JPS6329936U - - Google Patents
Info
- Publication number
- JPS6329936U JPS6329936U JP12428486U JP12428486U JPS6329936U JP S6329936 U JPS6329936 U JP S6329936U JP 12428486 U JP12428486 U JP 12428486U JP 12428486 U JP12428486 U JP 12428486U JP S6329936 U JPS6329936 U JP S6329936U
- Authority
- JP
- Japan
- Prior art keywords
- flange
- centrifugal dryer
- plate
- dried
- centrifugal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000002093 peripheral effect Effects 0.000 claims description 2
- 230000002265 prevention Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Drying Of Solid Materials (AREA)
Description
第１図は本考案の一実施例としての遠心乾燥機
の要部の断面図、第２図は本考案の他の実施例と
しての要部の断面図、第３図はキヤリアに半導体
ウエハースを収容した状態の斜視図、第４図は本
考案並びに従来例を説明するための概略構成図、
第５図は第４図において蓋を除いた状態の平面図
である。
１……回転板、２……周縁部下面、３……フラ
ンジ基部、４……フランジ頭部、５……フランジ
、６，７……ガイドローラ、１９……半導体ウエ
ハース。
Fig. 1 is a sectional view of the main parts of a centrifugal dryer as an embodiment of the present invention, Fig. 2 is a sectional view of the main parts of a centrifugal dryer as another embodiment of the invention, and Fig. 3 is a sectional view of the main parts of a centrifugal dryer as an embodiment of the present invention. A perspective view of the accommodated state; FIG. 4 is a schematic configuration diagram for explaining the present invention and a conventional example;
FIG. 5 is a plan view of FIG. 4 with the lid removed. DESCRIPTION OF SYMBOLS 1... Rotating plate, 2... Peripheral lower surface, 3... Flange base, 4... Flange head, 5... Flange, 6, 7... Guide roller, 19... Semiconductor wafer.
Claims (1)
回転によつて発生する遠心力で付着した水分を振
切つて乾燥させる遠心乾燥機において、回転板の
外周側に、軸線方向又は径方向の少なくともいず
れかの方向に対して揺れ止め構造が備えられてい
ることを特徴とする遠心乾燥機。 (2) 前記揺れ止め構造が、回転板の外周部下端
に断面Ｌ字状のフランジを設け、該フランジを挾
持状態とする一対のガイドローラを、フランジが
曲折して分割された各面にそれぞれ取付けて回転
支持されてなることを特徴とする実用新案登録請
求の範囲第１項記載の遠心乾燥機。[Claims for Utility Model Registration] (1) In a centrifugal dryer in which the material to be dried is placed on a rotating plate and dried by shaking off the attached moisture using the centrifugal force generated by the rotation of the rotating plate, A centrifugal dryer characterized in that the outer peripheral side of the plate is provided with a rocking prevention structure in at least one of the axial direction and the radial direction. (2) The anti-sway structure is provided with a flange having an L-shaped cross section at the lower end of the outer periphery of the rotary plate, and a pair of guide rollers that clamp the flange are placed on each of the divided faces of the flange. The centrifugal dryer according to claim 1, which is mounted and rotatably supported.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986124284U JPH069496Y2 (en) | 1986-08-13 | 1986-08-13 | Centrifugal dryer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986124284U JPH069496Y2 (en) | 1986-08-13 | 1986-08-13 | Centrifugal dryer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6329936U true JPS6329936U (en) | 1988-02-27 |
| JPH069496Y2 JPH069496Y2 (en) | 1994-03-09 |
Family
ID=31016156
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986124284U Expired - Lifetime JPH069496Y2 (en) | 1986-08-13 | 1986-08-13 | Centrifugal dryer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH069496Y2 (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6043835A (en) * | 1983-08-20 | 1985-03-08 | Mitsubishi Electric Corp | Centrifugal dehydrating and drying device |
| JPS6167691U (en) * | 1984-10-05 | 1986-05-09 |
-
1986
- 1986-08-13 JP JP1986124284U patent/JPH069496Y2/en not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6043835A (en) * | 1983-08-20 | 1985-03-08 | Mitsubishi Electric Corp | Centrifugal dehydrating and drying device |
| JPS6167691U (en) * | 1984-10-05 | 1986-05-09 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH069496Y2 (en) | 1994-03-09 |