JPS63315598A - 気相合成ダイヤモンド膜のパタ−ニング方法 - Google Patents

気相合成ダイヤモンド膜のパタ−ニング方法

Info

Publication number
JPS63315598A
JPS63315598A JP14941787A JP14941787A JPS63315598A JP S63315598 A JPS63315598 A JP S63315598A JP 14941787 A JP14941787 A JP 14941787A JP 14941787 A JP14941787 A JP 14941787A JP S63315598 A JPS63315598 A JP S63315598A
Authority
JP
Japan
Prior art keywords
diamond film
mask
substrate
patterning
diamond
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14941787A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0449519B2 (https=
Inventor
Kazuaki Kurihara
和明 栗原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP14941787A priority Critical patent/JPS63315598A/ja
Publication of JPS63315598A publication Critical patent/JPS63315598A/ja
Publication of JPH0449519B2 publication Critical patent/JPH0449519B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP14941787A 1987-06-16 1987-06-16 気相合成ダイヤモンド膜のパタ−ニング方法 Granted JPS63315598A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14941787A JPS63315598A (ja) 1987-06-16 1987-06-16 気相合成ダイヤモンド膜のパタ−ニング方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14941787A JPS63315598A (ja) 1987-06-16 1987-06-16 気相合成ダイヤモンド膜のパタ−ニング方法

Publications (2)

Publication Number Publication Date
JPS63315598A true JPS63315598A (ja) 1988-12-23
JPH0449519B2 JPH0449519B2 (https=) 1992-08-11

Family

ID=15474659

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14941787A Granted JPS63315598A (ja) 1987-06-16 1987-06-16 気相合成ダイヤモンド膜のパタ−ニング方法

Country Status (1)

Country Link
JP (1) JPS63315598A (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02184598A (ja) * 1989-01-10 1990-07-19 Kobe Steel Ltd 気相合成ダイヤモンド選択成膜方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02184598A (ja) * 1989-01-10 1990-07-19 Kobe Steel Ltd 気相合成ダイヤモンド選択成膜方法

Also Published As

Publication number Publication date
JPH0449519B2 (https=) 1992-08-11

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Legal Events

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LAPS Cancellation because of no payment of annual fees