JPH02122430U - - Google Patents
Info
- Publication number
- JPH02122430U JPH02122430U JP3152689U JP3152689U JPH02122430U JP H02122430 U JPH02122430 U JP H02122430U JP 3152689 U JP3152689 U JP 3152689U JP 3152689 U JP3152689 U JP 3152689U JP H02122430 U JPH02122430 U JP H02122430U
- Authority
- JP
- Japan
- Prior art keywords
- drying chamber
- plate
- multiple stages
- splash prevention
- hollow vessel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001035 drying Methods 0.000 claims description 9
- 239000007788 liquid Substances 0.000 claims description 3
- 230000002265 prevention Effects 0.000 claims description 3
- 239000000969 carrier Substances 0.000 claims 1
- 230000002093 peripheral effect Effects 0.000 claims 1
- 238000009423 ventilation Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Drying Of Solid Materials (AREA)
Description
第１図は本考案装置の実施例を示す部分断面図
、第２図はその要部拡大断面図、第３図は本考案
の他の実施例を示す要部拡大断面図である。第４
図は従来装置を示す縦断面図、第５図は第４図の
Ａ−Ａ線断面図、第６図は従来装置の問題点を説
明するための要部縦断面図、第７図はその要部平
断面図である。
１……板状ワーク（半導体ウエーハ）、２……
キヤリア、３……回転体、６……中空器体、７…
…乾燥室、１０……通気口、１１……排気ダクト
、２１，２２……液撥ね返り防止板、２１ａ，２
３ａ……内端面。
FIG. 1 is a partial sectional view showing an embodiment of the apparatus of the present invention, FIG. 2 is an enlarged sectional view of the main part thereof, and FIG. 3 is an enlarged sectional view of the main part showing another embodiment of the invention. Fourth
The figure is a longitudinal sectional view showing a conventional device, FIG. 5 is a sectional view taken along the line A-A in FIG. It is a plane sectional view of the main part. 1...Plate-like workpiece (semiconductor wafer), 2...
Carrier, 3...Rotating body, 6...Hollow vessel body, 7...
...Drying room, 10...Vent, 11...Exhaust duct, 21, 22...Liquid splash prevention plate, 21a, 2
3a...Inner end surface.
Claims (1)
乾燥室に連通する通気口を設け、かつ、側壁の１
部に乾燥室に開口する排気ダクトを設けた中空器
体と、中空器体の乾燥室内に軸回り方向に回転自
在に水平姿勢で支持され、かつ、円周等配位置に
、板状ワークを定ピツチで多段に収納したキヤリ
アを配設した回転体とを具備する遠心乾燥装置に
おいて、 複数枚の液撥ね返り防止板を、上記乾燥室の内
周面にそつて多段に、かつ、回転体と同芯状に配
設し、各液撥ね返り防止板の内端面を、回転板上
のキヤリアに多段に収納された板状ワーク間に保
持したことを特徴とする遠心乾燥装置。[Claims for Utility Model Registration] A drying chamber is formed inside, a ventilation hole communicating with the drying chamber is provided in the center of the upper surface, and one of the side walls
A hollow vessel body is provided with an exhaust duct that opens into a drying chamber in the drying chamber, and the plate-like workpieces are supported in a horizontal position so as to be freely rotatable around an axis in the drying chamber of the hollow vessel body, and at equal positions on the circumference. In a centrifugal drying device comprising a rotary body with carriers arranged in multiple stages at a fixed pitch, a plurality of liquid splash prevention plates are arranged in multiple stages along the inner peripheral surface of the drying chamber, and the rotary body A centrifugal drying device characterized in that the inner end surfaces of each liquid splash prevention plate are held between plate-shaped works stored in multiple stages in a carrier on a rotating plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3152689U JPH02122430U (en) | 1989-03-20 | 1989-03-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3152689U JPH02122430U (en) | 1989-03-20 | 1989-03-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02122430U true JPH02122430U (en) | 1990-10-08 |
Family
ID=31257440
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3152689U Pending JPH02122430U (en) | 1989-03-20 | 1989-03-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02122430U (en) |
-
1989
- 1989-03-20 JP JP3152689U patent/JPH02122430U/ja active Pending