JPS6186927U - - Google Patents
Info
- Publication number
- JPS6186927U JPS6186927U JP17034084U JP17034084U JPS6186927U JP S6186927 U JPS6186927 U JP S6186927U JP 17034084 U JP17034084 U JP 17034084U JP 17034084 U JP17034084 U JP 17034084U JP S6186927 U JPS6186927 U JP S6186927U
- Authority
- JP
- Japan
- Prior art keywords
- hood
- resist
- hole
- resist coating
- vacuum chuck
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011248 coating agent Substances 0.000 claims description 5
- 238000000576 coating method Methods 0.000 claims description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
Description
第１図はこの考案の一実施例を示すレジスト塗
布装置の断面図、第２図は他の実施例の断面図、
第３図および第４図は従来のものの断面図である
。
１…シリコンウエーハ、２…バキユームチヤツ
ク、３…フード、３ａ…開口部、４…排気ダクト
、９…余剰レジスト溜、１０…容器、１１…排気
通路、１３…仕切板、１４…通孔、３３…外側フ
ード。
FIG. 1 is a sectional view of a resist coating device showing one embodiment of this invention, and FIG. 2 is a sectional view of another embodiment.
FIGS. 3 and 4 are cross-sectional views of conventional devices. DESCRIPTION OF SYMBOLS 1... Silicon wafer, 2... Vacuum chuck, 3... Hood, 3a... Opening, 4... Exhaust duct, 9... Excess resist reservoir, 10... Container, 11... Exhaust passage, 13... Partition plate, 14... Through hole , 33...outer hood.
Claims (1)
持するバキユームチヤツクと、このバキユームチ
ヤツクに吸着されるレジスト被覆体を包囲するよ
うに設置され上部に上記被覆体の着脱可能な大き
さの広口開口部を設け下部に余剰レジスト溜に連
なる通孔を設けさらに底部に排気ポンプと連なる
排気ダクトを設けたフードと、このフード内で上
記通孔の下方に配設した容器とを備え、容器には
余剰レジスト溜を有し、容器外周壁とフード間に
上記排気ダクトに通じる排気通路を設けたことを
特徴とするレジスト塗布装置。 A vacuum chuck connected to the motor and holding the resist coating by suction, and a wide opening located above the vacuum chuck to surround the resist coating to which the coating can be attached and removed. A hood is provided with an opening, a through hole at the bottom that connects to the excess resist reservoir, and an exhaust duct connected to an exhaust pump at the bottom, and a container disposed below the through hole in the hood. 1. A resist coating device, comprising a surplus resist reservoir, and an exhaust passage leading to the exhaust duct between the outer circumferential wall of the container and the hood.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17034084U JPS6186927U (en) | 1984-11-12 | 1984-11-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17034084U JPS6186927U (en) | 1984-11-12 | 1984-11-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6186927U true JPS6186927U (en) | 1986-06-07 |
Family
ID=30728045
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17034084U Pending JPS6186927U (en) | 1984-11-12 | 1984-11-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6186927U (en) |
-
1984
- 1984-11-12 JP JP17034084U patent/JPS6186927U/ja active Pending
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