JPS6232530U - - Google Patents
Info
- Publication number
- JPS6232530U JPS6232530U JP12328685U JP12328685U JPS6232530U JP S6232530 U JPS6232530 U JP S6232530U JP 12328685 U JP12328685 U JP 12328685U JP 12328685 U JP12328685 U JP 12328685U JP S6232530 U JPS6232530 U JP S6232530U
- Authority
- JP
- Japan
- Prior art keywords
- rotary table
- air intake
- outer cylinder
- drying chamber
- closing means
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001035 drying Methods 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 claims 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
Description
第１図は本考案実施例による遠心乾燥機の概略
構成を示す一部切欠側面図、第２図は閉塞手段の
変形例を示す要部断面図である。
１……外筒、２……乾燥室、３……回転テーブ
ル、４……駆動機構、８……外筒の開口、９……
蓋体、１３……空気取入口、１４……閉塞板、１
５……ばね。
FIG. 1 is a partially cutaway side view showing a schematic configuration of a centrifugal dryer according to an embodiment of the present invention, and FIG. 2 is a sectional view of a main part showing a modification of the closing means. DESCRIPTION OF SYMBOLS 1... Outer cylinder, 2... Drying chamber, 3... Turning table, 4... Drive mechanism, 8... Opening of outer cylinder, 9...
Lid body, 13... Air intake port, 14... Closure plate, 1
5... Spring.
Claims (1)
遠心乾燥させるものにおいて、 乾燥室の外筒に設けた空気取入口に、回転テー
ブルの回転中は空気取入口を開け放し、回転テー
ブルの停止中は空気取入口を閉じるように動作す
る閉塞手段を設けたことを特徴とする半導体製造
用遠心乾燥機。[Scope of Claim for Utility Model Registration] In a device that centrifugally dries cleaned wafers by holding them on a rotary table, an air intake provided in the outer cylinder of the drying chamber is kept open while the rotary table is rotating; A centrifugal dryer for semiconductor manufacturing, characterized in that a closing means is provided that operates to close an air intake port while a rotary table is stopped.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985123286U JPH0513008Y2 (en) | 1985-08-09 | 1985-08-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985123286U JPH0513008Y2 (en) | 1985-08-09 | 1985-08-09 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6232530U true JPS6232530U (en) | 1987-02-26 |
| JPH0513008Y2 JPH0513008Y2 (en) | 1993-04-06 |
Family
ID=31014249
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985123286U Expired - Lifetime JPH0513008Y2 (en) | 1985-08-09 | 1985-08-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0513008Y2 (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS548455A (en) * | 1977-06-22 | 1979-01-22 | Hitachi Ltd | Cleansing/drying device for products |
| JPS5936930A (en) * | 1982-08-25 | 1984-02-29 | Toshiba Corp | Wafer drying apparatus |
-
1985
- 1985-08-09 JP JP1985123286U patent/JPH0513008Y2/ja not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS548455A (en) * | 1977-06-22 | 1979-01-22 | Hitachi Ltd | Cleansing/drying device for products |
| JPS5936930A (en) * | 1982-08-25 | 1984-02-29 | Toshiba Corp | Wafer drying apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0513008Y2 (en) | 1993-04-06 |