JPS633141U - - Google Patents
Info
- Publication number
- JPS633141U JPS633141U JP9723786U JP9723786U JPS633141U JP S633141 U JPS633141 U JP S633141U JP 9723786 U JP9723786 U JP 9723786U JP 9723786 U JP9723786 U JP 9723786U JP S633141 U JPS633141 U JP S633141U
- Authority
- JP
- Japan
- Prior art keywords
- intake
- wafer
- port
- drying apparatus
- rotor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001035 drying Methods 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 claims 3
- 238000005507 spraying Methods 0.000 claims 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Drying Of Solid Materials (AREA)
- Centrifugal Separators (AREA)
Description
第１図は本考案に係るウエハの乾燥装置を示す
断面図、第２図は従来のウエハの乾燥装置を示す
断面図である。
１……容器、１ａ……吸気口、２……半導体ウ
エハ、３……ロータ、１１……蓋部材、１３……
ノズル。
FIG. 1 is a sectional view showing a wafer drying apparatus according to the present invention, and FIG. 2 is a sectional view showing a conventional wafer drying apparatus. DESCRIPTION OF SYMBOLS 1... Container, 1a... Inlet port, 2... Semiconductor wafer, 3... Rotor, 11... Lid member, 13...
nozzle.
Claims (1)
保持するロータを有する容器に、前記吸・排気口
のうち吸気口を開閉する蓋部材を設けると共に、
前記ウエハに温水を噴射するノズルを内蔵したこ
とを特徴とするウエハの乾燥装置。 A container having an intake/exhaust port that opens to the inside and outside and a rotor for storing and holding wafers is provided with a lid member for opening and closing the intake port among the intake/exhaust ports, and
A wafer drying apparatus characterized by having a built-in nozzle for spraying hot water onto the wafer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9723786U JPS633141U (en) | 1986-06-25 | 1986-06-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9723786U JPS633141U (en) | 1986-06-25 | 1986-06-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS633141U true JPS633141U (en) | 1988-01-11 |
Family
ID=30963991
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9723786U Pending JPS633141U (en) | 1986-06-25 | 1986-06-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS633141U (en) |
-
1986
- 1986-06-25 JP JP9723786U patent/JPS633141U/ja active Pending