JPS59162149A - 石英ガラスの表面に炭化珪素膜を設ける方法 - Google Patents

石英ガラスの表面に炭化珪素膜を設ける方法

Info

Publication number
JPS59162149A
JPS59162149A JP58032838A JP3283883A JPS59162149A JP S59162149 A JPS59162149 A JP S59162149A JP 58032838 A JP58032838 A JP 58032838A JP 3283883 A JP3283883 A JP 3283883A JP S59162149 A JPS59162149 A JP S59162149A
Authority
JP
Japan
Prior art keywords
quartz glass
silicon carbide
carbide film
applying silicon
inert gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58032838A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0372585B2 (enrdf_load_stackoverflow
Inventor
Michiko Maeda
美智子 前田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ushio Denki KK
Ushio Inc
Original Assignee
Ushio Denki KK
Ushio Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ushio Denki KK, Ushio Inc filed Critical Ushio Denki KK
Priority to JP58032838A priority Critical patent/JPS59162149A/ja
Publication of JPS59162149A publication Critical patent/JPS59162149A/ja
Publication of JPH0372585B2 publication Critical patent/JPH0372585B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Surface Treatment Of Glass (AREA)
  • Carbon And Carbon Compounds (AREA)
JP58032838A 1983-03-02 1983-03-02 石英ガラスの表面に炭化珪素膜を設ける方法 Granted JPS59162149A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58032838A JPS59162149A (ja) 1983-03-02 1983-03-02 石英ガラスの表面に炭化珪素膜を設ける方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58032838A JPS59162149A (ja) 1983-03-02 1983-03-02 石英ガラスの表面に炭化珪素膜を設ける方法

Publications (2)

Publication Number Publication Date
JPS59162149A true JPS59162149A (ja) 1984-09-13
JPH0372585B2 JPH0372585B2 (enrdf_load_stackoverflow) 1991-11-19

Family

ID=12369959

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58032838A Granted JPS59162149A (ja) 1983-03-02 1983-03-02 石英ガラスの表面に炭化珪素膜を設ける方法

Country Status (1)

Country Link
JP (1) JPS59162149A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4659354A (en) * 1985-03-18 1987-04-21 Cselt-Centro Studie Laboratori Telecomunicazioni S.P.A. Method of producing silica optical fibres with reduced volume and surface defects
JPH02180710A (ja) * 1988-11-10 1990-07-13 Pechiney Electrometall 微粉状αまたはβ炭化ケイ素の製造方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4659354A (en) * 1985-03-18 1987-04-21 Cselt-Centro Studie Laboratori Telecomunicazioni S.P.A. Method of producing silica optical fibres with reduced volume and surface defects
US4702759A (en) * 1985-03-18 1987-10-27 Cselt-Centro Studi E Laboratori Telecommunicazioni S.P.A. Apparatus for reducing volume and surface defects in silica optical-fibres
JPH02180710A (ja) * 1988-11-10 1990-07-13 Pechiney Electrometall 微粉状αまたはβ炭化ケイ素の製造方法

Also Published As

Publication number Publication date
JPH0372585B2 (enrdf_load_stackoverflow) 1991-11-19

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