JPS6384868U - - Google Patents
Info
- Publication number
- JPS6384868U JPS6384868U JP18067086U JP18067086U JPS6384868U JP S6384868 U JPS6384868 U JP S6384868U JP 18067086 U JP18067086 U JP 18067086U JP 18067086 U JP18067086 U JP 18067086U JP S6384868 U JPS6384868 U JP S6384868U
- Authority
- JP
- Japan
- Prior art keywords
- material support
- exchange
- vacuum chamber
- support surface
- backward
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
Description
第１図はこの考案の一実施例を示す正断面図、
第２図は第１図の一部の平面図、第３図は動作位
置を異にする部分正面図、第４図は従来例の正断
面図である。
１……真空室、３……材料支持台、５……材料
、６……交換室、８……蓋、１０……搬送装置。
FIG. 1 is a front sectional view showing an embodiment of this invention.
2 is a plan view of a portion of FIG. 1, FIG. 3 is a partial front view showing a different operating position, and FIG. 4 is a front sectional view of the conventional example. 1... Vacuum chamber, 3... Material support stand, 5... Material, 6... Exchange chamber, 8... Lid, 10... Transfer device.
Claims (1)
るとともに、材料交換位置まで回動された前記材
料支持台の材料支持面に対向する、前記真空室の
壁面に開口部を形成し、前記開口部に気密に進退
自在であつて、材料出し入れ用の蓋を備えた交換
室を設けるとともに、材料交換位置にある前記材
料支持台の前記材料支持面に下面が気密に接する
進入位置と、前記材料支持面から離れた退出位置
まで前記交換室を進退させる搬送装置を設けてな
る真空室の材料交換装置。 A material support is rotatably installed inside the vacuum chamber, and an opening is formed in the wall of the vacuum chamber opposite to the material support surface of the material support that has been rotated to the material exchange position. An exchange chamber is provided in the opening that can move forward and backward in an airtight manner and is equipped with a lid for loading and unloading materials, and an entry position where the lower surface is in airtight contact with the material support surface of the material support stand in the material exchange position; A material exchange device for a vacuum chamber, comprising a transfer device that moves the exchange chamber forward and backward to an exit position away from a material support surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18067086U JPS6384868U (en) | 1986-11-25 | 1986-11-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18067086U JPS6384868U (en) | 1986-11-25 | 1986-11-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6384868U true JPS6384868U (en) | 1988-06-03 |
Family
ID=31124837
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18067086U Pending JPS6384868U (en) | 1986-11-25 | 1986-11-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6384868U (en) |
-
1986
- 1986-11-25 JP JP18067086U patent/JPS6384868U/ja active Pending