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0363581U (enExample) * 1989-10-27 1991-06-20
JPH04236153A (ja) * 1991-01-11 1992-08-25 Nippon Densan Corp スピンドルモータ
JPH04106367U (ja) * 1991-02-18 1992-09-14 小松電子金属株式会社 半導体単結晶引上装置の黒鉛ルツボ
JP2011121843A (ja) * 2009-12-14 2011-06-23 Japan Siper Quarts Corp 単結晶引上げ用ルツボ及び単結晶引上げ方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5537460A (en) * 1978-09-07 1980-03-15 Sanyo Electric Co Ltd Structure of crucible
JPS5627244U (enExample) * 1979-08-07 1981-03-13
JPS6228880U (enExample) * 1985-08-02 1987-02-21

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5537460A (en) * 1978-09-07 1980-03-15 Sanyo Electric Co Ltd Structure of crucible
JPS5627244U (enExample) * 1979-08-07 1981-03-13
JPS6228880U (enExample) * 1985-08-02 1987-02-21

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0363581U (enExample) * 1989-10-27 1991-06-20
JPH04236153A (ja) * 1991-01-11 1992-08-25 Nippon Densan Corp スピンドルモータ
JPH04106367U (ja) * 1991-02-18 1992-09-14 小松電子金属株式会社 半導体単結晶引上装置の黒鉛ルツボ
JP2011121843A (ja) * 2009-12-14 2011-06-23 Japan Siper Quarts Corp 単結晶引上げ用ルツボ及び単結晶引上げ方法

Also Published As

Publication number Publication date
JPH054358B2 (enExample) 1993-01-19

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