JPS6329437B2 - - Google Patents
Info
- Publication number
- JPS6329437B2 JPS6329437B2 JP58197692A JP19769283A JPS6329437B2 JP S6329437 B2 JPS6329437 B2 JP S6329437B2 JP 58197692 A JP58197692 A JP 58197692A JP 19769283 A JP19769283 A JP 19769283A JP S6329437 B2 JPS6329437 B2 JP S6329437B2
- Authority
- JP
- Japan
- Prior art keywords
- pad
- bonding
- electrode
- substrate
- deposited
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000463 material Substances 0.000 claims description 8
- 229910052751 metal Inorganic materials 0.000 claims description 8
- 239000002184 metal Substances 0.000 claims description 8
- 229910000846 In alloy Inorganic materials 0.000 claims description 4
- 229910052733 gallium Inorganic materials 0.000 claims description 2
- 239000000758 substrate Substances 0.000 description 12
- 238000000034 method Methods 0.000 description 8
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 6
- 238000007740 vapor deposition Methods 0.000 description 5
- 239000007788 liquid Substances 0.000 description 4
- 230000001681 protective effect Effects 0.000 description 4
- 238000004544 sputter deposition Methods 0.000 description 4
- 239000004593 Epoxy Substances 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 229910052738 indium Inorganic materials 0.000 description 2
- 239000002923 metal particle Substances 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 230000005641 tunneling Effects 0.000 description 2
- 229910000978 Pb alloy Inorganic materials 0.000 description 1
- 229910020174 Pb-In Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 229910052745 lead Inorganic materials 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- 231100000252 nontoxic Toxicity 0.000 description 1
- 230000003000 nontoxic effect Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 238000005382 thermal cycling Methods 0.000 description 1
- 231100000167 toxic agent Toxicity 0.000 description 1
- 239000003440 toxic substance Substances 0.000 description 1
Landscapes
- Superconductor Devices And Manufacturing Methods Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58197692A JPS5994480A (ja) | 1983-10-24 | 1983-10-24 | 超電導デバイス |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58197692A JPS5994480A (ja) | 1983-10-24 | 1983-10-24 | 超電導デバイス |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5994480A JPS5994480A (ja) | 1984-05-31 |
| JPS6329437B2 true JPS6329437B2 (enrdf_load_stackoverflow) | 1988-06-14 |
Family
ID=16378761
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58197692A Granted JPS5994480A (ja) | 1983-10-24 | 1983-10-24 | 超電導デバイス |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5994480A (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2936329B2 (ja) * | 1987-05-28 | 1999-08-23 | 京セラ株式会社 | 導電物質を付設した酸化物系超伝導体 |
| US11309479B2 (en) * | 2019-12-06 | 2022-04-19 | International Business Machines Corporation | Computing devices containing magnetic Josephson Junctions with embedded magnetic field control element |
-
1983
- 1983-10-24 JP JP58197692A patent/JPS5994480A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5994480A (ja) | 1984-05-31 |
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