JPS6328421Y2 - - Google Patents

Description

[Detailed Description of the Invention] [Multiple Industrial Fields] The present invention relates to a defective pattern repairing device for repairing defective portions of a mask pattern used when printing a pattern on a printed circuit board.

[Conventional technology]

Photomasks used in manufacturing hybrid integrated circuits and printed wiring boards are made by printing a mask pattern onto a photosensitive film and developing it.

The mask used for printing is a pattern formed on a photosensitive film or the like by photographing with a reduction camera.

By the way, if the pattern is damaged during development or handling of the mask, the defective portion will appear on the printed circuit board, so the mask pattern is inspected when the mask is used. And if there is a defective part,
This must be repaired.

[Problem that the invention attempts to solve]

Previously, masks were examined under a microscope and defects caused by chips were manually filled in using a correction pen. For this reason, there are disadvantages in that it takes a lot of time to make corrections and also requires considerable skill.

The present invention is a novel invention that improves the conventional drawbacks as described above, and its purpose is to provide a defective pattern correction device that can quickly, accurately, and easily correct defective pattern portions due to chipping. It is in.

[Means for solving problems]

In order to achieve this purpose, the defect pattern correction apparatus of the present invention includes a stage on which a sample including a pattern having a defect due to chipping is placed, and a stage on which fine particles of defect pattern correction ink are sprayed. It is equipped with an ink ejecting device and a television camera device installed at the bottom of the stage and capable of displaying the pattern and the ink ejecting position on a screen, and detecting defects in the sample while observing the sample placed on the stage from below. This method is characterized in that the chipped pattern is corrected by spraying fine particles of the ink onto the patterned portion from above.Examples will be described in detail below.

[Example of idea]

The figure is a configuration diagram of an embodiment according to the present invention,
1 is a stage fixed to the ground, and a hole 2 as shown by the dotted line is provided in the center of the stage. Reference numeral 3 denotes a movable stage that moves in the X direction and the Y direction on the stage 1, and a hole 4 communicating with the hole 2 provided in the stage 1 is provided in the center thereof as shown by a dotted line. 5 is a sample placed on the hole 4 of the moving table 3; 6 is a motor for moving the moving table 3 in the X direction; 7 is a motor for moving the moving table 3 in the Y direction; 8 is an ink jetting device; 9
1 is a control unit that controls the ink ejecting device 8 and the motors 6 and 7, and 10 is a television camera, which is disposed directly below the direction in which ink particles are ejected from the ink ejecting device. Reference numeral 11 denotes a television monitor, which displays images captured by the television camera 10 on a cathode ray tube 12. Incidentally, on the cathode ray tube 12, the ejection position of the ink particles ejected from the ink ejecting device 8 is indicated by the intersection of a line 13 and a line 14.

Next, the operation will be explained.

First, an operator gives an instruction to the control unit 9 to operate the motors 6 and 7, moves the movable stage 3, and sequentially images the sample 5 from the end with the television camera 10. Display above. Then, the operator visually observes the pattern projected on the cathode ray tube 12, and if a defective part is found, immediately stops the movement of the moving table 3,
Next, the motors 6 and 7 are slightly moved to remove the defective part 15.
is moved to the intersection of lines 13 and 14.

This position is just below the ink ejecting device 8. When fine particles of ink are jetted onto the sample 5 from the ink jetting device 8 in this state, the fine particles of ink adhere to the defective portion 15, fill the defective portion 15, and correct the defective portion.

If the area of the defective area is large and cannot be filled with just one ink particle, the movable table 3 may be further moved slightly to eject ink particles again.

Incidentally, since the ink particles from the ink jetting device 8 can be ejected continuously or singly, circular or linear defects can also be corrected, and the diameter of the ink particles can be electrically controlled. Therefore, even small defects, for example, defects on the order of several plus [μm] in diameter, can be corrected without applying extra ink.

[Effect of idea]

As explained in detail above, according to the present invention,
Defects in samples such as mask materials used when printing patterns on silk screens and stainless steel screens can be corrected using an inkjet without manual intervention, which not only improves work efficiency but also reduces the diameter of ink particles and Since jetting or continuous jetting can be used freely, complex defects can be repaired quickly and easily, and there are no mistakes such as deviations from the pattern that occur when manually repairing, and many other benefits. It has the following.

Furthermore, at this time, since the ink jetting position is aimed at the defective portion of the pattern using a television camera and the ink is jetted, accurate pattern correction can be performed. In addition, in this case, since the specimen is observed with a TV camera from the bottom of the specimen, it is not hindered by the ink jetting from the top, and corrections can be made while observing the correction state even while the ink is being jetted. Easy to work with. In addition, since it is possible to simultaneously observe whether there is any remaining correction and whether the ink density is too high or too low in the ejected area, it is easy to confirm whether the pattern correction is successful or not.

[Brief explanation of drawings]

The figure is a configuration diagram of an embodiment of the present invention. In the figure, 1 is a stage, 2 is a hole, 3 is a moving stage, 4 is a hole, 5 is a sample, 8 is an ink jet device, 9
1 is a control unit, 10 is a television camera, and 11 is a television monitor.

Claims (1)

[Scope of utility model registration request] a stage on which a sample including a pattern with a defect due to chipping is placed; an ink ejecting device provided on the upper part of the stage for ejecting fine particles of ink for correcting the defect pattern; A television camera device capable of displaying the injection position on a screen is provided, and while observing the sample placed on a stage from below, fine particles of the ink are injected from above onto the defective pattern portion of the sample to form a chipped pattern. A defect pattern correction device characterized in that it corrects defect patterns.