JPS6331100B2 - - Google Patents

Info

Publication number
JPS6331100B2
JPS6331100B2 JP56150967A JP15096781A JPS6331100B2 JP S6331100 B2 JPS6331100 B2 JP S6331100B2 JP 56150967 A JP56150967 A JP 56150967A JP 15096781 A JP15096781 A JP 15096781A JP S6331100 B2 JPS6331100 B2 JP S6331100B2
Authority
JP
Japan
Prior art keywords
insulating film
conductive path
polycrystalline silicon
gate insulating
semiconductor substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56150967A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5852851A (ja
Inventor
Hideto Goto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP15096781A priority Critical patent/JPS5852851A/ja
Publication of JPS5852851A publication Critical patent/JPS5852851A/ja
Publication of JPS6331100B2 publication Critical patent/JPS6331100B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP15096781A 1981-09-24 1981-09-24 半導体装置の製造方法 Granted JPS5852851A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15096781A JPS5852851A (ja) 1981-09-24 1981-09-24 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15096781A JPS5852851A (ja) 1981-09-24 1981-09-24 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS5852851A JPS5852851A (ja) 1983-03-29
JPS6331100B2 true JPS6331100B2 (enExample) 1988-06-22

Family

ID=15508345

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15096781A Granted JPS5852851A (ja) 1981-09-24 1981-09-24 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS5852851A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63201863U (enExample) * 1987-06-18 1988-12-26

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54154967A (en) * 1978-05-29 1979-12-06 Nippon Telegr & Teleph Corp <Ntt> Semiconductor electronic device

Also Published As

Publication number Publication date
JPS5852851A (ja) 1983-03-29

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