JPS6328657B2 - - Google Patents
Info
- Publication number
- JPS6328657B2 JPS6328657B2 JP21810582A JP21810582A JPS6328657B2 JP S6328657 B2 JPS6328657 B2 JP S6328657B2 JP 21810582 A JP21810582 A JP 21810582A JP 21810582 A JP21810582 A JP 21810582A JP S6328657 B2 JPS6328657 B2 JP S6328657B2
- Authority
- JP
- Japan
- Prior art keywords
- raw material
- plasma torch
- material gas
- quartz glass
- supply device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000002994 raw material Substances 0.000 claims description 43
- 230000006698 induction Effects 0.000 claims description 16
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 15
- 238000010438 heat treatment Methods 0.000 claims description 15
- 239000000725 suspension Substances 0.000 claims description 5
- 229910052799 carbon Inorganic materials 0.000 claims description 2
- 229910052751 metal Inorganic materials 0.000 claims description 2
- 239000002184 metal Substances 0.000 claims description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims 1
- 239000007789 gas Substances 0.000 description 38
- 229910003902 SiCl 4 Inorganic materials 0.000 description 10
- 239000000463 material Substances 0.000 description 9
- 238000007664 blowing Methods 0.000 description 7
- 239000012159 carrier gas Substances 0.000 description 7
- 239000011521 glass Substances 0.000 description 7
- 229910004298 SiO 2 Inorganic materials 0.000 description 5
- 238000009826 distribution Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 4
- 150000002500 ions Chemical class 0.000 description 3
- 230000008018 melting Effects 0.000 description 3
- 238000002844 melting Methods 0.000 description 3
- 238000007711 solidification Methods 0.000 description 3
- 230000008023 solidification Effects 0.000 description 3
- 239000007858 starting material Substances 0.000 description 3
- 230000008016 vaporization Effects 0.000 description 3
- 238000009834 vaporization Methods 0.000 description 3
- 229910017493 Nd 2 O 3 Inorganic materials 0.000 description 2
- 229910003910 SiCl4 Inorganic materials 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 239000007795 chemical reaction product Substances 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 229920006395 saturated elastomer Polymers 0.000 description 2
- FDNAPBUWERUEDA-UHFFFAOYSA-N silicon tetrachloride Chemical compound Cl[Si](Cl)(Cl)Cl FDNAPBUWERUEDA-UHFFFAOYSA-N 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910017544 NdCl3 Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 229910052681 coesite Inorganic materials 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000010574 gas phase reaction Methods 0.000 description 1
- 238000002309 gasification Methods 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 229910021645 metal ion Inorganic materials 0.000 description 1
- ATINCSYRHURBSP-UHFFFAOYSA-K neodymium(iii) chloride Chemical compound Cl[Nd](Cl)Cl ATINCSYRHURBSP-UHFFFAOYSA-K 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 229910052761 rare earth metal Inorganic materials 0.000 description 1
- 150000002910 rare earth metals Chemical class 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 229910052682 stishovite Inorganic materials 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- 230000002194 synthesizing effect Effects 0.000 description 1
- 230000003685 thermal hair damage Effects 0.000 description 1
- 229910001428 transition metal ion Inorganic materials 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
Landscapes
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21810582A JPS59109237A (ja) | 1982-12-13 | 1982-12-13 | プラズマト−チｃｖｄ用誘導加熱型原料ガス供給器 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21810582A JPS59109237A (ja) | 1982-12-13 | 1982-12-13 | プラズマト−チｃｖｄ用誘導加熱型原料ガス供給器 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59109237A JPS59109237A (ja) | 1984-06-23 |
| JPS6328657B2 true JPS6328657B2 (enrdf_load_stackoverflow) | 1988-06-09 |
Family
ID=16714707
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP21810582A Granted JPS59109237A (ja) | 1982-12-13 | 1982-12-13 | プラズマト−チｃｖｄ用誘導加熱型原料ガス供給器 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59109237A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH076164U (ja) * | 1993-06-30 | 1995-01-27 | 金沢樹脂工業株式会社 | 小箱体付容体 |
-
1982
- 1982-12-13 JP JP21810582A patent/JPS59109237A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH076164U (ja) * | 1993-06-30 | 1995-01-27 | 金沢樹脂工業株式会社 | 小箱体付容体 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59109237A (ja) | 1984-06-23 |
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