JPH0377439U - - Google Patents
Info
- Publication number
- JPH0377439U JPH0377439U JP13926089U JP13926089U JPH0377439U JP H0377439 U JPH0377439 U JP H0377439U JP 13926089 U JP13926089 U JP 13926089U JP 13926089 U JP13926089 U JP 13926089U JP H0377439 U JPH0377439 U JP H0377439U
- Authority
- JP
- Japan
- Prior art keywords
- drying chamber
- rotating body
- drying
- centrifugal
- container body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001035 drying Methods 0.000 claims description 10
- 230000000903 blocking effect Effects 0.000 claims description 2
- 238000009423 ventilation Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Drying Of Solid Materials (AREA)
Description
第１図は本考案の実施例を示す部分断面図であ
る。第２図は従来の遠心乾燥装置を示す部分断面
図、第３図は回転体の部分断面平面図である。
１……板状ワーク（半導体ウエーハ）、２……
キヤリア、３……回転体、４……開口部、１０…
…器体、１１……乾燥室、１１ａ……内壁面、１
３……排気孔、１８……通気口、２１……隙間、
３１……気流阻止板。
FIG. 1 is a partial sectional view showing an embodiment of the present invention. FIG. 2 is a partial cross-sectional view of a conventional centrifugal drying device, and FIG. 3 is a partial cross-sectional plan view of a rotating body. 1...Plate-like workpiece (semiconductor wafer), 2...
Carrier, 3... Rotating body, 4... Opening, 10...
...Vessel body, 11...Drying room, 11a...Inner wall surface, 1
3...Exhaust hole, 18...Vent hole, 21...Gap,
31...Airflow blocking plate.
Claims (1)
乾燥室に連通する通気口と、側壁の一部に乾燥室
に開口する排気孔を設けた器体と、器体の乾燥室
内に回転自在に水平姿勢で支持され、円周等配位
置に板状ワークを定ピツチで多段に収納するキヤ
リアを配設し、上面開口した回転体とを具備する
遠心乾燥装置において、 上記乾燥室内の上部に回転体と同芯状に配設し
た環状の気流阻止板を、器体もしくは回転体のい
ずれか一方に取付けて、乾燥室の内壁面と回転体
の上端部との間に形成された隙間を略閉塞したこ
とを特徴とする遠心乾燥装置。[Scope of Claim for Utility Model Registration] A container body having a drying chamber formed inside, a ventilation hole communicating with the drying chamber in the center of the top surface, and an exhaust hole opening into the drying chamber in a part of the side wall; In a centrifugal drying device, a rotary body is rotatably supported in a horizontal position in a drying chamber, and is equipped with a carrier for storing plate-like workpieces in multiple stages at regular intervals on the circumference, and a rotating body with an open top. , An annular airflow blocking plate placed concentrically with the rotating body at the top of the drying chamber is attached to either the container body or the rotating body, and the inner wall of the drying chamber is connected to the upper end of the rotating body. A centrifugal drying device characterized in that a gap formed between the two is substantially closed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13926089U JPH0377439U (en) | 1989-11-29 | 1989-11-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13926089U JPH0377439U (en) | 1989-11-29 | 1989-11-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0377439U true JPH0377439U (en) | 1991-08-05 |
Family
ID=31686318
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13926089U Pending JPH0377439U (en) | 1989-11-29 | 1989-11-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0377439U (en) |
-
1989
- 1989-11-29 JP JP13926089U patent/JPH0377439U/ja active Pending