JPS63307168A - 窒化アルミニウム質焼結体 - Google Patents
窒化アルミニウム質焼結体Info
- Publication number
- JPS63307168A JPS63307168A JP62139892A JP13989287A JPS63307168A JP S63307168 A JPS63307168 A JP S63307168A JP 62139892 A JP62139892 A JP 62139892A JP 13989287 A JP13989287 A JP 13989287A JP S63307168 A JPS63307168 A JP S63307168A
- Authority
- JP
- Japan
- Prior art keywords
- aluminum nitride
- component
- sintered body
- particles
- periodic table
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 title claims description 22
- 239000002245 particle Substances 0.000 claims abstract description 20
- 239000011159 matrix material Substances 0.000 claims abstract description 7
- 230000000737 periodic effect Effects 0.000 claims abstract description 7
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 3
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 3
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 2
- MTPVUVINMAGMJL-UHFFFAOYSA-N trimethyl(1,1,2,2,2-pentafluoroethyl)silane Chemical compound C[Si](C)(C)C(F)(F)C(F)(F)F MTPVUVINMAGMJL-UHFFFAOYSA-N 0.000 claims 1
- 238000005245 sintering Methods 0.000 abstract description 15
- 239000000463 material Substances 0.000 abstract description 8
- 239000000203 mixture Substances 0.000 abstract description 4
- 239000012299 nitrogen atmosphere Substances 0.000 abstract description 4
- 150000004767 nitrides Chemical class 0.000 abstract description 2
- 239000000843 powder Substances 0.000 description 15
- 239000000126 substance Substances 0.000 description 6
- 238000000034 method Methods 0.000 description 5
- 238000005452 bending Methods 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- QVQLCTNNEUAWMS-UHFFFAOYSA-N barium oxide Chemical compound [Ba]=O QVQLCTNNEUAWMS-UHFFFAOYSA-N 0.000 description 2
- 238000000280 densification Methods 0.000 description 2
- 229910003460 diamond Inorganic materials 0.000 description 2
- 239000010432 diamond Substances 0.000 description 2
- 238000007731 hot pressing Methods 0.000 description 2
- 239000007791 liquid phase Substances 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- VMSLCPKYRPDHLN-UHFFFAOYSA-N (R)-Humulone Chemical compound CC(C)CC(=O)C1=C(O)C(CC=C(C)C)=C(O)C(O)(CC=C(C)C)C1=O VMSLCPKYRPDHLN-UHFFFAOYSA-N 0.000 description 1
- ODINCKMPIJJUCX-UHFFFAOYSA-N Calcium oxide Chemical compound [Ca]=O ODINCKMPIJJUCX-UHFFFAOYSA-N 0.000 description 1
- -1 La O Inorganic materials 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000013329 compounding Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000001513 hot isostatic pressing Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- UFQXGXDIJMBKTC-UHFFFAOYSA-N oxostrontium Chemical compound [Sr]=O UFQXGXDIJMBKTC-UHFFFAOYSA-N 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Landscapes
- Ceramic Products (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62139892A JPS63307168A (ja) | 1987-06-05 | 1987-06-05 | 窒化アルミニウム質焼結体 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62139892A JPS63307168A (ja) | 1987-06-05 | 1987-06-05 | 窒化アルミニウム質焼結体 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63307168A true JPS63307168A (ja) | 1988-12-14 |
| JPH0566903B2 JPH0566903B2 (enrdf_load_stackoverflow) | 1993-09-22 |
Family
ID=15256035
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62139892A Granted JPS63307168A (ja) | 1987-06-05 | 1987-06-05 | 窒化アルミニウム質焼結体 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63307168A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11310462A (ja) * | 1998-04-28 | 1999-11-09 | Kyocera Corp | 窒化アルミニウム質焼結体及びその製造方法 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50110406A (enrdf_load_stackoverflow) * | 1974-02-13 | 1975-08-30 | ||
| JPS6278160A (ja) * | 1985-09-30 | 1987-04-10 | 日本特殊陶業株式会社 | 複合強化焼結体 |
-
1987
- 1987-06-05 JP JP62139892A patent/JPS63307168A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50110406A (enrdf_load_stackoverflow) * | 1974-02-13 | 1975-08-30 | ||
| JPS6278160A (ja) * | 1985-09-30 | 1987-04-10 | 日本特殊陶業株式会社 | 複合強化焼結体 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11310462A (ja) * | 1998-04-28 | 1999-11-09 | Kyocera Corp | 窒化アルミニウム質焼結体及びその製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0566903B2 (enrdf_load_stackoverflow) | 1993-09-22 |
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