JPS63201863U - - Google Patents
Info
- Publication number
- JPS63201863U JPS63201863U JP1987093953U JP9395387U JPS63201863U JP S63201863 U JPS63201863 U JP S63201863U JP 1987093953 U JP1987093953 U JP 1987093953U JP 9395387 U JP9395387 U JP 9395387U JP S63201863 U JPS63201863 U JP S63201863U
- Authority
- JP
- Japan
- Prior art keywords
- gas
- mist
- perforated plate
- ejected
- porous layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000003595 mist Substances 0.000 claims description 6
- 238000000926 separation method Methods 0.000 claims description 4
- 239000011148 porous material Substances 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
Landscapes
- Air Bags (AREA)
- Industrial Gases (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987093953U JPS63201863U (enExample) | 1987-06-18 | 1987-06-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987093953U JPS63201863U (enExample) | 1987-06-18 | 1987-06-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63201863U true JPS63201863U (enExample) | 1988-12-26 |
Family
ID=30956972
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987093953U Pending JPS63201863U (enExample) | 1987-06-18 | 1987-06-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63201863U (enExample) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5852851A (ja) * | 1981-09-24 | 1983-03-29 | Nec Corp | 半導体装置の製造方法 |
-
1987
- 1987-06-18 JP JP1987093953U patent/JPS63201863U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5852851A (ja) * | 1981-09-24 | 1983-03-29 | Nec Corp | 半導体装置の製造方法 |
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