JPH0372585B2 - - Google Patents

Info

Publication number
JPH0372585B2
JPH0372585B2 JP58032838A JP3283883A JPH0372585B2 JP H0372585 B2 JPH0372585 B2 JP H0372585B2 JP 58032838 A JP58032838 A JP 58032838A JP 3283883 A JP3283883 A JP 3283883A JP H0372585 B2 JPH0372585 B2 JP H0372585B2
Authority
JP
Japan
Prior art keywords
quartz glass
silicon carbide
carbide film
inert gas
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58032838A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59162149A (ja
Inventor
Michiko Maeda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ushio Denki KK
Original Assignee
Ushio Denki KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ushio Denki KK filed Critical Ushio Denki KK
Priority to JP58032838A priority Critical patent/JPS59162149A/ja
Publication of JPS59162149A publication Critical patent/JPS59162149A/ja
Publication of JPH0372585B2 publication Critical patent/JPH0372585B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Surface Treatment Of Glass (AREA)
  • Carbon And Carbon Compounds (AREA)
JP58032838A 1983-03-02 1983-03-02 石英ガラスの表面に炭化珪素膜を設ける方法 Granted JPS59162149A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58032838A JPS59162149A (ja) 1983-03-02 1983-03-02 石英ガラスの表面に炭化珪素膜を設ける方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58032838A JPS59162149A (ja) 1983-03-02 1983-03-02 石英ガラスの表面に炭化珪素膜を設ける方法

Publications (2)

Publication Number Publication Date
JPS59162149A JPS59162149A (ja) 1984-09-13
JPH0372585B2 true JPH0372585B2 (enrdf_load_stackoverflow) 1991-11-19

Family

ID=12369959

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58032838A Granted JPS59162149A (ja) 1983-03-02 1983-03-02 石英ガラスの表面に炭化珪素膜を設ける方法

Country Status (1)

Country Link
JP (1) JPS59162149A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT1184909B (it) * 1985-03-18 1987-10-28 Cselt Centro Studi Lab Telecom Procedimento ed apparecchiatura per la riduzione dei difetti di volume e di superficie nelle fibre ottiche in silice
FR2638733B1 (fr) * 1988-11-10 1991-12-20 Pechiney Electrometallurgie Procede de production de carbure de silicium micr onique

Also Published As

Publication number Publication date
JPS59162149A (ja) 1984-09-13

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